Crossref journal-article
AIP Publishing
Journal of Applied Physics (317)
Abstract

Symmetric faceted etch hillocks have been observed on certain germanium surface orientations exposed to an H2O2–HF (Superoxol) etchant. Considerations of surface curvature and etch rate lead to the conclusion that the faces bounding the hillocks must be at saddle points on an etch rate vs orientation surface. A measurement of etch rate throughout the stereographic triangle has supported this conclusion. The formation of dislocation pits and hillocks is discussed in terms of the variation of surface etch rate with orientation.

Bibliography

Batterman, B. W. (1957). Hillocks, Pits, and Etch Rate in Germanium Crystals. Journal of Applied Physics, 28(11), 1236–1241.

Authors 1
  1. Boris W. Batterman (first)
References 9 Referenced 114
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Dates
Type When
Created 20 years, 4 months ago (April 22, 2005, 12:10 p.m.)
Deposited 1 year, 6 months ago (Feb. 1, 2024, 5:23 p.m.)
Indexed 1 month, 2 weeks ago (July 8, 2025, 1:42 p.m.)
Issued 67 years, 9 months ago (Nov. 1, 1957)
Published 67 years, 9 months ago (Nov. 1, 1957)
Published Print 67 years, 9 months ago (Nov. 1, 1957)
Funders 0

None

@article{Batterman_1957, title={Hillocks, Pits, and Etch Rate in Germanium Crystals}, volume={28}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1722624}, DOI={10.1063/1.1722624}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Batterman, Boris W.}, year={1957}, month=nov, pages={1236–1241} }