DOI: 10.1063/1.1736314. Synthesis of uniform GaN quantum dot arrays via electron nanolithography of D2GaN3

Synthesis of uniform GaN quantum dot arrays via electron nanolithography of D2GaN3

10.1063/1.1736314

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We demonstrate the deposition of periodic arrays of uniformly sized GaN quantum dots onto a SiOx substrate. The dots are deposited using a nanolithography technique based on a combination of electron-beam-induced chemical vapor deposition and single-source molecular hydride chemistries. Under appropriate deposition conditions, we can deposit uniform dots of height 5 nm and full widths at half-maxima of 4 nm. The dot size is controlled by the spatial distribution of secondary electrons leaving the substrate surface. The smallest, most uniform void-free dots are created via nanolithography of molecules adsorbed on the substrate surface.

Bibliography

Crozier, P. A., Tolle, J., Kouvetakis, J., & Ritter, C. (2004). Synthesis of uniform GaN quantum dot arrays via electron nanolithography of D2GaN3. Applied Physics Letters, 84(18), 3441â3443.

Authors 4

P. A. Crozier (first)
J. Tolle (additional)
J. Kouvetakis (additional)
Cole Ritter (additional)

References 20 Referenced 63

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10.1063/1.1592866 / J. Appl. Phys. (2003)
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{'key': '2024020403002693900_r12'}
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Dates

Type	When
Created	21 years, 4 months ago (April 26, 2004, 6:12 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 10 p.m.)
Indexed	2 weeks, 6 days ago (Aug. 6, 2025, 8:53 a.m.)
Issued	21 years, 3 months ago (May 3, 2004)
Published	21 years, 3 months ago (May 3, 2004)
Published Print	21 years, 3 months ago (May 3, 2004)

Funders 0

None

BibTeX

@article{Crozier_2004, title={Synthesis of uniform GaN quantum dot arrays via electron nanolithography of D2GaN3}, volume={84}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1736314}, DOI={10.1063/1.1736314}, number={18}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Crozier, P. A. and Tolle, J. and Kouvetakis, J. and Ritter, Cole}, year={2004}, month=may, pages={3441–3443} }

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