DOI: 10.1063/1.1695440. Remote hydrogen plasma doping of single crystal ZnO

Remote hydrogen plasma doping of single crystal ZnO

10.1063/1.1695440

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We demonstrate that remote plasma hydrogenation can increase electron concentrations in ZnO single crystals by more than an order of magnitude. We investigated the effects of this treatment on Hall concentration and mobility as well as on the bound exciton emission peak I4 for a variety of ZnO single crystals–bulk air annealed, Li doped, and epitaxially grown on sapphire. Hydrogen increases I4 intensity in conducting samples annealed at 500 and 600 °C and partially restores emission in the I4 range for Li-diffused ZnO. Hydrogenation increases carrier concentration significantly for the semi-insulating Li doped and epitaxial thin film samples. These results indicate a strong link between the incorporation of hydrogen, increased donor-bound exciton PL emission, and increased n-type conductivity.

Bibliography

Strzhemechny, Y. M., Mosbacker, H. L., Look, D. C., Reynolds, D. C., Litton, C. W., Garces, N. Y., Giles, N. C., Halliburton, L. E., Niki, S., & Brillson, L. J. (2004). Remote hydrogen plasma doping of single crystal ZnO. Applied Physics Letters, 84(14), 2545â2547.

Authors 10

Yuri M. Strzhemechny (first)
Howard L. Mosbacker (additional)
David C. Look (additional)
Donald C. Reynolds (additional)
Cole W. Litton (additional)
Nelson Y. Garces (additional)
Nancy C. Giles (additional)
Larry E. Halliburton (additional)
Shigeru Niki (additional)
Leonard J. Brillson (additional)

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Dates

Type	When
Created	21 years, 5 months ago (April 1, 2004, 6:04 p.m.)
Deposited	1 year, 7 months ago (Feb. 3, 2024, 9:52 p.m.)
Indexed	4 months, 2 weeks ago (April 18, 2025, 3:03 p.m.)
Issued	21 years, 5 months ago (April 5, 2004)
Published	21 years, 5 months ago (April 5, 2004)
Published Print	21 years, 5 months ago (April 5, 2004)

Funders 0

None

BibTeX

@article{Strzhemechny_2004, title={Remote hydrogen plasma doping of single crystal ZnO}, volume={84}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1695440}, DOI={10.1063/1.1695440}, number={14}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Strzhemechny, Yuri M. and Mosbacker, Howard L. and Look, David C. and Reynolds, Donald C. and Litton, Cole W. and Garces, Nelson Y. and Giles, Nancy C. and Halliburton, Larry E. and Niki, Shigeru and Brillson, Leonard J.}, year={2004}, month=apr, pages={2545–2547} }

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