DOI: 10.1063/1.2163610. Stress in Co-Ni-Fe and Ni-Fe Films

10.1063/1.2163610

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The stress measured at 25°C in vapor-deposited Co-Ni-Fe and Ni-Fe films was investigated as a function of composition, grain size, substrate temperature, film thickness, and annealing parameters. The stress was determined by measuring the change in curvature of circular substrates with an interferometer. Various compositions were studied. The ranges of each constituent were 0%–50% Co, 50%–90% Ni, and 10%–50% Fe. A dependence of stress on composition existed even when the substrate temperature and grain size remained constant. The residual stress has a nearly parabolic dependence on substrate deposition temperature with a minimum in the vicinity of 275°C. This is in general agreement with the results for Ni-Fe films using different techniques and previously reported by Weiss and Smith. The stress is nearly constant for film thicknesses 1000–10 000 Å and can be reduced by annealing, provided the annealing temperature is greater than the temperature of deposition.

Bibliography

Gorres, J. M., Hanson, M. M., & Lo, D. S. (1968). Stress in Co-Ni-Fe and Ni-Fe Films. Journal of Applied Physics, 39(2), 743â744.

Authors 3

J. M. Gorres (first)
M. M. Hanson (additional)
D. S. Lo (additional)

References 7 Referenced 16

{'key': '2024020210275001700_r1'}
10.1063/1.1728644 / J. Appl. Phys. (1962)
10.1038/193565a0 / Nature (1962)
10.1063/1.1709619 / J. Appl. Phys. (1967)
{'key': '2024020210275001700_r5'}
10.1063/1.1754418 / Appl. Phys. Letters (1966)
10.1063/1.1754678 / Appl. Phys. Letters (1966)

Dates

Type	When
Created	19 years, 7 months ago (Jan. 12, 2006, 4:17 p.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 6:05 a.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 5:59 a.m.)
Issued	57 years, 6 months ago (Feb. 1, 1968)
Published	57 years, 6 months ago (Feb. 1, 1968)
Published Print	57 years, 6 months ago (Feb. 1, 1968)

Funders 0

None

BibTeX

@article{Gorres_1968, title={Stress in Co-Ni-Fe and Ni-Fe Films}, volume={39}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.2163610}, DOI={10.1063/1.2163610}, number={2}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Gorres, J. M. and Hanson, M. M. and Lo, D. S.}, year={1968}, month=feb, pages={743–744} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T10:59:50Z",
    "timestamp": 1707044390643
  },
  "reference-count": 7,
  "publisher": "AIP Publishing",
  "issue": "2",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1968,
        2,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The stress measured at 25\u00b0C in vapor-deposited Co-Ni-Fe and Ni-Fe films was investigated as a function of composition, grain size, substrate temperature, film thickness, and annealing parameters. The stress was determined by measuring the change in curvature of circular substrates with an interferometer. Various compositions were studied. The ranges of each constituent were 0%\u201350% Co, 50%\u201390% Ni, and 10%\u201350% Fe. A dependence of stress on composition existed even when the substrate temperature and grain size remained constant.</jats:p>\n               <jats:p>The residual stress has a nearly parabolic dependence on substrate deposition temperature with a minimum in the vicinity of 275\u00b0C. This is in general agreement with the results for Ni-Fe films using different techniques and previously reported by Weiss and Smith.</jats:p>\n               <jats:p>The stress is nearly constant for film thicknesses 1000\u201310 000 \u00c5 and can be reduced by annealing, provided the annealing temperature is greater than the temperature of deposition.</jats:p>",
  "DOI": "10.1063/1.2163610",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        1,
        12
      ]
    ],
    "date-time": "2006-01-12T21:17:12Z",
    "timestamp": 1137100632000
  },
  "page": "743-744",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 16,
  "title": "Stress in Co-Ni-Fe and Ni-Fe Films",
  "prefix": "10.1063",
  "volume": "39",
  "author": [
    {
      "given": "J. M.",
      "family": "Gorres",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Sperry Rand Corporation, Univac Division, St. Paul, Minnesota"
        }
      ]
    },
    {
      "given": "M. M.",
      "family": "Hanson",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Sperry Rand Corporation, Univac Division, St. Paul, Minnesota"
        }
      ]
    },
    {
      "given": "D. S.",
      "family": "Lo",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Sperry Rand Corporation, Univac Division, St. Paul, Minnesota"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020210275001700_r1"
    },
    {
      "key": "2024020210275001700_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1166",
      "DOI": "10.1063/1.1728644",
      "volume": "33",
      "year": "1962",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020210275001700_r3",
      "doi-asserted-by": "crossref",
      "first-page": "565",
      "DOI": "10.1038/193565a0",
      "volume": "193",
      "year": "1962",
      "journal-title": "Nature"
    },
    {
      "key": "2024020210275001700_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1354",
      "DOI": "10.1063/1.1709619",
      "volume": "38",
      "year": "1967",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020210275001700_r5"
    },
    {
      "key": "2024020210275001700_r6",
      "doi-asserted-by": "crossref",
      "first-page": "7",
      "DOI": "10.1063/1.1754418",
      "volume": "8",
      "year": "1966",
      "journal-title": "Appl. Phys. Letters"
    },
    {
      "key": "2024020210275001700_r7",
      "doi-asserted-by": "crossref",
      "first-page": "99",
      "DOI": "10.1063/1.1754678",
      "volume": "9",
      "year": "1966",
      "journal-title": "Appl. Phys. Letters"
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/39/2/743/18345010/743_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/39/2/743/18345010/743_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        2
      ]
    ],
    "date-time": "2024-02-02T11:05:48Z",
    "timestamp": 1706871948000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/39/2/743/4862/Stress-in-Co-Ni-Fe-and-Ni-Fe-Films"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1968,
        2,
        1
      ]
    ]
  },
  "references-count": 7,
  "journal-issue": {
    "issue": "2",
    "published-print": {
      "date-parts": [
        [
          1968,
          2,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.2163610",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1968,
        2,
        1
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1968,
        2,
        1
      ]
    ]
  }
}