DOI: 10.1063/1.1991989. Three-dimensional imaging of individual hafnium atoms inside a semiconductor device

Three-dimensional imaging of individual hafnium atoms inside a semiconductor device

10.1063/1.1991989

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The aberration-corrected scanning transmission electron microscope allows probes to be formed with less than 1-Å diameter, providing sufficient sensitivity to observe individual Hf atoms within the SiO2 passivating layer of a HfO2∕SiO2∕Si alternative gate dielectric stack. Furthermore, the depth resolution is sufficient to localize the atom positions to half-nanometer precision in the third dimension. From a through-focal series of images, we demonstrate a three-dimensional reconstruction of the Hf atom sites, representing a three-dimensional map of potential breakdown sites within the gate dielectric.

Bibliography

van Benthem, K., Lupini, A. R., Kim, M., Baik, H. S., Doh, S., Lee, J.-H., Oxley, M. P., Findlay, S. D., Allen, L. J., Luck, J. T., & Pennycook, S. J. (2005). Three-dimensional imaging of individual hafnium atoms inside a semiconductor device. Applied Physics Letters, 87(3).

Authors 11

Klaus van Benthem (first)
Andrew R. Lupini (additional)
Miyoung Kim (additional)
Hion Suck Baik (additional)
SeokJoo Doh (additional)
Jong-Ho Lee (additional)
Mark P. Oxley (additional)
Scott D. Findlay (additional)
Leslie J. Allen (additional)
Julia T. Luck (additional)
Stephen J. Pennycook (additional)

References 27 Referenced 198

10.1126/science.285.5436.2079 / Science (1999)
{'key': '2023070301123011300_c2', 'first-page': '114', 'volume': '38', 'year': '1965', 'journal-title': 'Electronics'} / Electronics (1965)
{'volume': '7', 'journal-title': 'First Monday', 'year': '2002', 'key': '2023070301123011300_c3'} / First Monday (2002)
10.1038/nmat1077 / Nat. Mater. (2004)
10.1038/416826a / Nature (London) (2002)
10.1038/nature00972 / Nature (London) (2002)
10.1016/S0304-3991(03)00090-1 / Ultramicroscopy (2003)
10.1126/science.1100965 / Science (2004)
{'volume-title': 'Transmission Electron Microscopy', 'year': '1997', 'key': '2023070301123011300_c9'} / Transmission Electron Microscopy (1997)
{'key': '2023070301123011300_c10', 'first-page': '211', 'volume': '179', 'year': '2004', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. (2004)
{'key': '2023070301123011300_c11'}
{'key': '2023070301123011300_c12'}
10.1016/S0304-3991(03)00096-2 / Ultramicroscopy (2003)
10.1103/PhysRevLett.92.095502 / Phys. Rev. Lett. (2004)
10.1126/science.237.4821.1439 / Science (1987)
10.1103/PhysRevLett.90.175501 / Phys. Rev. Lett. (2003)
10.1103/PhysRevLett.89.088303 / Phys. Rev. Lett. (2002)
10.1038/217130a0 / Nature (London) (1968)
10.1016/S0304-3991(03)00105-0 / Ultramicroscopy (2003)
10.1021/jp0015628 / J. Phys. Chem. B (2000)
10.1002/anie.198304561 / Angew. Chem., Int. Ed. Engl. (1983)
{'volume-title': 'Atom-Probe Tomography: Analysis at the Atomic Level', 'year': '2000', 'key': '2023070301123011300_c22'} / Atom-Probe Tomography: Analysis at the Atomic Level (2000)
10.1126/science.288.5464.319 / Science (2000)
10.1063/1.1772855 / Appl. Phys. Lett. (2004)
{'volume-title': 'AIP Con. Proc.', 'key': '2023070301123011300_c25'} / AIP Con. Proc.
See EPAPS Document No. E-APPLAB-87-016529 for a video clip of the 3D reconstruction. This document can be reached via a direct link in the online article’s HTML reference section or via the EPAPS homepage (http://www.aip.org/pubservs/epaps.html).
10.1038/nature02410 / Nature (London) (2004)

Dates

Type	When
Created	20 years, 1 month ago (July 13, 2005, 6:13 p.m.)
Deposited	2 years, 1 month ago (July 2, 2023, 9:12 p.m.)
Indexed	3 weeks, 6 days ago (July 30, 2025, 6:45 a.m.)
Issued	20 years, 1 month ago (July 14, 2005)
Published	20 years, 1 month ago (July 14, 2005)
Published Online	20 years, 1 month ago (July 14, 2005)
Published Print	20 years, 1 month ago (July 18, 2005)

