DOI: 10.1063/1.2041830. Metalorganic chemical vapor deposition of lead-free ferroelectric BiFeO3 films for memory applications

Metalorganic chemical vapor deposition of lead-free ferroelectric BiFeO3 films for memory applications

10.1063/1.2041830

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We have grown BiFeO3 thin films on SrRuO3∕SrTiO3 and SrRuO3∕SrTiO3∕Si using liquid delivery metalorganic chemical vapor deposition. Epitaxial BiFeO3 films were successfully prepared through the systematic control of the chemical reaction and deposition process. We found that the film composition and phase equilibrium are sensitive to the Bi:Fe ratio in the precursor. Fe-rich mixtures show the existence of α-Fe2O3, while Bi-rich mixtures show the presence of β-Bi2O3 as a second phase at the surface. In the optimized films, we were able to obtain an epitaxial single perovskite phase thin film. Electrical measurements using both quasistatic hysteresis and pulsed polarization measurements confirm the existence of ferroelectricity with a switched polarization of 110–120μC∕cm2, ΔP(=P*−P̂). Out-of plane piezoelectric (d33) measurements using an atomic force microscope yield a value of 50–60pm∕V.

Bibliography

Yang, S. Y., Zavaliche, F., Mohaddes-Ardabili, L., Vaithyanathan, V., Schlom, D. G., Lee, Y. J., Chu, Y. H., Cruz, M. P., Zhan, Q., Zhao, T., & Ramesh, R. (2005). Metalorganic chemical vapor deposition of lead-free ferroelectric BiFeO3 films for memory applications. Applied Physics Letters, 87(10).

Authors 11

S. Y. Yang (first)
F. Zavaliche (additional)
L. Mohaddes-Ardabili (additional)
V. Vaithyanathan (additional)
D. G. Schlom (additional)
Y. J. Lee (additional)
Y. H. Chu (additional)
M. P. Cruz (additional)
Q. Zhan (additional)
T. Zhao (additional)
R. Ramesh (additional)

References 14 Referenced 227

10.1063/1.1391229 / Appl. Phys. Lett. (2001)
10.1143/JJAP.41.L710 / Jpn. J. Appl. Phys., Part 2 (2002)
10.1016/S0955-2219(03)00451-5 / J. Eur. Ceram. Soc. (2004)
10.1126/science.1080615 / Science (2003)
10.1063/1.1799234 / Appl. Phys. Lett. (2004)
10.1007/s10832-005-6582-4 / J. Electroceram. (2005)
10.1557/PROC-310-223 / Mater. Res. Soc. Symp. Proc. (1993)
10.1063/1.1534380 / J. Appl. Phys. (2003)
{'volume-title': 'Appl. Phys. Lett.', 'key': '2023070301451974600_c8'} / Appl. Phys. Lett.
10.1063/1.1516857 / Appl. Phys. Lett. (2002)
10.1063/1.1764944 / Appl. Phys. Lett. (2004)
10.1016/0038-1098(70)90262-0 / Solid State Commun. (1970)
10.1107/S0108768190006887 / Acta Crystallogr., Sect. B: Struct. Sci. (1990)
10.1063/1.1626267 / Appl. Phys. Lett. (2003)

Dates

Type	When
Created	19 years, 11 months ago (Aug. 29, 2005, 6:06 p.m.)
Deposited	2 years, 1 month ago (July 2, 2023, 9:45 p.m.)
Indexed	2 weeks, 4 days ago (Aug. 6, 2025, 8:34 a.m.)
Issued	19 years, 11 months ago (Aug. 30, 2005)
Published	19 years, 11 months ago (Aug. 30, 2005)
Published Online	19 years, 11 months ago (Aug. 30, 2005)
Published Print	19 years, 11 months ago (Sept. 5, 2005)

