DOI: 10.1063/1.1715547. Simple, Rapid Sputtering Apparatus

10.1063/1.1715547

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

A simple sputtering apparatus that consistently deposits opaque films of nickel and the noble metals in 3 to 10 min has been made. The chamber is constructed from a standard Pyrex pipe reducer. By use of a large-diameter aluminum rod as the cathode support and a hemispherical aluminum shell as a shield for the pump orifice and base plate, the glow discharge has been confined primarily to the volume between the cathode and the work stand. The efficiency of the coating unit has thereby been increased. Films of nickel, iridium, ruthenium, and osmium formed on glass or quartz substrates were very adherent and were not readily scratched with a steel scribe.

Bibliography

Belser, R. B., & Hicklin, W. H. (1956). Simple, Rapid Sputtering Apparatus. Review of Scientific Instruments, 27(5), 293â296.

Authors 2

Richard B. Belser (first)
Walter H. Hicklin (additional)

References 23 Referenced 47

{'key': '2024020601190491300_r1', 'first-page': '87', 'volume': '1', 'year': '1852', 'journal-title': 'Trans. Roy. Soc. (London)'} / Trans. Roy. Soc. (London) (1852)
{'key': '2024020601190491300_r2', 'first-page': '49', 'volume': 'XIII', 'year': '1877', 'journal-title': 'Am. J. Sci.'} / Am. J. Sci. (1877)
{'key': '2024020601190491300_r2a', 'first-page': '169', 'volume': 'XIV', 'year': '1877', 'journal-title': 'Am. J. Sci.'} / Am. J. Sci. (1877)
{'key': '2024020601190491300_r3', 'first-page': '88', 'volume': '50', 'year': '1891', 'journal-title': 'Proc. Roy. Soc. (London)'} / Proc. Roy. Soc. (London) (1891)
10.1080/14786440209462890 / Phil. Mag. and J. Sci. (1902)
{'key': '2024020601190491300_r5', 'first-page': '531', 'volume': '49', 'year': '1916', 'journal-title': 'Ann. Physik'} / Ann. Physik (1916)
{'key': '2024020601190491300_r6', 'first-page': '858', 'volume': '5', 'year': '1928', 'journal-title': 'Phil. Mag.'} / Phil. Mag. (1928)
10.1063/1.1751791 / Rev. Sci. Instr. (1934)
10.1103/PhysRev.65.319 / Phys. Rev. (1944)
10.1063/1.1721621 / J. Appl. Phys. (1954)
{'key': '2024020601190491300_r10'}
{'key': '2024020601190491300_r11', 'first-page': '506', 'volume': '14', 'year': '1912', 'journal-title': 'Deutsch. Phys. Gesell., Verh.'} / Deutsch. Phys. Gesell., Verh. (1912)
{'key': '2024020601190491300_r12'}
{'key': '2024020601190491300_r13'}
{'key': '2024020601190491300_r14', 'first-page': '41', 'volume': '43', 'year': '1940', 'journal-title': 'Proc. Amst. Acad.'} / Proc. Amst. Acad. (1940)
{'key': '2024020601190491300_r15', 'first-page': '1098', 'volume': '92', 'year': '1953', 'journal-title': 'Phys. Rev.'} / Phys. Rev. (1953)
{'key': '2024020601190491300_r16', 'first-page': '307', 'volume': '95', 'year': '1954', 'journal-title': 'Phys. Rev.'} / Phys. Rev. (1954)
10.1063/1.1771017 / Rev. Sci. Instr. (1954)
{'key': '2024020601190491300_r18'}
{'key': '2024020601190491300_r19'}
{'key': '2024020601190491300_r20'}
{'key': '2024020601190491300_r21'}
{'key': '2024020601190491300_r22'}

Dates

Type	When
Created	20 years, 6 months ago (Feb. 12, 2005, 4:23 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 8:30 p.m.)
Indexed	1 year, 5 months ago (March 18, 2024, 8:39 p.m.)
Issued	69 years, 3 months ago (May 1, 1956)
Published	69 years, 3 months ago (May 1, 1956)
Published Print	69 years, 3 months ago (May 1, 1956)

