Crossref journal-article
AIP Publishing
Journal of Applied Physics (317)
Abstract

Transistors with gate lengths below 100 nm generate phonon hotspots with dimensions on the order of 10 nm and peak power densities of about 50W∕μm3. This work employs molecular dynamics to investigate the impact of lattice energy density on phonon scattering at the hotspot. The hotspot studied in this work consists of longitudinal optical phonons involved in the g-type intervalley scattering of conduction electrons in silicon. A comparison of the decay modes in hotspots with high and moderate energy densities reveals that the decay mechanisms are the same but the relaxation rates differ. Scattering occurs through a three phonon process of the form LO→LA+TA, involving the zone-edge transverse acoustic modes. An increase in the energy density from a moderate value of 5 to 125W∕μm3 changes the relaxation time from 79 to 16 ps, approximately proportional to the the maximum initial amplitude of the phonons. This work improves the accuracy of the scattering rates of optical phonons and helps in advancing the electro-thermal modeling of nanotransistors.

Bibliography

Sinha, S., Schelling, P. K., Phillpot, S. R., & Goodson, K. E. (2004). Scattering of g-process longitudinal optical phonons at hotspots in silicon. Journal of Applied Physics, 97(2).

Authors 4
  1. S. Sinha (first)
  2. P. K. Schelling (additional)
  3. S. R. Phillpot (additional)
  4. K. E. Goodson (additional)
References 29 Referenced 43
  1. 10.1063/1.1524305 / J. Appl. Phys. (2003)
  2. 10.1063/1.359082 / J. Appl. Phys. (1995)
  3. {'volume-title': 'International Technology Roadmap for Semiconductors (ITRS)', 'key': '2023080121185594100_c3'} / International Technology Roadmap for Semiconductors (ITRS)
  4. 10.1115/1.1337651 / J. Heat Transfer (2001)
  5. 10.1115/1.1603774 / J. Heat Transfer (2003)
  6. 10.1115/1.2822665 / J. Heat Transfer (1996)
  7. {'year': '2002', 'key': '2023080121185594100_c7'} (2002)
  8. 10.1063/1.1371536 / Appl. Phys. Lett. (2001)
  9. 10.1063/1.361424 / J. Appl. Phys. (1996)
  10. {'key': '2023080121185594100_c10', 'first-page': '1318', 'volume': '61', 'year': '1985', 'journal-title': 'Sov. Phys. JETP'} / Sov. Phys. JETP (1985)
  11. 10.1103/PhysRevB.48.6033 / Phys. Rev. B (1993)
  12. 10.1103/PhysRev.132.2461 / Phys. Rev. (1963)
  13. {'volume-title': 'Dynamical Theory of Crystal Lattices', 'year': '1954', 'key': '2023080121185594100_c13'} / Dynamical Theory of Crystal Lattices (1954)
  14. 10.1103/PhysRev.128.2589 / Phys. Rev. (1962)
  15. 10.1103/PhysRevLett.75.1819 / Phys. Rev. Lett. (1995)
  16. 10.1103/PhysRevLett.77.3839 / Phys. Rev. Lett. (1996)
  17. 10.1103/PhysRevB.57.12234 / Phys. Rev. B (1998)
  18. 10.1103/PhysRevB.59.4125 / Phys. Rev. B (1999)
  19. 10.1103/PhysRevB.34.5058 / Phys. Rev. B (1986)
  20. 10.1063/1.1465106 / Appl. Phys. Lett. (2002)
  21. 10.1063/1.1561601 / J. Appl. Phys. (2003)
  22. {'volume-title': 'Semiconductor Transport', 'key': '2023080121185594100_c22'} / Semiconductor Transport
  23. {'year': '2003', 'key': '2023080121185594100_c23', 'article-title': 'International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)'} / International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (2003)
  24. 10.1103/PhysRev.120.2024 / Phys. Rev. (1960)
  25. 10.1103/PhysRevB.14.1605 / Phys. Rev. B (1976)
  26. {'volume-title': 'Quantum Processes in Semiconductors', 'year': '1999', 'key': '2023080121185594100_c26'} / Quantum Processes in Semiconductors (1999)
  27. 10.1103/PhysRevB.29.2051 / Phys. Rev. B (1984)
  28. 10.1103/PhysRevB.31.5262 / Phys. Rev. B (1985)
  29. {'volume-title': 'Computer Simulation of Liquids', 'key': '2023080121185594100_c29'} / Computer Simulation of Liquids
Dates
Type When
Created 20 years, 7 months ago (Jan. 15, 2005, 11:06 a.m.)
Deposited 2 years ago (Aug. 1, 2023, 5:19 p.m.)
Indexed 4 weeks, 1 day ago (July 30, 2025, 6:45 a.m.)
Issued 20 years, 8 months ago (Dec. 23, 2004)
Published 20 years, 8 months ago (Dec. 23, 2004)
Published Online 20 years, 8 months ago (Dec. 23, 2004)
Published Print 20 years, 7 months ago (Jan. 15, 2005)
Funders 0

None

@article{Sinha_2004, title={Scattering of g-process longitudinal optical phonons at hotspots in silicon}, volume={97}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1831549}, DOI={10.1063/1.1831549}, number={2}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Sinha, S. and Schelling, P. K. and Phillpot, S. R. and Goodson, K. E.}, year={2004}, month=dec }