Funders 0

None

BibTeX

@article{Yang_2005, title={Metalorganic chemical vapor deposition of lead-free ferroelectric BiFeO3 films for memory applications}, volume={87}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.2041830}, DOI={10.1063/1.2041830}, number={10}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Yang, S. Y. and Zavaliche, F. and Mohaddes-Ardabili, L. and Vaithyanathan, V. and Schlom, D. G. and Lee, Y. J. and Chu, Y. H. and Cruz, M. P. and Zhan, Q. and Zhao, T. and Ramesh, R.}, year={2005}, month=aug }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        6
      ]
    ],
    "date-time": "2025-08-06T12:34:46Z",
    "timestamp": 1754483686841,
    "version": "3.41.2"
  },
  "reference-count": 14,
  "publisher": "AIP Publishing",
  "issue": "10",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2005,
        9,
        5
      ]
    ]
  },
  "abstract": "<jats:p>We have grown BiFeO3 thin films on SrRuO3\u2215SrTiO3 and SrRuO3\u2215SrTiO3\u2215Si using liquid delivery metalorganic chemical vapor deposition. Epitaxial BiFeO3 films were successfully prepared through the systematic control of the chemical reaction and deposition process. We found that the film composition and phase equilibrium are sensitive to the Bi:Fe ratio in the precursor. Fe-rich mixtures show the existence of \u03b1-Fe2O3, while Bi-rich mixtures show the presence of \u03b2-Bi2O3 as a second phase at the surface. In the optimized films, we were able to obtain an epitaxial single perovskite phase thin film. Electrical measurements using both quasistatic hysteresis and pulsed polarization measurements confirm the existence of ferroelectricity with a switched polarization of 110\u2013120\u03bcC\u2215cm2, \u0394P(=P*\u2212P\u0302). Out-of plane piezoelectric (d33) measurements using an atomic force microscope yield a value of 50\u201360pm\u2215V.</jats:p>",
  "DOI": "10.1063/1.2041830",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        8,
        29
      ]
    ],
    "date-time": "2005-08-29T22:06:07Z",
    "timestamp": 1125353167000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 227,
  "title": "Metalorganic chemical vapor deposition of lead-free ferroelectric BiFeO3 films for memory applications",
  "prefix": "10.1063",
  "volume": "87",
  "author": [
    {
      "given": "S. Y.",
      "family": "Yang",
      "sequence": "first",
      "affiliation": [
        {
          "name": "University of Maryland Department of Materials Science and Engineering, , College Park, Maryland 20742"
        }
      ]
    },
    {
      "given": "F.",
      "family": "Zavaliche",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Maryland Department of Materials Science and Engineering, , College Park, Maryland 20742"
        }
      ]
    },
    {
      "given": "L.",
      "family": "Mohaddes-Ardabili",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Maryland Department of Materials Science and Engineering, , College Park, Maryland 20742"
        }
      ]
    },
    {
      "given": "V.",
      "family": "Vaithyanathan",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Pennsylvania State University Department of Materials Science and Engineering, , University Park, Pennsylvania 16802"
        }
      ]
    },
    {
      "given": "D. G.",
      "family": "Schlom",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Pennsylvania State University Department of Materials Science and Engineering, , University Park, Pennsylvania 16802"
        }
      ]
    },
    {
      "given": "Y. J.",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of California Department of Materials Science and Engineering and Department of Physics, , Berkeley, California 94720"
        }
      ]
    },
    {
      "given": "Y. H.",
      "family": "Chu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of California Department of Materials Science and Engineering and Department of Physics, , Berkeley, California 94720"
        }
      ]
    },
    {
      "given": "M. P.",
      "family": "Cruz",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of California Department of Materials Science and Engineering and Department of Physics, , Berkeley, California 94720"
        }
      ]
    },
    {
      "given": "Q.",
      "family": "Zhan",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of California Department of Materials Science and Engineering and Department of Physics, , Berkeley, California 94720"
        }
      ]
    },
    {
      "given": "T.",
