DOI: 10.1063/1.1931164. Silicon Diffused-Element Piezoresistive Diaphragms

Silicon Diffused-Element Piezoresistive Diaphragms

10.1063/1.1931164

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The properties of a pressure transducer consisting of a single-crystal silicon diaphragm having stress-sensitive piezoresistive regions formed by the localized diffusion of impurities have been theoretically and experimentally investigated. The longitudinal and transverse piezoresistance effects are discussed and the results are applied to the stress pattern of a deformed diaphragm. The conditions under which the stress in the diaphragm varies linearly with applied pressure are discussed and good agreement between the predicted and measured sensitivity is found in both the linear and nonlinear cases.

Bibliography

Tufte, O. N., Chapman, P. W., & Long, D. (1962). Silicon Diffused-Element Piezoresistive Diaphragms. Journal of Applied Physics, 33(11), 3322â3327.

Authors 3

O. N. Tufte (first)
P. W. Chapman (additional)
Donald Long (additional)

References 11 Referenced 229

10.1063/1.1728280 / J. Appl. Phys. (1961)
10.1121/1.1908710 / J. Acoust. Soc. Am. (1957)
10.1103/PhysRev.94.42 / Phys. Rev. (1954)
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10.1063/1.1728326 / J. Appl. Phys. (1961)
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10.1016/0001-6160(57)90164-5 / Acta Met. (1957)

Dates

Type	When
Created	20 years, 3 months ago (May 4, 2005, 4:35 p.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 1:36 a.m.)
Indexed	6 days, 6 hours ago (Aug. 21, 2025, 1 p.m.)
Issued	62 years, 9 months ago (Nov. 1, 1962)
Published	62 years, 9 months ago (Nov. 1, 1962)
Published Print	62 years, 9 months ago (Nov. 1, 1962)

Funders 0

None

BibTeX

@article{Tufte_1962, title={Silicon Diffused-Element Piezoresistive Diaphragms}, volume={33}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1931164}, DOI={10.1063/1.1931164}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Tufte, O. N. and Chapman, P. W. and Long, Donald}, year={1962}, month=nov, pages={3322–3327} }

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