DOI: 10.1063/1.2162270. Source brightness and useful beam current of carbon nanotubes and other very small emitters

Source brightness and useful beam current of carbon nanotubes and other very small emitters

10.1063/1.2162270

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The potential application of carbon nanotubes as electron sources in electron microscopes is analyzed. The resolution and probe current that can be obtained from a carbon nanotube emitter in a low-voltage scanning electron microscope are calculated and compared to the state of the art using Schottky electron sources. Many analytical equations for probe-size versus probe-current relations in different parameter regimes are obtained. It is shown that for most carbon nanotube emitters, the gun lens aberrations are larger than the emitters’ virtual source size and thus restrict the microscope’s performance. The result is that the advantages of the higher brightness of nanotube emitters are limited unless the angular emission current is increased over present day values or the gun lens aberrations are decreased. For some nanotubes with a closed cap, it is known that the emitted electron beam is coherent over the full emission cone. We argue that for such emitters the parameter “brightness” becomes meaningless. The influence of phase variations in the electron wave front emitted from such a nanotube emitter on the focusing of the electron beam is analyzed.

Bibliography

Kruit, P., Bezuijen, M., & Barth, J. E. (2006). Source brightness and useful beam current of carbon nanotubes and other very small emitters. Journal of Applied Physics, 99(2).

Authors 3

P. Kruit (first)
M. Bezuijen (additional)
J. E. Barth (additional)

References 17 Referenced 41

10.1103/PhysRevLett.94.186807 / Phys. Rev. Lett. (2005)
10.1002/sia.1729 / Surf. Interface Anal. (2004)
10.1063/1.352371 / J. Appl. Phys. (1993)
10.1016/S0169-4332(99)00056-2 / Appl. Surf. Sci. (1999)
10.1063/1.1632551 / J. Appl. Phys. (2004)
{'key': '2023073021511220200_c6', 'first-page': '4012', 'volume-title': 'Handbook of Charged Particle Optics', 'author': 'Orloff', 'year': '1997'} / Handbook of Charged Particle Optics by Orloff (1997)
{'key': '2023073021511220200_c7', 'first-page': '101', 'volume': '101', 'year': '1996', 'journal-title': 'Optik (Stuttgart)'} / Optik (Stuttgart) (1996)
10.1016/S0168-9002(98)01531-9 / Nucl. Instrum. Methods Phys. Res. A (1999)
10.1116/1.1409390 / J. Vac. Sci. Technol. B (2001)
{'key': '2023073021511220200_c10', 'first-page': '77', 'volume-title': 'Handbook of Charged Particle Optics', 'author': 'Orloff', 'year': '1997'} / Handbook of Charged Particle Optics by Orloff (1997)
{'key': '2023073021511220200_c11', 'first-page': '275', 'volume-title': 'Handbook of Charged Particle Optics', 'author': 'Orloff', 'year': '1997'} / Handbook of Charged Particle Optics by Orloff (1997)
10.1143/JJAP.39.L271 / Jpn. J. Appl. Phys., Part 2 (2000)
10.1116/1.1722133 / J. Vac. Sci. Technol. B (2004)
10.1103/PhysRevLett.88.038301 / Phys. Rev. Lett. (2002)
10.1002/sia.1505 / Surf. Interface Anal. (2003)
M. W. Docter, M.S. thesis, Delft University of Technology, 2003.
{'key': '2023073021511220200_c17', 'first-page': '369', 'volume': '63', 'year': '1983', 'journal-title': 'Optik (Stuttgart)'} / Optik (Stuttgart) (1983)

Dates

Type	When
Created	19 years, 6 months ago (Feb. 3, 2006, 6:06 p.m.)
Deposited	2 years ago (July 30, 2023, 5:51 p.m.)
Indexed	4 weeks ago (July 30, 2025, 6:46 a.m.)
Issued	19 years, 7 months ago (Jan. 15, 2006)
Published	19 years, 7 months ago (Jan. 15, 2006)
Published Online	19 years, 6 months ago (Jan. 30, 2006)
Published Print	19 years, 7 months ago (Jan. 15, 2006)

Funders 0

None

BibTeX

@article{Kruit_2006, title={Source brightness and useful beam current of carbon nanotubes and other very small emitters}, volume={99}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.2162270}, DOI={10.1063/1.2162270}, number={2}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Kruit, P. and Bezuijen, M. and Barth, J. E.}, year={2006}, month=jan }

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