DOI: 10.1063/1.1728316. Local structure analysis of Ge-Sb-Te phase change materials using high-resolution electron microscopy and nanobeam diffraction

Local structure analysis of Ge-Sb-Te phase change materials using high-resolution electron microscopy and nanobeam diffraction

10.1063/1.1728316

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

As-sputtered and melt-quenched amorphous structures together with the laser-induced crystallized structure of Ge-Sb-Te thin films were investigated using high-resolution electron microscopy (HREM) and nanobeam electron diffraction (NBED). Each of the Ge-Sb-Te thin films was embedded in a four-layered stack, which is the same as the layered structure of phase-change optical disks. Cross-sectional HREM revealed crystalline atomic clusters in the melt-quenched amorphous layer at a greater frequency than in the as-sputtered amorphous layer. Autocorrelation function analysis of the HREM images revealed similarity between the structures of atomic ordered regions in the amorphous phase and that of crystalline Sb. Atomic pair-distribution functions derived from halo NBED intensity analysis indicated that the atomic neighbor correlations developed more in the melt-quenched amorphous phase than in the as-sputtered phase. The development of locally ordered regions is considered to be closely related to the differences in optical properties and crystallization behaviors between these two amorphous phases.

Bibliography

Naito, M., Ishimaru, M., Hirotsu, Y., & Takashima, M. (2004). Local structure analysis of Ge-Sb-Te phase change materials using high-resolution electron microscopy and nanobeam diffraction. Journal of Applied Physics, 95(12), 8130â8135.

Authors 4

Muneyuki Naito (first)
Manabu Ishimaru (additional)
Yoshihiko Hirotsu (additional)
Masaki Takashima (additional)

References 21 Referenced 37

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Dates

Type	When
Created	21 years, 2 months ago (May 28, 2004, 6:01 p.m.)
Deposited	1 year, 6 months ago (Feb. 7, 2024, 7:24 p.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 7:43 p.m.)
Issued	21 years, 2 months ago (June 15, 2004)
Published	21 years, 2 months ago (June 15, 2004)
Published Print	21 years, 2 months ago (June 15, 2004)

