DOI: 10.1063/1.2018587. Modulation transfer function and detective quantum efficiency of electron bombarded charge coupled device detector for low energy electrons

Modulation transfer function and detective quantum efficiency of electron bombarded charge coupled device detector for low energy electrons

10.1063/1.2018587

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

The use of a thinned back-side illuminated charge coupled device chip as two-dimensional sensor working in direct electron bombarded mode at optimum energy of the incident signal electrons is demonstrated and the measurements of the modulation transfer function (MTF) and detective quantum efficiency (DQE) are described. The MTF was measured for energy of electrons 4keV using an edge projection method and a stripe projection method. The decrease of the MTF for a maximum spatial frequency of 20.8cycles∕mm, corresponding to the pixel size 24×24μm, is 0.75≈−2.5dB, and it is approximately the same for both horizontal and vertical directions. DQE was measured using an empty image and the mixing factor method. Empty images were acquired for energies of electrons from 2to5keV and for various doses, ranging from nearly dark image to a nearly saturated one. DQE increases with increasing energy of bombarded electrons and reaches 0.92 for electron energy of 5keV. For this energy the detector will be used for the angle- and energy-selective detection of signal electrons in the scanning low energy electron microscope.

Bibliography

HorÃ¡Äek, M. (2005). Modulation transfer function and detective quantum efficiency of electron bombarded charge coupled device detector for low energy electrons. Review of Scientific Instruments, 76(9).

Authors 1

Miroslav Horáček (first)

References 14 Referenced 5

10.1088/0034-4885/57/9/002 / Rep. Prog. Phys. (1994)
10.1002/sca.4950210101 / Scanning (1999)
10.1016/S0304-3991(02)00279-6 / Ultramicroscopy (2002)
10.1063/1.1583863 / Rev. Sci. Instrum. (2003)
{'year': '1998', 'key': '2023070520144623700_c5', 'first-page': '23'} (1998)
10.1016/0304-3991(92)90026-G / Ultramicroscopy (1992)
{'year': '1994', 'key': '2023070520144623700_c7', 'first-page': '217'} (1994)
10.1016/S0168-9002(98)00502-6 / Nucl. Instrum. Methods Phys. Res. A (1998)
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{'year': '1995', 'key': '2023070520144623700_c10', 'first-page': '147'} (1995)
10.1016/0304-3991(93)90018-S / Ultramicroscopy (1993)
10.1016/0304-3991(93)90216-K / Ultramicroscopy (1993)
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10.1103/PhysRev.139.A1702 / Phys. Rev. (1965)

Dates

Type	When
Created	20 years ago (Aug. 23, 2005, 6:03 p.m.)
Deposited	1 year, 6 months ago (Jan. 29, 2024, 1:48 a.m.)
Indexed	3 weeks, 4 days ago (July 30, 2025, 6:46 a.m.)
Issued	20 years ago (Aug. 23, 2005)
Published	20 years ago (Aug. 23, 2005)
Published Online	20 years ago (Aug. 23, 2005)
Published Print	19 years, 11 months ago (Sept. 1, 2005)

