DOI: 10.1063/1.2211300. Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60nm resolution tomography

Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60nm resolution tomography

10.1063/1.2211300

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

An energy-tunable transmission hard x-ray microscope with close to 60nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.

Bibliography

Yin, G.-C., Tang, M.-T., Song, Y.-F., Chen, F.-R., Liang, K. S., Duewer, F. W., Yun, W., Ko, C.-H., & Shieh, H.-P. D. (2006). Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60nm resolution tomography. Applied Physics Letters, 88(24).

Authors 9

Gung-Chian Yin (first)
Mau-Tsu Tang (additional)
Yen-Fang Song (additional)
Fu-Rong Chen (additional)
Keng S. Liang (additional)
Frederick W. Duewer (additional)
Wenbing Yun (additional)
Chen-Hao Ko (additional)
Han-Ping D. Shieh (additional)

References 19 Referenced 86

10.1016/S0304-3991(98)00054-0 / Ultramicroscopy (1998)
{'key': '2023080100370693000_c2', 'first-page': '79', 'volume': '36', 'year': '2003', 'journal-title': 'J. Phys. D'} / J. Phys. D (2003)
{'volume-title': 'X-ray Microscopy and Spectromicroscopy', 'year': '1997', 'key': '2023080100370693000_c3'} / X-ray Microscopy and Spectromicroscopy (1997)
10.1038/44791 / Nature (London) (1999)
10.1063/1.108400 / Appl. Phys. Lett. (1992)
10.1063/1.1149956 / Rev. Sci. Instrum. (1999)
10.1063/1.1149744 / Rev. Sci. Instrum. (1999)
10.1038/nature03719 / Nature (London) (2005)
10.1063/1.1501451 / Appl. Phys. Lett. (2002)
{'year': '2005', 'key': '2023080100370693000_c10', 'first-page': '258'} (2005)
10.1063/1.1757821 / AIP Conf. Proc. (2004)
10.1364/AO.32.006920 / Appl. Opt. (1993)
10.1107/S0909049594007259 / J. Synchrotron Radiat. (1994)
{'first-page': '109', 'volume-title': 'Digital Image Processing', 'year': '1992', 'key': '2023080100370693000_c14'} / Digital Image Processing (1992)
10.1093/jmicro/53.1.1 / J. Electron. Microsc. (2004)
{'first-page': '163', 'volume-title': 'Proceedings of IEEE International Conference on Cybernetics and Society', 'year': '1975', 'key': '2023080100370693000_c16'} / Proceedings of IEEE International Conference on Cybernetics and Society (1975)
{'key': '2023080100370693000_c17'}
{'key': '2023080100370693000_c18'}
10.1063/1.124225 / Appl. Phys. Lett. (1999)

Dates

Type	When
Created	19 years, 2 months ago (June 15, 2006, 6:19 p.m.)
Deposited	2 years ago (July 31, 2023, 8:37 p.m.)
Indexed	4 weeks ago (July 30, 2025, 6:46 a.m.)
Issued	19 years, 2 months ago (June 12, 2006)
Published	19 years, 2 months ago (June 12, 2006)
Published Online	19 years, 2 months ago (June 15, 2006)
Published Print	19 years, 2 months ago (June 12, 2006)