Funders 0

None

BibTeX

@article{Naito_2004, title={Local structure analysis of Ge-Sb-Te phase change materials using high-resolution electron microscopy and nanobeam diffraction}, volume={95}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1728316}, DOI={10.1063/1.1728316}, number={12}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Naito, Muneyuki and Ishimaru, Manabu and Hirotsu, Yoshihiko and Takashima, Masaki}, year={2004}, month=jun, pages={8130–8135} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        8
      ]
    ],
    "date-time": "2024-02-08T00:43:25Z",
    "timestamp": 1707353005677
  },
  "reference-count": 21,
  "publisher": "AIP Publishing",
  "issue": "12",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2004,
        6,
        15
      ]
    ]
  },
  "abstract": "<jats:p>As-sputtered and melt-quenched amorphous structures together with the laser-induced crystallized structure of Ge-Sb-Te thin films were investigated using high-resolution electron microscopy (HREM) and nanobeam electron diffraction (NBED). Each of the Ge-Sb-Te thin films was embedded in a four-layered stack, which is the same as the layered structure of phase-change optical disks. Cross-sectional HREM revealed crystalline atomic clusters in the melt-quenched amorphous layer at a greater frequency than in the as-sputtered amorphous layer. Autocorrelation function analysis of the HREM images revealed similarity between the structures of atomic ordered regions in the amorphous phase and that of crystalline Sb. Atomic pair-distribution functions derived from halo NBED intensity analysis indicated that the atomic neighbor correlations developed more in the melt-quenched amorphous phase than in the as-sputtered phase. The development of locally ordered regions is considered to be closely related to the differences in optical properties and crystallization behaviors between these two amorphous phases.</jats:p>",
  "DOI": "10.1063/1.1728316",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2004,
        5,
        28
      ]
    ],
    "date-time": "2004-05-28T22:01:33Z",
    "timestamp": 1085781693000
  },
  "page": "8130-8135",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 37,
  "title": "Local structure analysis of Ge-Sb-Te phase change materials using high-resolution electron microscopy and nanobeam diffraction",
  "prefix": "10.1063",
  "volume": "95",
  "author": [
    {
      "given": "Muneyuki",
      "family": "Naito",
      "sequence": "first",
      "affiliation": [
        {
          "name": "The Institute of Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka\u2009567-0047, Japan"
        }
      ]
    },
    {
      "given": "Manabu",
      "family": "Ishimaru",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "The Institute of Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka\u2009567-0047, Japan"
        }
      ]
    },
    {
      "given": "Yoshihiko",
      "family": "Hirotsu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "The Institute of Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka\u2009567-0047, Japan"
        }
      ]
    },
    {
      "given": "Masaki",
      "family": "Takashima",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Science and Technology and Research Center, Inc., Mitsubishi Chemical Group, Kamoshida-cho, Aoba-ku, Yokohama, Kanagawa\u2009227-8502, Japan"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020718460256800_r1",
      "doi-asserted-by": "crossref",
      "first-page": "254",
      "DOI": "10.1063/1.1653653",
      "volume": "18",
      "year": "1971",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020718460256800_r2",
      "doi-asserted-by": "crossref",
      "first-page": "2849",
      "DOI": "10.1063/1.348620",
      "volume": "69",
      "year": "1991",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020718460256800_r3",
      "doi-asserted-by": "crossref",
      "first-page": "76",
      "DOI": "10.1117/12.453380",
      "volume": "4342",
      "year": "2002",
      "journal-title": "Proc. SPIE"
    },
    {
      "key": "2024020718460256800_r4",
      "doi-asserted-by": "crossref",
      "first-page": "5241",
      "DOI": "10.1143/JJAP.32.5241",
      "volume": "32",
      "year": "1993",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020718460256800_r5",
      "doi-asserted-by": "crossref",
      "first-page": "863",
      "DOI": "10.1143/JJAP.42.863",
      "volume": "42",
      "year": "2003",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020718460256800_r6",
      "doi-asserted-by": "crossref",
      "first-page": "804",
      "DOI": "10.1143/JJAP.42.804",
      "volume": "42",
      "year": "2003",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020718460256800_r7",
      "doi-asserted-by": "crossref",
      "first-page": "1674",
      "DOI": "10.1143/JJAP.41.1674",
      "volume": "41",
      "year": "2002",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020718460256800_r8",
      "doi-asserted-by": "crossref",
      "first-page": "184116",
      "DOI": "10.1103/PhysRevB.64.184116",
      "volume": "64",
      "year": "2001",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020718460256800_r9",
      "doi-asserted-by": "crossref",
      "first-page": "6220",
      "DOI": "10.1364/AO.41.006220",
      "volume": "41",
      "year": "2002",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "2024020718460256800_r10",
      "doi-asserted-by": "crossref",
      "first-page": "435",
      "DOI": "10.1093/jmicro/50.6.435",
      "volume": "50",
      "year": "2001",
      "journal-title": "J. Electron Microsc."
    },
    {
      "key": "2024020718460256800_r11",
      "first-page": "433",
      "volume": "39",
      "year": "1990",
      "journal-title": "J. Electron Microsc."
    },
    {
      "key": "2024020718460256800_r12",
      "doi-asserted-by": "crossref",
      "first-page": "094201",
      "DOI": "10.1103/PhysRevB.67.094201",
      "volume": "67",
      "year": "2003",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020718460256800_r13"
    },
    {
      "key": "2024020718460256800_r14"
    },
    {
      "key": "2024020718460256800_r15"
    },
    {
      "key": "2024020718460256800_r16"
    },
    {
      "key": "2024020718460256800_r17",
      "doi-asserted-by": "crossref",
      "first-page": "L1158",
      "DOI": "10.1143/JJAP.42.L1158",
      "volume": "42",
      "year": "2003",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "2024020718460256800_r18",
      "first-page": "236",
      "volume": "9A",
      "year": "1954",
      "journal-title": "Z. Naturforsch."
    },
    {
      "key": "2024020718460256800_r19",
      "doi-asserted-by": "crossref",
      "first-page": "749",
      "DOI": "10.1107/S0909049500020896",
      "volume": "8",
      "year": "2001",
      "journal-title": "J. Synchrotron Radiat."
    },
    {
      "key": "2024020718460256800_r20",
      "doi-asserted-by": "crossref",
      "first-page": "108",
      "DOI": "10.1117/12.399337",
      "volume": "4090",
      "year": "2000",
      "journal-title": "Proc. SPIE"
    },
    {
      "key": "2024020718460256800_r21"
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/95/12/8130/18710706/8130_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/95/12/8130/18710706/8130_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        8
      ]
    ],
    "date-time": "2024-02-08T00:24:52Z",
    "timestamp": 1707351892000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/95/12/8130/778505/Local-structure-analysis-of-Ge-Sb-Te-phase-change"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2004,
        6,
        15
      ]
    ]
  },
  "references-count": 21,
  "journal-issue": {
    "issue": "12",
    "published-print": {
      "date-parts": [
        [
          2004,
          6,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1728316",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2004,
        6,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2004,
        6,
        15
      ]
    ]
  }
}