DOI: 10.1063/1.1719398. Improved Scanning Electron Diffraction System

Improved Scanning Electron Diffraction System

10.1063/1.1719398

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

An improved transmission scanning electron diffraction system is described. It can make angular measurements comparable with those of photographic instruments, its intensity measurements can have an accuracy of ±0.2% for single traces, ±1% for complete frames, its sensitivity is sufficient to give clear intensity signals from specimens of average thickness equal to an atomic layer, its angular resolving power is 0.23 mrad. Important features of the system are a high productivity rate so that many specimens can be grown within the instrument and examined in a short time; the ability to record diffraction patterns continuously as films are grown by vacuum deposition with growth rate/vacuum values of up to 107 Å sec−1 Torr−1; and ability to scan diffraction patterns in two dimensions. Scan rates depend on the response speed of the X-Y recorder used and are 10–50 sec for a single trace, 20–60 min for an entire frame from a single crystal film. The design of the system is discussed and results from polycrystalline, grain-oriented, and growing films are given to demonstrate its versatility and performance.

Bibliography

Grigson, C. W. B. (1965). Improved Scanning Electron Diffraction System. Review of Scientific Instruments, 36(11), 1587â1593.

Authors 1

C. W. B. Grigson (first)

References 17 Referenced 42

{'key': '2024021108261309500_r1', 'first-page': '766', 'volume': '23', 'year': '1958', 'journal-title': 'Bull. Acad. Sci. USSR'} / Bull. Acad. Sci. USSR (1958)
10.1038/192647a0 / Nature (1961)
{'issue': 'II', 'key': '2024021108261309500_r3', 'first-page': '298', 'volume': '17', 'year': '1962', 'journal-title': 'J. Phys. Soc. Japan'} / J. Phys. Soc. Japan (1962)
10.1080/00207216208937377 / J. Electron. Control (1962)
{'key': '2024021108261309500_r5'}
{'issue': 'II', 'key': '2024021108261309500_r6', 'first-page': '294', 'volume': '17', 'year': '1962', 'journal-title': 'J. Phys. Soc. Japan'} / J. Phys. Soc. Japan (1962)
{'issue': 'II', 'key': '2024021108261309500_r7', 'first-page': '61', 'volume': '17', 'year': '1962', 'journal-title': 'J. Phys. Soc. Japan'} / J. Phys. Soc. Japan (1962)
10.1007/BF01366385 / Z. Physik (1960)
10.1515/zna-1962-1205 / Z. Naturforsch. (1962)
{'key': '2024021108261309500_r10', 'first-page': '573', 'volume': '2', 'year': '1963', 'journal-title': 'J. Microscopie'} / J. Microscopie (1963)
{'key': '2024021108261309500_r11'}
10.1016/S0065-2539(08)60998-1 / Advan. Electron. Electron Phys. (1959)
10.1088/0950-7671/42/5/301 / J. Sci. Instr. (1965)
{'key': '2024021108261309500_r14'}
10.1016/0042-207X(62)90818-7 / Vacuum (1962)
{'key': '2024021108261309500_r16', 'first-page': '173', 'volume': '204', 'year': '1964', 'journal-title': 'Nature'} / Nature (1964)
10.1038/2051198a0 / Nature (1965)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 12, 2005, 3:06 p.m.)
Deposited	1 year, 6 months ago (Feb. 11, 2024, 3:26 a.m.)
Indexed	1 year ago (July 26, 2024, 10:29 a.m.)
Issued	59 years, 9 months ago (Nov. 1, 1965)
Published	59 years, 9 months ago (Nov. 1, 1965)
Published Print	59 years, 9 months ago (Nov. 1, 1965)

Funders 0

None

BibTeX

@article{Grigson_1965, title={Improved Scanning Electron Diffraction System}, volume={36}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1719398}, DOI={10.1063/1.1719398}, number={11}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Grigson, C. W. B.}, year={1965}, month=nov, pages={1587–1593} }

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