Funders 0

None

BibTeX

@article{Yin_2006, title={Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60nm resolution tomography}, volume={88}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.2211300}, DOI={10.1063/1.2211300}, number={24}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Yin, Gung-Chian and Tang, Mau-Tsu and Song, Yen-Fang and Chen, Fu-Rong and Liang, Keng S. and Duewer, Frederick W. and Yun, Wenbing and Ko, Chen-Hao and Shieh, Han-Ping D.}, year={2006}, month=jun }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T10:46:59Z",
    "timestamp": 1753872419758,
    "version": "3.41.2"
  },
  "reference-count": 19,
  "publisher": "AIP Publishing",
  "issue": "24",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2006,
        6,
        12
      ]
    ]
  },
  "abstract": "<jats:p>An energy-tunable transmission hard x-ray microscope with close to 60nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.</jats:p>",
  "DOI": "10.1063/1.2211300",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        6,
        15
      ]
    ],
    "date-time": "2006-06-15T22:19:36Z",
    "timestamp": 1150409976000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 86,
  "title": "Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60nm resolution tomography",
  "prefix": "10.1063",
  "volume": "88",
  "author": [
    {
      "given": "Gung-Chian",
      "family": "Yin",
      "sequence": "first",
      "affiliation": [
        {
          "name": "National Synchrotron Radiation Research Center , 101 Hsin-Ann Road, Hsinchu 30076, Taiwan and , Hsinchu 300, Taiwan"
        },
        {
          "name": "Department of Photonics and Display Institute National Chiao Tung University , 101 Hsin-Ann Road, Hsinchu 30076, Taiwan and , Hsinchu 300, Taiwan"
        }
      ]
    },
    {
      "given": "Mau-Tsu",
      "family": "Tang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "National Synchrotron Radiation Research Center , 101 Hsin-Ann Road, Hsinchu 30076, Taiwan"
        }
      ]
    },
    {
      "given": "Yen-Fang",
      "family": "Song",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "National Synchrotron Radiation Research Center , 101 Hsin-Ann Road, Hsinchu 30076, Taiwan"
        }
      ]
    },
    {
      "given": "Fu-Rong",
      "family": "Chen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "National Synchrotron Radiation Research Center , 101 Hsin-Ann Road, Hsinchu 30076, Taiwan"
        }
      ]
    },
    {
      "given": "Keng S.",
      "family": "Liang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "National Synchrotron Radiation Research Center , 101 Hsin-Ann Road, Hsinchu 30076, Taiwan"
        }
      ]
    },
    {
      "given": "Frederick W.",
      "family": "Duewer",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Xradia Inc. , 5052 Commericial Circle, Concord, California 94520"
        }
      ]
    },
    {
      "given": "Wenbing",
      "family": "Yun",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Xradia Inc. , 5052 Commericial Circle, Concord, California 94520"
        }
      ]
    },
    {
      "given": "Chen-Hao",
      "family": "Ko",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Electrical Engineering, Yuan Ze University , 135 Yuan Tung Road, Chungli 320, Taiwan"
        }
      ]
    },
    {
      "given": "Han-Ping D.",
      "family": "Shieh",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Photonics and Display Institute , National Chiao Tung University, Hsinchu 300, Taiwan"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2006,
        6,
        15
      ]
    ]
  },
  "reference": [
    {
      "key": "2023080100370693000_c1",
      "doi-asserted-by": "publisher",
      "first-page": "85",
      "DOI": "10.1016/S0304-3991(98)00054-0",
      "volume": "75",
      "year": "1998",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023080100370693000_c2",
      "first-page": "79",
      "volume": "36",
      "year": "2003",
      "journal-title": "J. Phys. D"
    },
    {
      "volume-title": "X-ray Microscopy and Spectromicroscopy",
      "year": "1997",
      "key": "2023080100370693000_c3"
    },
    {
      "key": "2023080100370693000_c4",
      "doi-asserted-by": "publisher",
      "first-page": "895",
      "DOI": "10.1038/44791",
      "volume": "401",
      "year": "1999",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2023080100370693000_c5",
      "doi-asserted-by": "publisher",
      "first-page": "1877",
      "DOI": "10.1063/1.108400",
      "volume": "61",
      "year": "1992",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023080100370693000_c6",
      "doi-asserted-by": "publisher",
      "first-page": "3537",
      "DOI": "10.1063/1.1149956",
      "volume": "70",
      "year": "1999",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2023080100370693000_c7",
      "doi-asserted-by": "publisher",
      "first-page": "2238",
      "DOI": "10.1063/1.1149744",
      "volume": "70",
      "year": "1999",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2023080100370693000_c8",
      "doi-asserted-by": "publisher",
      "first-page": "1210",
      "DOI": "10.1038/nature03719",
      "volume": "435",
      "year": "2005",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2023080100370693000_c9",
      "doi-asserted-by": "publisher",
      "first-page": "1527",
      "DOI": "10.1063/1.1501451",
      "volume": "81",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "year": "2005",
      "key": "2023080100370693000_c10",
      "first-page": "258"
    },
    {
      "key": "2023080100370693000_c11",
      "doi-asserted-by": "publisher",
      "first-page": "412",
      "DOI": "10.1063/1.1757821",
      "volume": "705",
      "year": "2004",
      "journal-title": "AIP Conf. Proc."
    },
    {
      "key": "2023080100370693000_c12",
      "doi-asserted-by": "crossref",
      "first-page": "6920",
      "DOI": "10.1364/AO.32.006920",
      "volume": "32",
      "year": "1993",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "2023080100370693000_c13",
      "doi-asserted-by": "publisher",
      "first-page": "37",
      "DOI": "10.1107/S0909049594007259",
      "volume": "1",
      "year": "1994",
      "journal-title": "J. Synchrotron Radiat."
    },
    {
      "first-page": "109",
      "volume-title": "Digital Image Processing",
      "year": "1992",
      "key": "2023080100370693000_c14"
    },
    {
      "key": "2023080100370693000_c15",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1093/jmicro/53.1.1",
      "volume": "53",
      "year": "2004",
      "journal-title": "J. Electron. Microsc."
    },
    {
      "first-page": "163",
      "volume-title": "Proceedings of IEEE International Conference on Cybernetics and Society",
      "year": "1975",
      "key": "2023080100370693000_c16"
    },
    {
      "key": "2023080100370693000_c17"
    },
    {
      "key": "2023080100370693000_c18"
    },
    {
      "key": "2023080100370693000_c19",
      "doi-asserted-by": "publisher",
      "first-page": "3924",
      "DOI": "10.1063/1.124225",
      "volume": "74",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2211300/13178998/241115_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2211300/13178998/241115_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        8,
        1
      ]
    ],
    "date-time": "2023-08-01T00:37:17Z",
    "timestamp": 1690850237000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/88/24/241115/910900/Energy-tunable-transmission-x-ray-microscope-for"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2006,
        6,
        12
      ]
    ]
  },
  "references-count": 19,
  "journal-issue": {
    "issue": "24",
    "published-print": {
      "date-parts": [
        [
          2006,
          6,
          12
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.2211300",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2006,
        6,
        12
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2006,
        6,
        12
      ]
    ]
  },
  "article-number": "241115"
}