Funders 0

None

BibTeX

@article{van_Benthem_2005, title={Three-dimensional imaging of individual hafnium atoms inside a semiconductor device}, volume={87}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1991989}, DOI={10.1063/1.1991989}, number={3}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={van Benthem, Klaus and Lupini, Andrew R. and Kim, Miyoung and Baik, Hion Suck and Doh, SeokJoo and Lee, Jong-Ho and Oxley, Mark P. and Findlay, Scott D. and Allen, Leslie J. and Luck, Julia T. and Pennycook, Stephen J.}, year={2005}, month=jul }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T10:45:53Z",
    "timestamp": 1753872353213,
    "version": "3.41.2"
  },
  "reference-count": 27,
  "publisher": "AIP Publishing",
  "issue": "3",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2005,
        7,
        18
      ]
    ]
  },
  "abstract": "<jats:p>The aberration-corrected scanning transmission electron microscope allows probes to be formed with less than 1-\u00c5 diameter, providing sufficient sensitivity to observe individual Hf atoms within the SiO2 passivating layer of a HfO2\u2215SiO2\u2215Si alternative gate dielectric stack. Furthermore, the depth resolution is sufficient to localize the atom positions to half-nanometer precision in the third dimension. From a through-focal series of images, we demonstrate a three-dimensional reconstruction of the Hf atom sites, representing a three-dimensional map of potential breakdown sites within the gate dielectric.</jats:p>",
  "DOI": "10.1063/1.1991989",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        7,
        13
      ]
    ],
    "date-time": "2005-07-13T22:13:52Z",
    "timestamp": 1121292832000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 198,
  "title": "Three-dimensional imaging of individual hafnium atoms inside a semiconductor device",
  "prefix": "10.1063",
  "volume": "87",
  "author": [
    {
      "given": "Klaus",
      "family": "van Benthem",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Oak Ridge National Laboratory Condensed Matter Sciences Division, , Oak Ridge, Tennessee 37831-6031"
        }
      ]
    },
    {
      "given": "Andrew R.",
      "family": "Lupini",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Oak Ridge National Laboratory Condensed Matter Sciences Division, , Oak Ridge, Tennessee 37831-6031"
        }
      ]
    },
    {
      "given": "Miyoung",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Samsung Advanced Institute of Science and Technology , PO Box 111, Suwon 440-600, Korea"
        }
      ]
    },
    {
      "given": "Hion Suck",
      "family": "Baik",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Samsung Advanced Institute of Science and Technology , PO Box 111, Suwon 440-600, Korea"
        }
      ]
    },
    {
      "given": "SeokJoo",
      "family": "Doh",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Samsung Electronics Co., Ltd. , Yongin-City 449-711, Korea"
        }
      ]
    },
    {
      "given": "Jong-Ho",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Samsung Electronics Co., Ltd. , Yongin-City 449-711, Korea"
        }
      ]
    },
    {
      "given": "Mark P.",
      "family": "Oxley",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Melbourne School of Physics, , Victoria 3010, Australia"
        }
      ]
    },
    {
      "given": "Scott D.",
      "family": "Findlay",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Melbourne School of Physics, , Victoria 3010, Australia"
        }
      ]
    },
    {
      "given": "Leslie J.",
      "family": "Allen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Melbourne School of Physics, , Victoria 3010, Australia"
        }
      ]
    },
    {
      "given": "Julia T.",
      "family": "Luck",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Oak Ridge National Laboratory Condensed Matter Sciences Division, , Oak Ridge, Tennessee 37831-6030"
        }
      ]
    },
    {
      "given": "Stephen J.",
      "family": "Pennycook",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Oak Ridge National Laboratory Condensed Matter Sciences Division, , Oak Ridge, Tennessee 37831-6030"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2005,
        7,
        14
      ]
    ]
  },
  "reference": [
    {
      "key": "2023070301123011300_c1",
      "doi-asserted-by": "publisher",
      "first-page": "2079",
      "DOI": "10.1126/science.285.5436.2079",
      "volume": "285",
      "year": "1999",
      "journal-title": "Science"
    },
    {
      "key": "2023070301123011300_c2",
      "first-page": "114",
      "volume": "38",
      "year": "1965",
      "journal-title": "Electronics"
    },
    {
      "volume": "7",
      "journal-title": "First Monday",
      "year": "2002",
      "key": "2023070301123011300_c3"
    },
    {
      "key": "2023070301123011300_c4",
      "doi-asserted-by": "publisher",
      "first-page": "143",
      "DOI": "10.1038/nmat1077",
      "volume": "3",
      "year": "2004",
      "journal-title": "Nat. Mater."
    },
    {
      "key": "2023070301123011300_c5",
      "doi-asserted-by": "publisher",
      "first-page": "826",
      "DOI": "10.1038/416826a",
      "volume": "416",
      "year": "2002",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2023070301123011300_c6",
      "doi-asserted-by": "publisher",
