DOI: 10.1063/1.1660654. Ion-Beam Deposition of Thin Films of Diamondlike Carbon

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

10.1063/1.1660654

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

An ion-beam deposition technique has been developed and was used to deposit thin films of insulating carbon on room-temperature substrates. It was established that the carbon films deposited using this technique are insulating and have the following characteristics similar to that of carbon in the diamond form: (1) transparency, (2) index of refraction greater than 2.0, (3) highly insulating, (4) able to scratch glass, (5) resistant to hydrofluoric acid for long periods of time, (6) at least partially crystalline and with a lattice constant similar to diamond as demonstrated by x-ray diffraction, (7) dielectric constant between about 8 and 14 (diamond is 16.5). A resistance to sodium ion diffusion has been experimentally demonstrated. Preliminary measurements at a dose of 1 Mrad indicated a radiation resistance from the point of view of stability of leakage resistance and of negligibly small flat band voltage shifts. Several coplanar thin-film transistors using the insulating carbon gate have been fabricated.

Bibliography

Aisenberg, S., & Chabot, R. (1971). Ion-Beam Deposition of Thin Films of Diamondlike Carbon. Journal of Applied Physics, 42(7), 2953â2958.

Authors 2

Sol Aisenberg (first)
Ronald Chabot (additional)

References 8 Referenced 1,028

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Dates

Type	When
Created	21 years, 6 months ago (Feb. 9, 2004, 1:09 p.m.)
Deposited	1 year, 6 months ago (Feb. 1, 2024, 10:15 p.m.)
Indexed	3 days, 12 hours ago (Aug. 27, 2025, 11:59 a.m.)
Issued	54 years, 2 months ago (June 1, 1971)
Published	54 years, 2 months ago (June 1, 1971)
Published Print	54 years, 2 months ago (June 1, 1971)

Funders 0

None

BibTeX

@article{Aisenberg_1971, title={Ion-Beam Deposition of Thin Films of Diamondlike Carbon}, volume={42}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1660654}, DOI={10.1063/1.1660654}, number={7}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Aisenberg, Sol and Chabot, Ronald}, year={1971}, month=jun, pages={2953–2958} }

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