DOI: 10.1063/1.1713048. Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films

Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films

10.1063/1.1713048

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

In this letter, we report fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films and the effect of annealing on this ordering. Annealed and unannealed diamond-like carbon films have almost identical short-range order. Our fluctuation microscopy results, however, indicate the presence of medium range order or clustering in the films on a lateral length scale that exceeds 1 nm. Within the clustered regions, the dominant local ordering appears to be diamond-like, and graphite-like ordering is not observed. Thermal annealing up to 600 °C leads to an increase in diamond-like clustering with no onset of graphite-like clustering. However, after high temperature annealing up to 1000 °C, graphite-like clustering becomes apparent as a result of the conversion of diamond-like carbon to graphite-like carbon. The results on the as-deposited films and films annealed up to 600 °C suggest that a spontaneous medium range ordering process occurs in diamond-like carbon films during and subsequent to film growth, and this may play an important role in stress relaxation.

Bibliography

Chen, X., Sullivan, J. P., Friedmann, T. A., & Gibson, J. M. (2004). Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films. Applied Physics Letters, 84(15), 2823â2825.

Authors 4

Xidong Chen (first)
J. P. Sullivan (additional)
T. A. Friedmann (additional)
J. Murray Gibson (additional)

References 17 Referenced 39

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{'key': '2024020402491294500_r4', 'first-page': '765', 'volume': '266–269', 'year': '2000', 'journal-title': 'J. Non-Cryst. Solids'} / J. Non-Cryst. Solids (2000)
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{'key': '2024020402491294500_r8'}
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{'key': '2024020402491294500_r11'}
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Dates

Type	When
Created	21 years, 4 months ago (April 6, 2004, 6:04 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 9:49 p.m.)
Indexed	1 year, 2 months ago (June 18, 2024, 6:34 p.m.)
Issued	21 years, 4 months ago (April 12, 2004)
Published	21 years, 4 months ago (April 12, 2004)
Published Print	21 years, 4 months ago (April 12, 2004)

Funders 0

None

BibTeX

@article{Chen_2004, title={Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films}, volume={84}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1713048}, DOI={10.1063/1.1713048}, number={15}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Chen, Xidong and Sullivan, J. P. and Friedmann, T. A. and Gibson, J. Murray}, year={2004}, month=apr, pages={2823–2825} }

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