DOI: 10.1063/1.2358204. Defect structure in micropillars using x-ray microdiffraction

Defect structure in micropillars using x-ray microdiffraction

10.1063/1.2358204

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

White beam x-ray microdiffraction is used to investigate the microstructure of micron-sized Si, Au, and Al pillars fabricated by focused ion beam (FIB) machining. Comparison with a Laue pattern obtained from a Si pillar made by reactive ion etching reveals that the FIB damages the Si structure. The Laue reflections obtained from the metallic pillars fabricated by FIB show continuous and discontinuous streakings, demonstrating the presence of strain gradients.

Bibliography

MaaÎ², R., Grolimund, D., Van Petegem, S., Willimann, M., Jensen, M., Van Swygenhoven, H., Lehnert, T., Gijs, M. A. M., Volkert, C. A., Lilleodden, E. T., & Schwaiger, R. (2006). Defect structure in micropillars using x-ray microdiffraction. Applied Physics Letters, 89(15).

Authors 11

R. Maaβ (first)
D. Grolimund (additional)
S. Van Petegem (additional)
M. Willimann (additional)
M. Jensen (additional)
H. Van Swygenhoven (additional)
T. Lehnert (additional)
M. A. M. Gijs (additional)
C. A. Volkert (additional)
E. T. Lilleodden (additional)
R. Schwaiger (additional)

References 16 Referenced 70

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10.1016/j.actamat.2004.12.031 / Acta Mater. (2005)
{'volume-title': 'Philos. Mag.', 'key': '2023062423191179100_c3'} / Philos. Mag.
10.1016/j.msea.2005.03.082 / Mater. Sci. Eng., A (2005)
10.1016/j.actamat.2005.05.023 / Acta Mater. (2005)
{'key': '2023062423191179100_c6', 'first-page': '5777', 'volume': '312', 'year': '2006', 'journal-title': 'Science'} / Science (2006)
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{'volume-title': 'Mater. Sci. Eng., A', 'key': '2023062423191179100_c9'} / Mater. Sci. Eng., A
10.1016/S0304-3991(02)00193-6 / Ultramicroscopy (2003)
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{'volume-title': 'Microdiffraction Analysis of Hierarchical Dislocation Organization', 'year': '2005', 'first-page': '1', 'key': '2023062423191179100_c12'} / Microdiffraction Analysis of Hierarchical Dislocation Organization (2005)
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Dates

Type	When
Created	18 years, 10 months ago (Oct. 12, 2006, 1:55 a.m.)
Deposited	2 years, 2 months ago (June 25, 2023, 12:39 a.m.)
Indexed	1 week ago (Aug. 23, 2025, 1:02 a.m.)
Issued	18 years, 10 months ago (Oct. 9, 2006)
Published	18 years, 10 months ago (Oct. 9, 2006)
Published Online	18 years, 10 months ago (Oct. 11, 2006)
Published Print	18 years, 10 months ago (Oct. 9, 2006)