Funders 0

None

BibTeX

@article{Hor_ek_2005, title={Modulation transfer function and detective quantum efficiency of electron bombarded charge coupled device detector for low energy electrons}, volume={76}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.2018587}, DOI={10.1063/1.2018587}, number={9}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Horáček, Miroslav}, year={2005}, month=aug }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T10:46:00Z",
    "timestamp": 1753872360439,
    "version": "3.41.2"
  },
  "reference-count": 14,
  "publisher": "AIP Publishing",
  "issue": "9",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2005,
        9,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The use of a thinned back-side illuminated charge coupled device chip as two-dimensional sensor working in direct electron bombarded mode at optimum energy of the incident signal electrons is demonstrated and the measurements of the modulation transfer function (MTF) and detective quantum efficiency (DQE) are described. The MTF was measured for energy of electrons 4keV using an edge projection method and a stripe projection method. The decrease of the MTF for a maximum spatial frequency of 20.8cycles\u2215mm, corresponding to the pixel size 24\u00d724\u03bcm, is 0.75\u2248\u22122.5dB, and it is approximately the same for both horizontal and vertical directions. DQE was measured using an empty image and the mixing factor method. Empty images were acquired for energies of electrons from 2to5keV and for various doses, ranging from nearly dark image to a nearly saturated one. DQE increases with increasing energy of bombarded electrons and reaches 0.92 for electron energy of 5keV. For this energy the detector will be used for the angle- and energy-selective detection of signal electrons in the scanning low energy electron microscope.</jats:p>",
  "DOI": "10.1063/1.2018587",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        8,
        23
      ]
    ],
    "date-time": "2005-08-23T22:03:32Z",
    "timestamp": 1124834612000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 5,
  "title": "Modulation transfer function and detective quantum efficiency of electron bombarded charge coupled device detector for low energy electrons",
  "prefix": "10.1063",
  "volume": "76",
  "author": [
    {
      "given": "Miroslav",
      "family": "Hor\u00e1\u010dek",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Academy of Sciences of the Czech Republic Institute of Scientific Instruments, , Kr\u00e1lovopolsk\u00e1 147, CZ-61264 Brno, Czech Republic"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2005,
        8,
        23
      ]
    ]
  },
  "reference": [
    {
      "key": "2023070520144623700_c1",
      "doi-asserted-by": "publisher",
      "first-page": "895",
      "DOI": "10.1088/0034-4885/57/9/002",
      "volume": "57",
      "year": "1994",
      "journal-title": "Rep. Prog. Phys."
    },
    {
      "key": "2023070520144623700_c2",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1002/sca.4950210101",
      "volume": "21",
      "year": "1999",
      "journal-title": "Scanning"
    },
    {
      "key": "2023070520144623700_c3",
      "doi-asserted-by": "crossref",
      "first-page": "223",
      "DOI": "10.1016/S0304-3991(02)00279-6",
      "volume": "93",
      "year": "2002",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070520144623700_c4",
      "doi-asserted-by": "publisher",
      "first-page": "3379",
      "DOI": "10.1063/1.1583863",
      "volume": "74",
      "year": "2003",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "year": "1998",
      "key": "2023070520144623700_c5",
      "first-page": "23"
    },
    {
      "key": "2023070520144623700_c6",
      "doi-asserted-by": "publisher",
      "first-page": "395",
      "DOI": "10.1016/0304-3991(92)90026-G",
      "volume": "46",
      "year": "1992",
      "journal-title": "Ultramicroscopy"
    },
    {
      "year": "1994",
      "key": "2023070520144623700_c7",
      "first-page": "217"
    },
    {
      "key": "2023070520144623700_c8",
      "doi-asserted-by": "crossref",
      "first-page": "255",
      "DOI": "10.1016/S0168-9002(98)00502-6",
      "volume": "413",
      "year": "1998",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. A"
    },
    {
      "key": "2023070520144623700_c9",
      "doi-asserted-by": "crossref",
      "first-page": "41",
      "DOI": "10.1117/12.60337",
      "volume": "1655",
      "year": "1992",
      "journal-title": "Proc. SPIE"
    },
    {
      "year": "1995",
      "key": "2023070520144623700_c10",
      "first-page": "147"
    },
    {
      "key": "2023070520144623700_c11",
      "doi-asserted-by": "publisher",
      "first-page": "7",
      "DOI": "10.1016/0304-3991(93)90018-S",
      "volume": "52",
      "year": "1993",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070520144623700_c12",
      "doi-asserted-by": "publisher",
      "first-page": "95",
      "DOI": "10.1016/0304-3991(93)90216-K",
      "volume": "49",
      "year": "1993",
      "journal-title": "Ultramicroscopy"
    },
    {
      "year": "1998",
      "key": "2023070520144623700_c13",
      "first-page": "189"
    },
    {
      "key": "2023070520144623700_c14",
      "doi-asserted-by": "publisher",
      "first-page": "A1702",
      "DOI": "10.1103/PhysRev.139.A1702",
      "volume": "139",
      "year": "1965",
      "journal-title": "Phys. Rev."
    }
  ],
  "container-title": "Review of Scientific Instruments",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/doi/10.1063/1.2018587/15827052/093704_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/doi/10.1063/1.2018587/15827052/093704_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        1,
        29
      ]
    ],
    "date-time": "2024-01-29T06:48:05Z",
    "timestamp": 1706510885000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/rsi/article/76/9/093704/400600/Modulation-transfer-function-and-detective-quantum"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2005,
        8,
        23
      ]
    ]
  },
  "references-count": 14,
  "journal-issue": {
    "issue": "9",
    "published-print": {
      "date-parts": [
        [
          2005,
          9,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.2018587",
  "relation": {},
  "ISSN": [
    "0034-6748",
    "1089-7623"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2005,
        9
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2005,
        8,
        23
      ]
    ]
  },
  "article-number": "093704"
}