Abstract
To test the suggestion that an enhancement of sputtering occurs in very dense collision cascades, the sputtering yield per atom was compared for atomic and molecular ions. In all cases tested, the yield per atom was higher for the molecular ions. This effect is the more pronounced the heavier the projectile and the target. In the molecular cases the overlapping cascades have higher energy densities than those initiated by the atomic ions; our results, therefore, support the suggestion of a sputtering enhancement in dense cascades.
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Dates
Type | When |
---|---|
Created | 21 years, 6 months ago (Feb. 4, 2004, 12:27 p.m.) |
Deposited | 1 year, 6 months ago (Feb. 4, 2024, 12:31 p.m.) |
Indexed | 3 months, 1 week ago (May 14, 2025, 4:29 a.m.) |
Issued | 51 years, 6 months ago (Feb. 1, 1974) |
Published | 51 years, 6 months ago (Feb. 1, 1974) |
Published Print | 51 years, 6 months ago (Feb. 1, 1974) |
@article{Andersen_1974, title={Nonlinear effects in heavy-ion sputtering}, volume={45}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1663348}, DOI={10.1063/1.1663348}, number={2}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Andersen, H. H. and Bay, H. L.}, year={1974}, month=feb, pages={953–954} }