Funders 0

None

BibTeX

@article{Maa__2006, title={Defect structure in micropillars using x-ray microdiffraction}, volume={89}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.2358204}, DOI={10.1063/1.2358204}, number={15}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Maaβ, R. and Grolimund, D. and Van Petegem, S. and Willimann, M. and Jensen, M. and Van Swygenhoven, H. and Lehnert, T. and Gijs, M. A. M. and Volkert, C. A. and Lilleodden, E. T. and Schwaiger, R.}, year={2006}, month=oct }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        23
      ]
    ],
    "date-time": "2025-08-23T05:02:39Z",
    "timestamp": 1755925359175,
    "version": "3.41.2"
  },
  "reference-count": 16,
  "publisher": "AIP Publishing",
  "issue": "15",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2006,
        10,
        9
      ]
    ]
  },
  "abstract": "<jats:p>White beam x-ray microdiffraction is used to investigate the microstructure of micron-sized Si, Au, and Al pillars fabricated by focused ion beam (FIB) machining. Comparison with a Laue pattern obtained from a Si pillar made by reactive ion etching reveals that the FIB damages the Si structure. The Laue reflections obtained from the metallic pillars fabricated by FIB show continuous and discontinuous streakings, demonstrating the presence of strain gradients.</jats:p>",
  "DOI": "10.1063/1.2358204",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        10,
        12
      ]
    ],
    "date-time": "2006-10-12T05:55:47Z",
    "timestamp": 1160632547000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 70,
  "title": "Defect structure in micropillars using x-ray microdiffraction",
  "prefix": "10.1063",
  "volume": "89",
  "author": [
    {
      "given": "R.",
      "family": "Maa\u03b2",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Paul Scherrer Institute , CH-5232 Villigen, Switzerland"
        }
      ]
    },
    {
      "given": "D.",
      "family": "Grolimund",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Paul Scherrer Institute , CH-5232 Villigen, Switzerland"
        }
      ]
    },
    {
      "given": "S.",
      "family": "Van Petegem",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Paul Scherrer Institute , CH-5232 Villigen, Switzerland"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Willimann",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Paul Scherrer Institute , CH-5232 Villigen, Switzerland"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Jensen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Paul Scherrer Institute , CH-5232 Villigen, Switzerland"
        }
      ]
    },
    {
      "given": "H.",
      "family": "Van Swygenhoven",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Paul Scherrer Institute , CH-5232 Villigen, Switzerland"
        }
      ]
    },
    {
      "given": "T.",
      "family": "Lehnert",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institute of Microelectronics and Microsystems Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne, , CH-1015 Lausanne, Switzerland"
        }
      ]
    },
    {
      "given": "M. A. M.",
      "family": "Gijs",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institute of Microelectronics and Microsystems Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne, , CH-1015 Lausanne, Switzerland"
        }
      ]
    },
    {
      "given": "C. A.",
      "family": "Volkert",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Materialforschung-II , Forschungszentrum Karlsruhe, D-76021 Karlsruhe, Germany"
        }
      ]
    },
    {
      "given": "E. T.",
      "family": "Lilleodden",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Materialforschung-II , Forschungszentrum Karlsruhe, D-76021 Karlsruhe, Germany"
        }
      ]
    },
    {
      "given": "R.",
      "family": "Schwaiger",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Materialforschung-II , Forschungszentrum Karlsruhe, D-76021 Karlsruhe, Germany"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2006,
        10,
        11
      ]
    ]
  },
  "reference": [
    {
      "key": "2023062423191179100_c1",
      "first-page": "5699",
      "volume": "306",
      "year": "2004",
      "journal-title": "Science"
    },
    {
      "key": "2023062423191179100_c2",
      "doi-asserted-by": "publisher",
      "first-page": "1821",
      "DOI": "10.1016/j.actamat.2004.12.031",
      "volume": "53",
      "year": "2005",
      "journal-title": "Acta Mater."
    },
    {
      "volume-title": "Philos. Mag.",
      "key": "2023062423191179100_c3"
    },
    {
      "key": "2023062423191179100_c4",
      "doi-asserted-by": "crossref",
      "first-page": "268",
      "DOI": "10.1016/j.msea.2005.03.082",
      "volume": "400-401",
      "year": "2005",
      "journal-title": "Mater. Sci. Eng., A"
    },
    {
      "key": "2023062423191179100_c5",
      "doi-asserted-by": "publisher",
      "first-page": "4065",
      "DOI": "10.1016/j.actamat.2005.05.023",
      "volume": "53",
      "year": "2005",
      "journal-title": "Acta Mater."
    },
    {
      "key": "2023062423191179100_c6",
      "first-page": "5777",
      "volume": "312",
      "year": "2006",
      "journal-title": "Science"
    },
    {
      "key": "2023062423191179100_c7",
      "doi-asserted-by": "publisher",
      "first-page": "2661",
      "DOI": "10.1016/j.jmps.2005.07.005",
      "volume": "53",
      "year": "2005",
      "journal-title": "J. Mech. Phys. Solids"
    },
    {
      "key": "2023062423191179100_c8",
      "doi-asserted-by": "publisher",
      "first-page": "1937",
      "DOI": "10.1016/j.scriptamat.2006.02.003",
      "volume": "54",
      "year": "2006",
      "journal-title": "Scr. Mater."
    },
    {
      "volume-title": "Mater. Sci. Eng., A",
      "key": "2023062423191179100_c9"
    },
    {
      "key": "2023062423191179100_c10",
      "doi-asserted-by": "crossref",
      "first-page": "37",
      "DOI": "10.1016/S0304-3991(02)00193-6",
      "volume": "94",
      "year": "2003",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023062423191179100_c11",
      "doi-asserted-by": "crossref",
      "first-page": "49",
      "DOI": "10.1016/S0921-5093(00)01663-4",
      "volume": "309-310",
      "year": "2001",
      "journal-title": "Mater. Sci. Eng., A"
    },
    {
      "volume-title": "Microdiffraction Analysis of Hierarchical Dislocation Organization",
      "year": "2005",
      "first-page": "1",
      "key": "2023062423191179100_c12"
    },
    {
      "key": "2023062423191179100_c13",
      "doi-asserted-by": "publisher",
      "first-page": "66",
      "DOI": "10.1557/jmr.2004.19.1.66",
      "volume": "19",
      "year": "2004",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "2023062423191179100_c14",
      "doi-asserted-by": "publisher",
      "first-page": "213",
      "DOI": "10.1111/j.0022-2720.2004.01327.x",
      "volume": "214",
      "year": "2004",
      "journal-title": "J. Microsc."
    },
    {
      "key": "2023062423191179100_c15",
      "doi-asserted-by": "publisher",
      "first-page": "3521",
      "DOI": "10.1063/1.349247",
      "volume": "70",
      "year": "1991",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2023062423191179100_c16",
      "doi-asserted-by": "publisher",
      "first-page": "749",
      "DOI": "10.1063/1.1389321",
      "volume": "79",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2358204/13176897/151905_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2358204/13176897/151905_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        6,
        25
      ]
    ],
    "date-time": "2023-06-25T04:39:20Z",
    "timestamp": 1687667960000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/89/15/151905/143148/Defect-structure-in-micropillars-using-x-ray"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2006,
        10,
        9
      ]
    ]
  },
  "references-count": 16,
  "journal-issue": {
    "issue": "15",
    "published-print": {
      "date-parts": [
        [
          2006,
          10,
          9
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.2358204",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2006,
        10,
        9
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2006,
        10,
        9
      ]
    ]
  },
  "article-number": "151905"
}