DOI: 10.1063/1.1659996. Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents

Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents

10.1063/1.1659996

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

When electron currents flow in thermal SiO2 films which have been exposed to water, a buildup of negative charge occurs in the oxide. This paper describes a series of experiments designed to characterize this charging effect. It is found that if water is diffused into a SiO2 film, water related centers are formed which act like electron traps with capture cross section of approximately 1.5 × 10−17 cm2. Experiments are described which show that when one of these centers captures an electron, atomic hydrogen is released which diffuses away and escapes or reacts and a stable negative charge is left behind. Electrochemical charging effects of this type have not previously been considered, although they may play a very important role in some semiconductor device failure effects.

Bibliography

Nicollian, E. H., Berglund, C. N., Schmidt, P. F., & Andrews, J. M. (1971). Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents. Journal of Applied Physics, 42(13), 5654â5664.

Authors 4

E. H. Nicollian (first)
C. N. Berglund (additional)
P. F. Schmidt (additional)
J. M. Andrews (additional)

References 29 Referenced 370

10.1063/1.1652955 / Appl. Phys. Letters (1969)
{'key': '2024020203383969500_r2', 'first-page': '871', 'volume': 'ED-17', 'year': '1970', 'journal-title': 'IEEE Trans. Electron. Devices'} / IEEE Trans. Electron. Devices (1970)
10.1063/1.1652996 / Appl. Phys. Letters (1969)
{'key': '2024020203383969500_r4'}
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10.1002/j.1538-7305.1967.tb01727.x / Bell System Tech. J. (1967)
{'key': '2024020203383969500_r8'}
10.1063/1.1709189 / J. Appl. Phys. (1967)
10.1016/0038-1101(68)90087-7 / Solid-State Electron. (1968)
{'key': '2024020203383969500_r11', 'first-page': '208', 'volume': '28', 'year': '1967', 'journal-title': 'RCA Rev.'} / RCA Rev. (1967)
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10.1103/PhysRev.87.835 / Phys. Rev. (1952)
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10.1002/j.1538-7305.1967.tb01738.x / Bell System Tech. J. (1967)
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10.1103/PhysRev.140.A569 / Phys. Rev. (1965)

Dates

Type	When
Created	21 years, 6 months ago (Feb. 9, 2004, 1:09 p.m.)
Deposited	1 year, 6 months ago (Feb. 1, 2024, 10:39 p.m.)
Indexed	2 weeks, 3 days ago (Aug. 7, 2025, 4:47 p.m.)
Issued	53 years, 8 months ago (Dec. 1, 1971)
Published	53 years, 8 months ago (Dec. 1, 1971)
Published Print	53 years, 8 months ago (Dec. 1, 1971)

