DOI: 10.1063/1.1851620. Direct observation of interstitial molecular N2 in Si oxynitrides

Direct observation of interstitial molecular N2 in Si oxynitrides

10.1063/1.1851620

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

High-resolution near edge x-ray absorption spectroscopy and x-ray photoelectron spectroscopy were used to characterize ultrathin plasma-nitrided silicon oxides. The direct observation of interstitial molecular N2 was made by vibrationally resolved N K-edge absorption spectroscopy. The N2 molecules were trapped during the plasma nitridation at the near surface and could be eliminated by annealing via molecular out-diffusion.

Bibliography

Chung, Y., Lee, J. C., & Shin, H. J. (2005). Direct observation of interstitial molecular N2 in Si oxynitrides. Applied Physics Letters, 86(2).

Authors 3

Youngsu Chung (first)
Jae Cheol Lee (additional)
H. J. Shin (additional)

References 23 Referenced 33

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{'key': '2023071205373611400_c22', 'first-page': '406', 'volume': '40', 'year': '2002', 'journal-title': 'J. Korean Phys. Soc.'} / J. Korean Phys. Soc. (2002)
{'key': '2023071205373611400_c23', 'first-page': '2335', 'volume': '23', 'year': '2000', 'journal-title': 'Chem. Commun. (Cambridge)'} / Chem. Commun. (Cambridge) (2000)

Dates

Type	When
Created	20 years, 7 months ago (Jan. 6, 2005, 8:15 p.m.)
Deposited	2 years, 1 month ago (July 12, 2023, 1:54 a.m.)
Indexed	1 month ago (July 30, 2025, 6:44 a.m.)
Issued	20 years, 7 months ago (Jan. 4, 2005)
Published	20 years, 7 months ago (Jan. 4, 2005)
Published Online	20 years, 7 months ago (Jan. 4, 2005)
Published Print	20 years, 7 months ago (Jan. 10, 2005)

Funders 0

None

BibTeX

@article{Chung_2005, title={Direct observation of interstitial molecular N2 in Si oxynitrides}, volume={86}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1851620}, DOI={10.1063/1.1851620}, number={2}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Chung, Youngsu and Lee, Jae Cheol and Shin, H. J.}, year={2005}, month=jan }

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