DOI: 10.1063/1.1684146. A New High Resolution Reflection Scanning Electron Microscope

A New High Resolution Reflection Scanning Electron Microscope

10.1063/1.1684146

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

A new high resolution reflection scanning electron microscope has been built with a lanthanum hexaboride cathode electron gun, a contamination-free vacuum system, and in which the deteriorating eflects of vibration and ac stray field interference have been reduced below significant levels. The microscope produces a minimum probe diameter of 30±7 Å with a current of 10−12 A at a working distance of 7 mm and an accelerating voltage of 23 kV. Point-to-point resolution of 50±10 Å has been measured in scanning reflection.

Bibliography

Broers, A. N. (1969). A New High Resolution Reflection Scanning Electron Microscope. Review of Scientific Instruments, 40(8), 1040â1045.

Authors 1

A. N. Broers (first)

References 18 Referenced 49

{'key': '2024020611212007800_r1', 'first-page': '181', 'volume': '21', 'year': '1965', 'journal-title': 'Advan. Electron. Electron Phys.'} / Advan. Electron. Electron Phys. (1965)
10.1088/0950-7671/42/1/309 / J. Sci. Instrum. (1965)
{'key': '2024020611212007800_r3'}
{'key': '2024020611212007800_r4'}
{'key': '2024020611212007800_r4a'}
10.1063/1.1656079 / J. Appl. Phys. (1968)
{'key': '2024020611212007800_r6'}
10.1063/1.1709807 / Appl. Phys. (1967)
10.1088/0022-3735/2/3/310 / J. Sci. Instrum. (J. Phys. E) (1969)
{'key': '2024020611212007800_r9', 'first-page': '682', 'volume': '68B', 'year': '1955', 'journal-title': 'Proc. Phys. Soc. (London)'} / Proc. Phys. Soc. (London) (1955)
{'key': '2024020611212007800_r10'}
10.1109/JRPROC.1937.228419 / Proc. IRE (1937)
{'key': '2024020611212007800_r12'}
10.1088/0950-7671/30/10/303 / J. Sci. Instrum. (1953)
{'key': '2024020611212007800_r14', 'first-page': '387', 'volume': 'A243', 'year': '1951', 'journal-title': 'Phil. Trans. Roy. Soc.'} / Phil. Trans. Roy. Soc. (1951)
{'key': '2024020611212007800_r15'}
10.1080/00207215908937191 / J. Electron. Control (1959)
{'key': '2024020611212007800_r17'}

Dates

Type	When
Created	21 years, 6 months ago (Feb. 10, 2004, 4:49 p.m.)
Deposited	1 year, 6 months ago (Feb. 6, 2024, 6:52 a.m.)
Indexed	1 month ago (July 24, 2025, 7:26 a.m.)
Issued	56 years ago (Aug. 1, 1969)
Published	56 years ago (Aug. 1, 1969)
Published Print	56 years ago (Aug. 1, 1969)

Funders 0

None

BibTeX

@article{Broers_1969, title={A New High Resolution Reflection Scanning Electron Microscope}, volume={40}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.1684146}, DOI={10.1063/1.1684146}, number={8}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Broers, A. N.}, year={1969}, month=aug, pages={1040–1045} }

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