DOI: 10.1063/1.1735051. Influence of the Angle of Incidence on Sputtering Yields

Influence of the Angle of Incidence on Sputtering Yields

10.1063/1.1735051

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Small metal spheres are bombarded by uniform Hg+ ion beams of low energy (125 to 800 ev). Comparison of shadow micrographs of the spheres before and after sputtering makes it possible to determine the influence of the angle of incidence on sputtering yields. Fe, Ta, and Mo showed a pronounced increase in yield at more oblique incidence of the ions while Au, Ag, and Pt showed this effect only slightly.

Bibliography

Wehner, G. (1959). Influence of the Angle of Incidence on Sputtering Yields. Journal of Applied Physics, 30(11), 1762â1765.

Authors 1

Gottfried Wehner (first)

References 6 Referenced 142

10.1007/BF01337787 / Z. Physik (1942)
{'key': '2024020118470914800_r2'}
10.1063/1.1721621 / J. Appl. Phys. (1954)
{'key': '2024020118470914800_r4'}
{'key': '2024020118470914800_r5'}
10.1103/PhysRev.108.35 / Phys. Rev. (1957)

Dates

Type	When
Created	20 years, 4 months ago (April 22, 2005, 12:14 p.m.)
Deposited	1 year, 6 months ago (Feb. 1, 2024, 2:11 p.m.)
Indexed	4 weeks, 2 days ago (July 24, 2025, 7:03 a.m.)
Issued	65 years, 9 months ago (Nov. 1, 1959)
Published	65 years, 9 months ago (Nov. 1, 1959)
Published Print	65 years, 9 months ago (Nov. 1, 1959)

Funders 0

None

BibTeX

@article{Wehner_1959, title={Influence of the Angle of Incidence on Sputtering Yields}, volume={30}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1735051}, DOI={10.1063/1.1735051}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Wehner, Gottfried}, year={1959}, month=nov, pages={1762–1765} }

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