DOI: 10.1063/1.1825623. Fabrication of three-dimensional photonic crystal with alignment based on electron beam lithography

Fabrication of three-dimensional photonic crystal with alignment based on electron beam lithography

10.1063/1.1825623

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We demonstrate the fabrication of a three-dimensional woodpile photonic crystal in the near-infrared using a layer-by-layer approach involving electron beam lithography and spin on glass planarization. The alignment accuracy between the first and the fifth layer is within 10% of the lattice spacing as measured from cross section scanning-electron-microscopy images. Optical reflectivity measurements reveal peaks consistent with the photonic gap frequency. The method offers a way of rapid prototyping full three-dimensional photonic band gap devices with considerable flexibility of materials choice. Moreover, lattice structure that can operate at wavelengths into the visible can be fabricated using this approach.

Bibliography

Subramania, G., & Lin, S. Y. (2004). Fabrication of three-dimensional photonic crystal with alignment based on electron beam lithography. Applied Physics Letters, 85(21), 5037â5039.

Authors 2

G. Subramania (first)
S. Y. Lin (additional)

References 21 Referenced 75

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Dates

Type	When
Created	20 years, 9 months ago (Nov. 23, 2004, 10:21 p.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 11:33 p.m.)
Indexed	4 weeks, 1 day ago (Aug. 5, 2025, 8:26 a.m.)
Issued	20 years, 9 months ago (Nov. 22, 2004)
Published	20 years, 9 months ago (Nov. 22, 2004)
Published Print	20 years, 9 months ago (Nov. 22, 2004)

Funders 0

None

BibTeX

@article{Subramania_2004, title={Fabrication of three-dimensional photonic crystal with alignment based on electron beam lithography}, volume={85}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1825623}, DOI={10.1063/1.1825623}, number={21}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Subramania, G. and Lin, S. Y.}, year={2004}, month=nov, pages={5037–5039} }

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