      "family": "Zhao",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of California Department of Materials Science and Engineering and Department of Physics, , Berkeley, California 94720"
        }
      ]
    },
    {
      "given": "R.",
      "family": "Ramesh",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of California Department of Materials Science and Engineering and Department of Physics, , Berkeley, California 94720"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2005,
        8,
        30
      ]
    ]
  },
  "reference": [
    {
      "key": "2023070301451974600_c1a",
      "doi-asserted-by": "publisher",
      "first-page": "1000",
      "DOI": "10.1063/1.1391229",
      "volume": "79",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070301451974600_c1b",
      "doi-asserted-by": "publisher",
      "first-page": "L710",
      "DOI": "10.1143/JJAP.41.L710",
      "volume": "41",
      "year": "2002",
      "journal-title": "Jpn. J. Appl. Phys., Part 2"
    },
    {
      "key": "2023070301451974600_c2",
      "doi-asserted-by": "publisher",
      "first-page": "1625",
      "DOI": "10.1016/S0955-2219(03)00451-5",
      "volume": "24",
      "year": "2004",
      "journal-title": "J. Eur. Ceram. Soc."
    },
    {
      "key": "2023070301451974600_c3",
      "doi-asserted-by": "publisher",
      "first-page": "1719",
      "DOI": "10.1126/science.1080615",
      "volume": "299",
      "year": "2003",
      "journal-title": "Science"
    },
    {
      "key": "2023070301451974600_c4",
      "doi-asserted-by": "publisher",
      "first-page": "2574",
      "DOI": "10.1063/1.1799234",
      "volume": "85",
      "year": "2004",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070301451974600_c5",
      "doi-asserted-by": "publisher",
      "first-page": "37",
      "DOI": "10.1007/s10832-005-6582-4",
      "volume": "14",
      "year": "2005",
      "journal-title": "J. Electroceram."
    },
    {
      "key": "2023070301451974600_c6",
      "doi-asserted-by": "crossref",
      "first-page": "223",
      "DOI": "10.1557/PROC-310-223",
      "volume": "310",
      "year": "1993",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "2023070301451974600_c7",
      "doi-asserted-by": "publisher",
      "first-page": "1713",
      "DOI": "10.1063/1.1534380",
      "volume": "93",
      "year": "2003",
      "journal-title": "J. Appl. Phys."
    },
    {
      "volume-title": "Appl. Phys. Lett.",
      "key": "2023070301451974600_c8"
    },
    {
      "key": "2023070301451974600_c9",
      "doi-asserted-by": "publisher",
      "first-page": "4215",
      "DOI": "10.1063/1.1516857",
      "volume": "81",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070301451974600_c10",
      "doi-asserted-by": "publisher",
      "first-page": "5261",
      "DOI": "10.1063/1.1764944",
      "volume": "84",
      "year": "2004",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070301451974600_c11",
      "doi-asserted-by": "publisher",
      "first-page": "1073",
      "DOI": "10.1016/0038-1098(70)90262-0",
      "volume": "8",
      "year": "1970",
      "journal-title": "Solid State Commun."
    },
    {
      "key": "2023070301451974600_c12",
      "doi-asserted-by": "publisher",
      "first-page": "698",
      "DOI": "10.1107/S0108768190006887",
      "volume": "46",
      "year": "1990",
      "journal-title": "Acta Crystallogr., Sect. B: Struct. Sci."
    },
    {
      "key": "2023070301451974600_c13",
      "doi-asserted-by": "publisher",
      "first-page": "3981",
      "DOI": "10.1063/1.1626267",
      "volume": "83",
      "year": "2003",
      "journal-title": "Appl. Phys. Lett."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2041830/14646788/102903_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.2041830/14646788/102903_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        3
      ]
    ],
    "date-time": "2023-07-03T01:45:27Z",
    "timestamp": 1688348727000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/87/10/102903/328892/Metalorganic-chemical-vapor-deposition-of-lead"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2005,
        8,
        30
      ]
    ]
  },
  "references-count": 14,
  "journal-issue": {
    "issue": "10",
    "published-print": {
      "date-parts": [
        [
          2005,
          9,
          5
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.2041830",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2005,
        9,
        5
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2005,
        8,
        30
      ]
    ]
  },
  "article-number": "102903"
}