DOI: 10.1063/1.2173554. Application of Electron Tomography for Semiconductor Device Analysis

Application of Electron Tomography for Semiconductor Device Analysis

10.1063/1.2173554

Crossref proceedings-article

AIP

AIP Conference Proceedings (317)

Bibliography

KuÌbel, C. (2006). Application of Electron Tomography for Semiconductor Device Analysis. AIP Conference Proceedings, 817, 223â228.

Authors 1

C. Kübel (first)

References 0 Referenced 5

None

Dates

Type	When
Created	19 years, 5 months ago (Feb. 24, 2006, 6:04 p.m.)
Deposited	2 years, 4 months ago (April 20, 2023, 6:36 a.m.)
Indexed	1 year ago (Aug. 5, 2024, 8:16 p.m.)
Issued	19 years, 7 months ago (Jan. 1, 2006)
Published	19 years, 7 months ago (Jan. 1, 2006)
Published Print	19 years, 7 months ago (Jan. 1, 2006)

Funders 0

None

BibTeX

@inproceedings{Ku_bel_2006, title={Application of Electron Tomography for Semiconductor Device Analysis}, volume={817}, ISSN={0094-243X}, url={http://dx.doi.org/10.1063/1.2173554}, DOI={10.1063/1.2173554}, booktitle={AIP Conference Proceedings}, publisher={AIP}, author={Kübel, C.}, year={2006}, pages={223–228} }

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