DOI: 10.1063/1.1729057. Sputtering Experiments with 1- to 5-keV Ar+ Ions

Sputtering Experiments with 1- to 5-keV Ar+ Ions

10.1063/1.1729057

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Sputtering yields have been determined with 1- to 5-keV Ar+ ions normally incident upon targets of type 304 stainless steel, three different types of polycrystalline Cu, a wide variety of Cu monocrystals, and monocrystals of Si and Ge. Ejection patterns have been recorded from these targets and from a monocrystal of InSb. The sputtering yield of polycrystalline Cu depends on the source of the metal, apparently due to variations in preferred orientation. The yield from Cu monocrystals is strongly dependent on orientation, the effect becoming more pronounced as the energy is increased. A simple model is presented which accounts for this behavior in terms of the variation with direction of the initial mean free path of the incident ion. The ejection patterns leave little doubt that focusing collision chains are primarily responsible for the transport of momentum to the surfaces of close-packed metals.

Bibliography

Southern, A. L., Willis, W. R., & Robinson, M. T. (1963). Sputtering Experiments with 1- to 5-keV Ar+ Ions. Journal of Applied Physics, 34(1), 153â163.

Authors 3

A. L. Southern (first)
William R. Willis (additional)
Mark T. Robinson (additional)

References 41 Referenced 221

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{'key': '2024020206425364700_r27'}

Dates

Type	When
Created	20 years, 3 months ago (April 22, 2005, 12:31 p.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 1:43 a.m.)
Indexed	2 weeks ago (Aug. 6, 2025, 9:02 a.m.)
Issued	62 years, 7 months ago (Jan. 1, 1963)
Published	62 years, 7 months ago (Jan. 1, 1963)
Published Print	62 years, 7 months ago (Jan. 1, 1963)

Funders 0

None

BibTeX

@article{Southern_1963, title={Sputtering Experiments with 1- to 5-keV Ar+ Ions}, volume={34}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1729057}, DOI={10.1063/1.1729057}, number={1}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Southern, A. L. and Willis, William R. and Robinson, Mark T.}, year={1963}, month=jan, pages={153–163} }

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