DOI: 10.1063/1.1927714. Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition

Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition

10.1063/1.1927714

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We studied the behavior of tungsten wires, fabricated by focused-ion-beam-induced deposition and subjected to high current density. We present a simple electrical treatment, which allows an improved wire resistivity of more than 80%. We have distinguished two steps in the treatment. When the current density reaches 1.4×107A∕cm2, Ga atoms segregate and form droplets on the wire. As the current density increases, new droplets appear and merge into a single droplet. At 5.8×107A∕cm2, the droplet evaporates, the resistance is lost and the wire crystallizes. The final resistivity is close to 55 μΩ cm. The same treatment applied to as-deposited platinum wires does not lead to the same observations: neither segregation nor crystallization was found.

Bibliography

Prestigiacomo, M., Bedu, F., Jandard, F., Tonneau, D., Dallaporta, H., Roussel, L., & Sudraud, P. (2005). Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition. Applied Physics Letters, 86(19).

Authors 7

M. Prestigiacomo (first)
F. Bedu (additional)
F. Jandard (additional)
D. Tonneau (additional)
H. Dallaporta (additional)
L. Roussel (additional)
P. Sudraud (additional)

References 14 Referenced 26

10.1038/382054a0 / Nature (London) (1996)
10.1063/1.124093 / Appl. Phys. Lett. (1999)
10.1016/j.mee.2004.07.047 / Microelectron. Eng. (2004)
10.1116/1.585167 / J. Vac. Sci. Technol. B (1990)
10.1116/1.586028 / J. Vac. Sci. Technol. B (1992)
10.1116/1.1410094 / J. Vac. Sci. Technol. B (2001)
10.1116/1.1627806 / J. Vac. Sci. Technol. B (2003)
10.1063/1.1541940 / Appl. Phys. Lett. (2003)
10.1063/1.1629382 / Appl. Phys. Lett. (2003)
10.1016/S1386-9477(03)00317-5 / Physica E (Amsterdam) (2003)
10.1063/1.1745108 / Appl. Phys. Lett. (2004)
10.1117/12.968510 / Proc. SPIE (1989)
10.1116/1.1526699 / J. Vac. Sci. Technol. B (2002)
{'key': '2023072407502024600_c14', 'first-page': '762', 'article-title': 'Metallurgy and Metallurgical Engineering Series', 'volume-title': 'Constitution of Binary Alloys', 'year': '1958'} / Constitution of Binary Alloys / Metallurgy and Metallurgical Engineering Series (1958)

Dates

Type	When
Created	20 years, 3 months ago (May 27, 2005, 7:56 p.m.)
Deposited	2 years, 1 month ago (July 24, 2023, 3:50 a.m.)
Indexed	1 month ago (July 30, 2025, 6:46 a.m.)
Issued	20 years, 3 months ago (May 6, 2005)
Published	20 years, 3 months ago (May 6, 2005)
Published Online	20 years, 3 months ago (May 6, 2005)
Published Print	20 years, 3 months ago (May 9, 2005)

Funders 0

None

BibTeX

@article{Prestigiacomo_2005, title={Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition}, volume={86}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1927714}, DOI={10.1063/1.1927714}, number={19}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Prestigiacomo, M. and Bedu, F. and Jandard, F. and Tonneau, D. and Dallaporta, H. and Roussel, L. and Sudraud, P.}, year={2005}, month=may }

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