      "first-page": "617",
      "DOI": "10.1038/nature00972",
      "volume": "418",
      "year": "2002",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2023070301123011300_c7",
      "doi-asserted-by": "crossref",
      "first-page": "229",
      "DOI": "10.1016/S0304-3991(03)00090-1",
      "volume": "96",
      "year": "2003",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070301123011300_c8",
      "doi-asserted-by": "publisher",
      "first-page": "1741",
      "DOI": "10.1126/science.1100965",
      "volume": "305",
      "year": "2004",
      "journal-title": "Science"
    },
    {
      "volume-title": "Transmission Electron Microscopy",
      "year": "1997",
      "key": "2023070301123011300_c9"
    },
    {
      "key": "2023070301123011300_c10",
      "first-page": "211",
      "volume": "179",
      "year": "2004",
      "journal-title": "Inst. Phys. Conf. Ser."
    },
    {
      "key": "2023070301123011300_c11"
    },
    {
      "key": "2023070301123011300_c12"
    },
    {
      "key": "2023070301123011300_c13",
      "doi-asserted-by": "publisher",
      "first-page": "313",
      "DOI": "10.1016/S0304-3991(03)00096-2",
      "volume": "96",
      "year": "2003",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070301123011300_c14",
      "doi-asserted-by": "publisher",
      "first-page": "095502",
      "DOI": "10.1103/PhysRevLett.92.095502",
      "volume": "92",
      "year": "2004",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023070301123011300_c15",
      "doi-asserted-by": "crossref",
      "first-page": "1439",
      "DOI": "10.1126/science.237.4821.1439",
      "volume": "237",
      "year": "1987",
      "journal-title": "Science"
    },
    {
      "key": "2023070301123011300_c16",
      "doi-asserted-by": "publisher",
      "first-page": "175501",
      "DOI": "10.1103/PhysRevLett.90.175501",
      "volume": "90",
      "year": "2003",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023070301123011300_c17",
      "doi-asserted-by": "publisher",
      "first-page": "088303",
      "DOI": "10.1103/PhysRevLett.89.088303",
      "volume": "89",
      "year": "2002",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023070301123011300_c18",
      "doi-asserted-by": "crossref",
      "first-page": "130",
      "DOI": "10.1038/217130a0",
      "volume": "217",
      "year": "1968",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2023070301123011300_c19",
      "doi-asserted-by": "publisher",
      "first-page": "413",
      "DOI": "10.1016/S0304-3991(03)00105-0",
      "volume": "96",
      "year": "2003",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070301123011300_c20",
      "doi-asserted-by": "publisher",
      "first-page": "9368",
      "DOI": "10.1021/jp0015628",
      "volume": "104",
      "year": "2000",
      "journal-title": "J. Phys. Chem. B"
    },
    {
      "key": "2023070301123011300_c21",
      "doi-asserted-by": "publisher",
      "first-page": "456",
      "DOI": "10.1002/anie.198304561",
      "volume": "22",
      "year": "1983",
      "journal-title": "Angew. Chem., Int. Ed. Engl."
    },
    {
      "volume-title": "Atom-Probe Tomography: Analysis at the Atomic Level",
      "year": "2000",
      "key": "2023070301123011300_c22"
    },
    {
      "key": "2023070301123011300_c23",
      "doi-asserted-by": "publisher",
      "first-page": "319",
      "DOI": "10.1126/science.288.5464.319",
      "volume": "288",
      "year": "2000",
      "journal-title": "Science"
    },
    {
      "key": "2023070301123011300_c24",
      "doi-asserted-by": "publisher",
      "first-page": "672",
      "DOI": "10.1063/1.1772855",
      "volume": "85",
      "year": "2004",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "volume-title": "AIP Con. Proc.",
      "key": "2023070301123011300_c25"
    },
    {
      "key": "2023070301123011300_c26",
      "unstructured": "See EPAPS Document No. E-APPLAB-87-016529 for a video clip of the 3D reconstruction. This document can be reached via a direct link in the online article\u2019s HTML reference section or via the EPAPS homepage (http://www.aip.org/pubservs/epaps.html)."
    },
    {
      "key": "2023070301123011300_c27",
      "doi-asserted-by": "publisher",
      "first-page": "730",
      "DOI": "10.1038/nature02410",
      "volume": "428",
      "year": "2004",
      "journal-title": "Nature (London)"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.1991989/14643721/034104_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.1991989/14643721/034104_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        3
      ]
    ],
    "date-time": "2023-07-03T01:12:40Z",
    "timestamp": 1688346760000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/87/3/034104/330557/Three-dimensional-imaging-of-individual-hafnium"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2005,
        7,
        14
      ]
    ]
  },
  "references-count": 27,
  "journal-issue": {
    "issue": "3",
    "published-print": {
      "date-parts": [
        [
          2005,
          7,
          18
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1991989",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2005,
        7,
        18
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2005,
        7,
        14
      ]
    ]
  },
  "article-number": "034104"
}