DOI: 10.1063/1.1735395. Angular Distribution of Sputtered Material

Angular Distribution of Sputtered Material

10.1063/1.1735395

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The angular distribution of material sputtered under normal Hg+-ion incidence from flat, polycrystalline targets at 100 to 1000 ev was measured and plotted in polar diagrams. The distribution is ``under cosine,'' approaching a cosine distribution, at higher ion energies. Mo and Fe show a more pronounced tendency to eject to the sides than Ni or Pt. Under oblique ion incidence atoms are sputtered preferentially in the forward direction.

Bibliography

Wehner, G. K., & Rosenberg, D. (1960). Angular Distribution of Sputtered Material. Journal of Applied Physics, 31(1), 177â179.

Authors 2

G. K. Wehner (first)
D. Rosenberg (additional)

References 9 Referenced 171

10.1007/BF01330543 / Z. Physik (1935)
{'key': '2024020118503347100_r2', 'first-page': '1043', 'volume': '81', 'year': '1926', 'journal-title': 'Ann. Physik'} / Ann. Physik (1926)
{'key': '2024020118503347100_r2a', 'first-page': '1006', 'volume': '86', 'year': '1928', 'journal-title': 'Ann. Physik'} / Ann. Physik (1928)
10.1063/1.1721621 / J. Appl. Phys. (1954)
{'key': '2024020118503347100_r4', 'first-page': '1056', 'volume': '26', 'year': '1955', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1955)
10.1103/PhysRev.102.690 / Phys. Rev. (1956)
10.1103/PhysRev.108.35 / Phys. Rev. (1957)
{'key': '2024020118503347100_r7'}
{'key': '2024020118503347100_r8'}

Dates

Type	When
Created	20 years, 3 months ago (April 25, 2005, 1 p.m.)
Deposited	1 year, 6 months ago (Feb. 1, 2024, 2:18 p.m.)
Indexed	1 year ago (Aug. 7, 2024, 11:09 a.m.)
Issued	65 years, 7 months ago (Jan. 1, 1960)
Published	65 years, 7 months ago (Jan. 1, 1960)
Published Print	65 years, 7 months ago (Jan. 1, 1960)

Funders 0

None

BibTeX

@article{Wehner_1960, title={Angular Distribution of Sputtered Material}, volume={31}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1735395}, DOI={10.1063/1.1735395}, number={1}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Wehner, G. K. and Rosenberg, D.}, year={1960}, month=jan, pages={177–179} }

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