DOI: 10.1063/1.2234747. Photoluminescence imaging of silicon wafers

Photoluminescence imaging of silicon wafers

10.1063/1.2234747

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Photoluminescence imaging is demonstrated to be an extremely fast spatially resolved characterization technique for large silicon wafers. The spatial variation of the effective minority carrier lifetime is measured without being affected by minority carrier trapping or by excess carriers in space charge regions, effects that lead to experimental artifacts in other techniques. Photoluminescence imaging is contactless and can therefore be used for process monitoring before and after individual processing stages, for example, in photovoltaics research. Photoluminescence imaging is also demonstrated to be fast enough to be used as an in-line tool for spatially resolved characterization in an industrial environment.

Bibliography

Trupke, T., Bardos, R. A., Schubert, M. C., & Warta, W. (2006). Photoluminescence imaging of silicon wafers. Applied Physics Letters, 89(4).

Authors 4

T. Trupke (first)
R. A. Bardos (additional)
M. C. Schubert (additional)
W. Warta (additional)

References 21 Referenced 599

{'year': '2005', 'key': '2023080500382138700_c1'} (2005)
10.1063/1.1638618 / J. Appl. Phys. (2004)
10.1063/1.1541115 / Appl. Phys. Lett. (2003)
10.1063/1.2165274 / Appl. Phys. Lett. (2006)
{'year': '1996', 'key': '2023080500382138700_c5'} (1996)
{'year': '2005', 'key': '2023080500382138700_c6'} (2005)
10.1063/1.2034109 / Appl. Phys. Lett. (2005)
10.1088/0268-1242/15/8/310 / Semicond. Sci. Technol. (2000)
{'year': '1994', 'key': '2023080500382138700_c9'} (1994)
{'year': '2000', 'key': '2023080500382138700_c10'} (2000)
{'year': '2001', 'key': '2023080500382138700_c11'} (2001)
10.1063/1.1600531 / J. Appl. Phys. (2003)
10.1063/1.2077833 / Appl. Phys. Lett. (2005)
{'year': '2005', 'key': '2023080500382138700_c14'} (2005)
{'year': '2005', 'key': '2023080500382138700_c15'} (2005)
10.1063/1.1978979 / Appl. Phys. Lett. (2005)
{'year': '2005', 'key': '2023080500382138700_c17', 'first-page': '663'} (2005)
{'year': '2006', 'key': '2023080500382138700_c18'} (2006)
{'year': '2006', 'key': '2023080500382138700_c19'} (2006)
{'year': '2006', 'key': '2023080500382138700_c20'} (2006)
{'key': '2023080500382138700_c21'}

Dates

Type	When
Created	19 years, 1 month ago (July 26, 2006, 6:05 p.m.)
Deposited	2 years ago (Aug. 4, 2023, 8:38 p.m.)
Indexed	2 days ago (Sept. 2, 2025, 6:38 a.m.)
Issued	19 years, 1 month ago (July 24, 2006)
Published	19 years, 1 month ago (July 24, 2006)
Published Online	19 years, 1 month ago (July 26, 2006)
Published Print	19 years, 1 month ago (July 24, 2006)

