DOI: 10.1063/1.1737480. Ion beam-induced anisotropic plastic deformation of silicon microstructures

Ion beam-induced anisotropic plastic deformation of silicon microstructures

10.1063/1.1737480

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Amorphous silicon micropillars show anisotropic plastic shape changes upon irradiation with 30 MeV Cu ions. The transverse plastic strain rate is (2.5±0.2)×10−17 cm2/ion at 77 K, which is about one order of magnitude less than that of silica glass. In contrast, crystalline silicon pillars, irradiated under the same conditions, do not exhibit anisotropic deformation. A viscoelastic and free volume model is used to qualitatively describe the data. By irradiating partially amorphous structures a variety of silicon microshapes can be fabricated.

Bibliography

van Dillen, T., de Dood, M. J. A., Penninkhof, J. J., Polman, A., Roorda, S., & Vredenberg, A. M. (2004). Ion beam-induced anisotropic plastic deformation of silicon microstructures. Applied Physics Letters, 84(18), 3591â3593.

Authors 6

T. van Dillen (first)
M. J. A. de Dood (additional)
J. J. Penninkhof (additional)
A. Polman (additional)
S. Roorda (additional)
A. M. Vredenberg (additional)

References 14 Referenced 40

10.1103/PhysRevLett.51.1987 / Phys. Rev. Lett. (1983)
10.1103/PhysRevB.41.1144 / Phys. Rev. B (1990)
10.1016/0168-583X(92)95039-T / Nucl. Instrum. Methods Phys. Res. B (1992)
10.1002/1521-4095(200010)12:20<1511::AID-ADMA1511>3.0.CO;2-6 / Adv. Mater. (Weinheim, Ger.) (2000)
10.1063/1.1629793 / Appl. Phys. Lett. (2003)
10.1557/JMR.1991.2109 / J. Mater. Res. (1991)
10.1116/1.591054 / J. Vac. Sci. Technol. B (1999)
10.1063/1.111121 / Appl. Phys. Lett. (1994)
10.1080/10420158908217877 / Radiat. Eff. Defects Solids (1989)
{'key': '2024020403043331300_r10'}
10.1103/PhysRevLett.74.5072 / Phys. Rev. Lett. (1995)
10.1063/1.359820 / J. Appl. Phys. (1995)
10.1103/PhysRevB.56.1551 / Phys. Rev. B (1997)
10.1063/1.349247 / J. Appl. Phys. (1991)

Dates

Type	When
Created	21 years, 3 months ago (April 26, 2004, 6:12 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 10:04 p.m.)
Indexed	1 year, 3 months ago (May 17, 2024, 1 p.m.)
Issued	21 years, 3 months ago (May 3, 2004)
Published	21 years, 3 months ago (May 3, 2004)
Published Print	21 years, 3 months ago (May 3, 2004)

Funders 0

None

BibTeX

@article{van_Dillen_2004, title={Ion beam-induced anisotropic plastic deformation of silicon microstructures}, volume={84}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1737480}, DOI={10.1063/1.1737480}, number={18}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={van Dillen, T. and de Dood, M. J. A. and Penninkhof, J. J. and Polman, A. and Roorda, S. and Vredenberg, A. M.}, year={2004}, month=may, pages={3591–3593} }

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