Funders 0

None

BibTeX

@article{Belser_1956, title={Simple, Rapid Sputtering Apparatus}, volume={27}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1715547}, DOI={10.1063/1.1715547}, number={5}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Belser, Richard B. and Hicklin, Walter H.}, year={1956}, month=may, pages={293–296} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        3,
        19
      ]
    ],
    "date-time": "2024-03-19T00:39:26Z",
    "timestamp": 1710808766693
  },
  "reference-count": 23,
  "publisher": "AIP Publishing",
  "issue": "5",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1956,
        5,
        1
      ]
    ]
  },
  "abstract": "<jats:p>A simple sputtering apparatus that consistently deposits opaque films of nickel and the noble metals in 3 to 10 min has been made. The chamber is constructed from a standard Pyrex pipe reducer. By use of a large-diameter aluminum rod as the cathode support and a hemispherical aluminum shell as a shield for the pump orifice and base plate, the glow discharge has been confined primarily to the volume between the cathode and the work stand. The efficiency of the coating unit has thereby been increased. Films of nickel, iridium, ruthenium, and osmium formed on glass or quartz substrates were very adherent and were not readily scratched with a steel scribe.</jats:p>",
  "DOI": "10.1063/1.1715547",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        2,
        12
      ]
    ],
    "date-time": "2005-02-12T21:23:58Z",
    "timestamp": 1108243438000
  },
  "page": "293-296",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 47,
  "title": "Simple, Rapid Sputtering Apparatus",
  "prefix": "10.1063",
  "volume": "27",
  "author": [
    {
      "given": "Richard B.",
      "family": "Belser",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Engineering Experiment Station, Georgia Institute of Technology, Atlanta, Georgia"
        }
      ]
    },
    {
      "given": "Walter H.",
      "family": "Hicklin",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Engineering Experiment Station, Georgia Institute of Technology, Atlanta, Georgia"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020601190491300_r1",
      "first-page": "87",
      "volume": "1",
      "year": "1852",
      "journal-title": "Trans. Roy. Soc. (London)"
    },
    {
      "key": "2024020601190491300_r2",
      "first-page": "49",
      "volume": "XIII",
      "year": "1877",
      "journal-title": "Am. J. Sci."
    },
    {
      "key": "2024020601190491300_r2a",
      "first-page": "169",
      "volume": "XIV",
      "year": "1877",
      "journal-title": "Am. J. Sci."
    },
    {
      "key": "2024020601190491300_r3",
      "first-page": "88",
      "volume": "50",
      "year": "1891",
      "journal-title": "Proc. Roy. Soc. (London)"
    },
    {
      "key": "2024020601190491300_r4",
      "doi-asserted-by": "crossref",
      "first-page": "652",
      "DOI": "10.1080/14786440209462890",
      "volume": "4",
      "year": "1902",
      "journal-title": "Phil. Mag. and J. Sci."
    },
    {
      "key": "2024020601190491300_r5",
      "first-page": "531",
      "volume": "49",
      "year": "1916",
      "journal-title": "Ann. Physik"
    },
    {
      "key": "2024020601190491300_r6",
      "first-page": "858",
      "volume": "5",
      "year": "1928",
      "journal-title": "Phil. Mag."
    },
    {
      "key": "2024020601190491300_r7",
      "doi-asserted-by": "crossref",
      "first-page": "85",
      "DOI": "10.1063/1.1751791",
      "volume": "5",
      "year": "1934",
      "journal-title": "Rev. Sci. Instr."
    },
    {
      "key": "2024020601190491300_r8",
      "doi-asserted-by": "crossref",
      "first-page": "319",
      "DOI": "10.1103/PhysRev.65.319",
      "volume": "65",
      "year": "1944",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020601190491300_r9",
      "doi-asserted-by": "crossref",
      "first-page": "270",
      "DOI": "10.1063/1.1721621",
      "volume": "25",
      "year": "1954",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020601190491300_r10"
    },
    {
      "key": "2024020601190491300_r11",
      "first-page": "506",
      "volume": "14",
      "year": "1912",
      "journal-title": "Deutsch. Phys. Gesell., Verh."
    },
    {
      "key": "2024020601190491300_r12"
    },
    {
      "key": "2024020601190491300_r13"
    },
    {
      "key": "2024020601190491300_r14",
      "first-page": "41",
      "volume": "43",
      "year": "1940",
      "journal-title": "Proc. Amst. Acad."
    },
    {
      "key": "2024020601190491300_r15",
      "first-page": "1098",
      "volume": "92",
      "year": "1953",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020601190491300_r16",
      "first-page": "307",
      "volume": "95",
      "year": "1954",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020601190491300_r17",
      "doi-asserted-by": "crossref",
      "first-page": "180",
      "DOI": "10.1063/1.1771017",
      "volume": "25",
      "year": "1954",
      "journal-title": "Rev. Sci. Instr."
    },
    {
      "key": "2024020601190491300_r18"
    },
    {
      "key": "2024020601190491300_r19"
    },
    {
      "key": "2024020601190491300_r20"
    },
    {
      "key": "2024020601190491300_r21"
    },
    {
      "key": "2024020601190491300_r22"
    }
  ],
  "container-title": "Review of Scientific Instruments",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/27/5/293/19164900/293_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/27/5/293/19164900/293_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        6
      ]
    ],
    "date-time": "2024-02-06T01:30:48Z",
    "timestamp": 1707183048000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/rsi/article/27/5/293/299170/Simple-Rapid-Sputtering-Apparatus"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1956,
        5,
        1
      ]
    ]
  },
  "references-count": 23,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          1956,
          5,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1715547",
  "relation": {},
  "ISSN": [
    "0034-6748",
    "1089-7623"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1956,
        5
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1956,
        5,
        1
      ]
    ]
  }
}