Funders 0

None

BibTeX

@article{Trupke_2006, title={Photoluminescence imaging of silicon wafers}, volume={89}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.2234747}, DOI={10.1063/1.2234747}, number={4}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Trupke, T. and Bardos, R. A. and Schubert, M. C. and Warta, W.}, year={2006}, month=jul }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        9,
        2
      ]
    ],
    "date-time": "2025-09-02T10:38:47Z",
    "timestamp": 1756809527536,
    "version": "3.41.2"
  },
  "reference-count": 21,
  "publisher": "AIP Publishing",
  "issue": "4",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2006,
        7,
        24
      ]
    ]
  },
  "abstract": "<jats:p>Photoluminescence imaging is demonstrated to be an extremely fast spatially resolved characterization technique for large silicon wafers. The spatial variation of the effective minority carrier lifetime is measured without being affected by minority carrier trapping or by excess carriers in space charge regions, effects that lead to experimental artifacts in other techniques. Photoluminescence imaging is contactless and can therefore be used for process monitoring before and after individual processing stages, for example, in photovoltaics research. Photoluminescence imaging is also demonstrated to be fast enough to be used as an in-line tool for spatially resolved characterization in an industrial environment.</jats:p>",
  "DOI": "10.1063/1.2234747",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        7,
        26
      ]
    ],
    "date-time": "2006-07-26T22:05:55Z",
    "timestamp": 1153951555000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 599,
  "title": "Photoluminescence imaging of silicon wafers",
  "prefix": "10.1063",
  "volume": "89",
  "author": [
    {
      "given": "T.",
      "family": "Trupke",
      "sequence": "first",
      "affiliation": [
        {
          "name": "University of New South Wales Centre of Excellence for Advanced Silicon Photovoltaics and Photonics, , Sydney 2052, Australia"
        }
      ]
    },
    {
      "given": "R. A.",
      "family": "Bardos",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of New South Wales Centre of Excellence for Advanced Silicon Photovoltaics and Photonics, , Sydney 2052, Australia"
        }
      ]
    },
    {
      "given": "M. C.",
      "family": "Schubert",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Fraunhofer Institute for Solar Energy Systems , Heidenhofstrasse 2, D-79110 Freiburg, Germany"
        }
      ]
    },
    {
      "given": "W.",
      "family": "Warta",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Fraunhofer Institute for Solar Energy Systems , Heidenhofstrasse 2, D-79110 Freiburg, Germany"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2006,
        7,
        26
      ]
    ]
  },
  "reference": [
    {
      "year": "2005",
      "key": "2023080500382138700_c1"
    },
    {
      "key": "2023080500382138700_c2",
      "doi-asserted-by": "publisher",
      "first-page": "1854",
      "DOI": "10.1063/1.1638618",
      "volume": "95",
      "year": "2004",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2023080500382138700_c3",
      "doi-asserted-by": "publisher",
      "first-page": "757",
      "DOI": "10.1063/1.1541115",
      "volume": "82",
      "year": "2003",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023080500382138700_c4",
      "doi-asserted-by": "publisher",
      "first-page": "053504",
      "DOI": "10.1063/1.2165274",
      "volume": "88",
      "year": "2006",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "year": "1996",
      "key": "2023080500382138700_c5"
    },
    {
      "year": "2005",
      "key": "2023080500382138700_c6"
    },
    {
      "key": "2023080500382138700_c7",
      "doi-asserted-by": "publisher",
      "first-page": "093503",
      "DOI": "10.1063/1.2034109",
      "volume": "87",
      "year": "2005",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023080500382138700_c8",
      "doi-asserted-by": "publisher",
      "first-page": "840",
      "DOI": "10.1088/0268-1242/15/8/310",
      "volume": "15",
      "year": "2000",
      "journal-title": "Semicond. Sci. Technol."
    },
    {
      "year": "1994",
      "key": "2023080500382138700_c9"
    },
    {
      "year": "2000",
      "key": "2023080500382138700_c10"
    },
    {
      "year": "2001",
      "key": "2023080500382138700_c11"
    },
    {
      "key": "2023080500382138700_c12",
      "doi-asserted-by": "publisher",
      "first-page": "4139",
      "DOI": "10.1063/1.1600531",
      "volume": "94",
      "year": "2003",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2023080500382138700_c13",
      "doi-asserted-by": "publisher",
      "first-page": "142104",
      "DOI": "10.1063/1.2077833",
      "volume": "87",
      "year": "2005",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "year": "2005",
      "key": "2023080500382138700_c14"
    },
    {
      "year": "2005",
      "key": "2023080500382138700_c15"
    },
    {
      "key": "2023080500382138700_c16",
      "doi-asserted-by": "publisher",
      "first-page": "262108",
      "DOI": "10.1063/1.1978979",
      "volume": "86",
      "year": "2005",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "year": "2005",
      "key": "2023080500382138700_c17",
      "first-page": "663"
    },
    {
      "year": "2006",
      "key": "2023080500382138700_c18"
    },
    {
      "year": "2006",
      "key": "2023080500382138700_c19"
    },
    {
      "year": "2006",
      "key": "2023080500382138700_c20"
    },
    {
      "key": "2023080500382138700_c21"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2234747/13160558/044107_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2234747/13160558/044107_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        8,
        5
      ]
    ],
    "date-time": "2023-08-05T00:38:32Z",
    "timestamp": 1691195912000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/89/4/044107/986416/Photoluminescence-imaging-of-silicon-wafers"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2006,
        7,
        24
      ]
    ]
  },
  "references-count": 21,
  "journal-issue": {
    "issue": "4",
    "published-print": {
      "date-parts": [
        [
          2006,
          7,
          24
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.2234747",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2006,
        7,
        24
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2006,
        7,
        24
      ]
    ]
  },
  "article-number": "044107"
}