Funders 0

None

BibTeX

@article{Nicollian_1971, title={Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents}, volume={42}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1659996}, DOI={10.1063/1.1659996}, number={13}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Nicollian, E. H. and Berglund, C. N. and Schmidt, P. F. and Andrews, J. M.}, year={1971}, month=dec, pages={5654–5664} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        7
      ]
    ],
    "date-time": "2025-08-07T20:47:28Z",
    "timestamp": 1754599648075
  },
  "reference-count": 29,
  "publisher": "AIP Publishing",
  "issue": "13",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1971,
        12,
        1
      ]
    ]
  },
  "abstract": "<jats:p>When electron currents flow in thermal SiO2 films which have been exposed to water, a buildup of negative charge occurs in the oxide. This paper describes a series of experiments designed to characterize this charging effect. It is found that if water is diffused into a SiO2 film, water related centers are formed which act like electron traps with capture cross section of approximately 1.5 \u00d7 10\u221217 cm2. Experiments are described which show that when one of these centers captures an electron, atomic hydrogen is released which diffuses away and escapes or reacts and a stable negative charge is left behind. Electrochemical charging effects of this type have not previously been considered, although they may play a very important role in some semiconductor device failure effects.</jats:p>",
  "DOI": "10.1063/1.1659996",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2004,
        2,
        9
      ]
    ],
    "date-time": "2004-02-09T18:09:19Z",
    "timestamp": 1076350159000
  },
  "page": "5654-5664",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 370,
  "title": "Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents",
  "prefix": "10.1063",
  "volume": "42",
  "author": [
    {
      "given": "E. H.",
      "family": "Nicollian",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Bell Telephone Laboratories, Murry Hill, New Jersey 07974"
        }
      ]
    },
    {
      "given": "C. N.",
      "family": "Berglund",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Bell Telephone Laboratories, Murry Hill, New Jersey 07974"
        }
      ]
    },
    {
      "given": "P. F.",
      "family": "Schmidt",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Bell Telephone Laboratories, Allentown, Pennsylvania 18100"
        }
      ]
    },
    {
      "given": "J. M.",
      "family": "Andrews",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Bell Telephone Laboratories, Allentown, Pennsylvania 18100"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020203383969500_r1",
      "doi-asserted-by": "crossref",
      "first-page": "174",
      "DOI": "10.1063/1.1652955",
      "volume": "15",
      "year": "1969",
      "journal-title": "Appl. Phys. Letters"
    },
    {
      "key": "2024020203383969500_r2",
      "first-page": "871",
      "volume": "ED-17",
      "year": "1970",
      "journal-title": "IEEE Trans. Electron. Devices"
    },
    {
      "key": "2024020203383969500_r3",
      "doi-asserted-by": "crossref",
      "first-page": "270",
      "DOI": "10.1063/1.1652996",
      "volume": "15",
      "year": "1969",
      "journal-title": "Appl. Phys. Letters"
    },
    {
      "key": "2024020203383969500_r4"
    },
    {
      "key": "2024020203383969500_r5",
      "doi-asserted-by": "crossref",
      "first-page": "3052",
      "DOI": "10.1063/1.1659364",
      "volume": "41",
      "year": "1970",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020203383969500_r6",
      "doi-asserted-by": "crossref",
      "first-page": "138",
      "DOI": "10.1149/1.2423887",
      "volume": "113",
      "year": "1966",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020203383969500_r7",
      "doi-asserted-by": "crossref",
      "first-page": "1055",
      "DOI": "10.1002/j.1538-7305.1967.tb01727.x",
      "volume": "46",
      "year": "1967",
      "journal-title": "Bell System Tech. J."
    },
    {
      "key": "2024020203383969500_r8"
    },
    {
      "key": "2024020203383969500_r9",
      "doi-asserted-by": "crossref",
      "first-page": "4582",
      "DOI": "10.1063/1.1709189",
      "volume": "38",
      "year": "1967",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020203383969500_r10",
      "doi-asserted-by": "crossref",
      "first-page": "261",
      "DOI": "10.1016/0038-1101(68)90087-7",
      "volume": "11",
      "year": "1968",
      "journal-title": "Solid-State Electron."
    },
    {
      "key": "2024020203383969500_r11",
      "first-page": "208",
      "volume": "28",
      "year": "1967",
      "journal-title": "RCA Rev."
    },
    {
      "key": "2024020203383969500_r12",
      "doi-asserted-by": "crossref",
      "first-page": "1168",
      "DOI": "10.1109/PROC.1967.5776",
      "volume": "55",
      "year": "1967",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2024020203383969500_r13",
      "doi-asserted-by": "crossref",
      "first-page": "677",
      "DOI": "10.1149/1.2407603",
      "volume": "117",
      "year": "1970",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020203383969500_r14",
      "doi-asserted-by": "crossref",
      "first-page": "614",
      "DOI": "10.1149/1.2408122",
      "volume": "118",
      "year": "1971",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020203383969500_r15",
      "doi-asserted-by": "crossref",
      "first-page": "196",
      "DOI": "10.1149/1.2426537",
      "volume": "114",
      "year": "1967",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020203383969500_r16",
      "doi-asserted-by": "crossref",
      "first-page": "184",
      "DOI": "10.1016/0039-6028(69)90247-7",
      "volume": "13",
      "year": "1969",
      "journal-title": "Surface Sci."
    },
    {
      "key": "2024020203383969500_r17",
      "doi-asserted-by": "crossref",
      "first-page": "835",
      "DOI": "10.1103/PhysRev.87.835",
      "volume": "87",
      "year": "1952",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020203383969500_r18",
      "doi-asserted-by": "crossref",
      "first-page": "266",
      "DOI": "10.1149/1.2426565",
      "volume": "114",
      "year": "1967",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020203383969500_r19",
      "doi-asserted-by": "crossref",
      "first-page": "1664",
      "DOI": "10.1063/1.1703105",
      "volume": "36",
      "year": "1965",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020203383969500_r20",
      "doi-asserted-by": "crossref",
      "first-page": "74",
      "DOI": "10.1063/1.1699825",
      "volume": "22",
      "year": "1951",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020203383969500_r21",
      "first-page": "22",
      "volume": "29",
      "year": "1968",
      "journal-title": "RCA Rev."
    },
    {
      "key": "2024020203383969500_r22",
      "doi-asserted-by": "crossref",
      "first-page": "921",
      "DOI": "10.1021/j100811a040",
      "volume": "66",
      "year": "1962",
      "journal-title": "J. Phys. Chem."
    },
    {
      "key": "2024020203383969500_r23",
      "doi-asserted-by": "crossref",
      "first-page": "1329",
      "DOI": "10.1016/0013-4686(68)80060-X",
      "volume": "13",
      "year": "1968",
      "journal-title": "Electrochim. Acta"
    },
    {
      "key": "2024020203383969500_r24",
      "doi-asserted-by": "crossref",
      "first-page": "573",
      "DOI": "10.1063/1.1660066",
      "volume": "42",
      "year": "1971",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020203383969500_r25",
      "first-page": "41",
      "volume": "NS-17",
      "year": "1970",
      "journal-title": "IEEE Trans. Nucl. Sci."
    },
    {
      "key": "2024020203383969500_r26",
      "doi-asserted-by": "crossref",
      "first-page": "1288",
      "DOI": "10.1002/j.1538-7305.1967.tb01738.x",
      "volume": "46",
      "year": "1967",
      "journal-title": "Bell System Tech. J."
    },
    {
      "key": "2024020203383969500_r27",
      "doi-asserted-by": "crossref",
      "first-page": "1207",
      "DOI": "10.1109/PROC.1970.7897",
      "volume": "58",
      "year": "1970",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2024020203383969500_r28",
      "doi-asserted-by": "crossref",
      "first-page": "865",
      "DOI": "10.1016/0038-1101(67)90169-4",
      "volume": "10",
      "year": "1967",
      "journal-title": "Solid-State Electron."
    },
    {
      "key": "2024020203383969500_r29",
      "doi-asserted-by": "crossref",
      "first-page": "A569",
      "DOI": "10.1103/PhysRev.140.A569",
      "volume": "140",
      "year": "1965",
      "journal-title": "Phys. Rev."
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/42/13/5654/18359802/5654_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/42/13/5654/18359802/5654_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        2
      ]
    ],
    "date-time": "2024-02-02T03:39:07Z",
    "timestamp": 1706845147000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/42/13/5654/500645/Electrochemical-Charging-of-Thermal-SiO2-Films-by"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1971,
        12,
        1
      ]
    ]
  },
  "references-count": 29,
  "journal-issue": {
    "issue": "13",
    "published-print": {
      "date-parts": [
        [
          1971,
          12,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1659996",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1971,
        12
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1971,
        12,
        1
      ]
    ]
  }
}