DOI: 10.1063/1.2400093. Measurement of the thermal conductance of silicon nanowires at low temperature

Measurement of the thermal conductance of silicon nanowires at low temperature

10.1063/1.2400093

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

We have performed thermal conductance measurements on individual single-crystalline silicon suspended nanowires. The nanowires (130nm thick and 200nm wide) are fabricated by e-beam lithography and suspended between two separated pads on silicon on insulator substrate. We measure the thermal conductance of the phonon waveguide by the 3ω method. The cross section of the nanowire approaches the dominant phonon wavelength in silicon which is of the order of 100nm at 1K. Above 1.3K the conductance behaves as T3, but a deviation is measured at the lowest temperature which can be attributed to the reduced geometry.

Bibliography

Bourgeois, O., Fournier, T., & Chaussy, J. (2007). Measurement of the thermal conductance of silicon nanowires at low temperature. Journal of Applied Physics, 101(1).

Authors 3

Olivier Bourgeois (first)
Thierry Fournier (additional)
Jacques Chaussy (additional)

References 26 Referenced 74

10.1038/35010065 / Nature (London) (2000)
10.1063/1.1491300 / Appl. Phys. Lett. (2002)
{'year': '2003', 'key': '2023080103222697900_c3', 'article-title': 'Proceedings of the 2003 Rohsenow Symposium on Future Trends in Heat Transfer'} / Proceedings of the 2003 Rohsenow Symposium on Future Trends in Heat Transfer (2003)
10.1063/1.1619221 / Appl. Phys. Lett. (2003)
10.1063/1.1524305 / J. Appl. Phys. (2003)
10.1016/S0921-4526(99)02941-5 / Physica B (2000)
10.1103/PhysRevLett.94.057007 / Phys. Rev. Lett. (2005)
{'key': '2023080103222697900_c8', 'first-page': '1', 'volume': '263–264', 'year': '1999', 'journal-title': 'Physica B'} / Physica B (1999)
10.1103/PhysRevLett.81.232 / Phys. Rev. Lett. (1998)
10.1103/PhysRevLett.81.2958 / Phys. Rev. Lett. (1998)
10.1103/PhysRevB.51.3718 / Phys. Rev. B (1995)
10.1103/PhysRevB.32.5440 / Phys. Rev. B (1985)
10.1088/0305-4470/16/10/012 / J. Phys. A (1983)
10.1103/PhysRevLett.93.100501 / Phys. Rev. Lett. (2004)
10.1103/PhysRevA.62.052104 / Phys. Rev. A (2000)
10.1063/1.120979 / Appl. Phys. Lett. (1998)
10.1063/1.121269 / Appl. Phys. Lett. (1998)
10.1063/1.1141498 / Rev. Sci. Instrum. (1990)
10.1063/1.1378340 / Rev. Sci. Instrum. (2001)
10.1016/0040-6090(90)90014-5 / Thin Solid Films (1990)
10.1103/PhysRevLett.59.477 / Phys. Rev. Lett. (1987)
{'volume-title': 'Electrons and Phonons', 'year': '2001', 'key': '2023080103222697900_c23'} / Electrons and Phonons (2001)
{'key': '2023080103222697900_c24', 'first-page': '595', 'volume': '5', 'year': '1938', 'journal-title': 'Physica (Amsterdam)'} / Physica (Amsterdam) (1938)
10.1098/rspa.1955.0161 / Proc. R. Soc. London, Ser. A (1955)
C. Buzzi, Ph.D. thesis, Université Joseph Fourier, 1999.
10.1088/0957-4484/10/4/310 / Nanotechnology (1999)

Dates

Type	When
Created	18 years, 7 months ago (Jan. 18, 2007, 6:19 p.m.)
Deposited	2 years, 1 month ago (July 31, 2023, 11:22 p.m.)
Indexed	1 month ago (July 30, 2025, 6:48 a.m.)
Issued	18 years, 8 months ago (Jan. 1, 2007)
Published	18 years, 8 months ago (Jan. 1, 2007)
Published Online	18 years, 7 months ago (Jan. 12, 2007)
Published Print	18 years, 8 months ago (Jan. 1, 2007)

Funders 0

None

BibTeX

@article{Bourgeois_2007, title={Measurement of the thermal conductance of silicon nanowires at low temperature}, volume={101}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.2400093}, DOI={10.1063/1.2400093}, number={1}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Bourgeois, Olivier and Fournier, Thierry and Chaussy, Jacques}, year={2007}, month=jan }

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