DOI: 10.1063/1.2200871. Macroporous silicon: Homogeneity investigations and fabrication tolerances of a simple cubic three-dimensional photonic crystal

Macroporous silicon: Homogeneity investigations and fabrication tolerances of a simple cubic three-dimensional photonic crystal

10.1063/1.2200871

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Large area three-dimensional (3D) photonic crystals have been fabricated either by layer-by-layer methods, colloidal self-assembly, or by macroporous silicon etching. The last mentioned method has proven to be a versatile and fast technique to manufacture simple cubic 3D photonic crystals, having a complete photonic band gap with a width of 4.99% in the infrared spectral range. This report is focused on the investigation of their homogeneity and additional numerical simulations concerning the tolerable disorder allowing still for a complete photonic band gap. Fabry-Pérot resonators, which are realized by 3D photonic crystals containing planar defects, are characterized optically in spatially resolved transmission measurements by scanning infrared Fourier spectroscopy. The impact of the observed inhomogeneities on the complete photonic band gap is studied in detail by modeling the influence of structural parameters. Fabrication tolerances for the simple cubic arrangement of intersecting air spheres in silicon are deduced.

Bibliography

Matthias, S., Hillebrand, R., MÃ¼ller, F., & GÃ¶sele, U. (2006). Macroporous silicon: Homogeneity investigations and fabrication tolerances of a simple cubic three-dimensional photonic crystal. Journal of Applied Physics, 99(11).

Authors 4

Sven Matthias (first)
Reinald Hillebrand (additional)
Frank Müller (additional)
Ulrich Gösele (additional)

References 23 Referenced 23

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Dates

Type	When
Created	19 years, 2 months ago (June 21, 2006, 6:37 p.m.)
Deposited	2 years, 2 months ago (June 25, 2023, 12:40 a.m.)
Indexed	3 weeks, 5 days ago (July 30, 2025, 6:46 a.m.)
Issued	19 years, 2 months ago (June 1, 2006)
Published	19 years, 2 months ago (June 1, 2006)
Published Online	19 years, 2 months ago (June 5, 2006)
Published Print	19 years, 2 months ago (June 1, 2006)

Funders 0

None

BibTeX

@article{Matthias_2006, title={Macroporous silicon: Homogeneity investigations and fabrication tolerances of a simple cubic three-dimensional photonic crystal}, volume={99}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.2200871}, DOI={10.1063/1.2200871}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Matthias, Sven and Hillebrand, Reinald and Müller, Frank and Gösele, Ulrich}, year={2006}, month=jun }

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