DOI: 10.1063/1.1655341. Simulation of structural anisotropy and void formation in amorphous thin films

Simulation of structural anisotropy and void formation in amorphous thin films

10.1063/1.1655341

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We have computer simulated the structure of thin amorphous films grown from a vapor. Our hard-sphere model shows that structural anisotropy and voids are a natural occurrence of the deposition process. The amount of unfilled space (voids) and the anisotropy have been studied as a function of the angle of incidence of the vapor stream upon the substrate.

Bibliography

Henderson, D., Brodsky, M. H., & Chaudhari, P. (1974). Simulation of structural anisotropy and void formation in amorphous thin films. Applied Physics Letters, 25(11), 641â643.

Authors 3

D. Henderson (first)
M. H. Brodsky (additional)
P. Chaudhari (additional)

References 18 Referenced 183

{'key': '2024020508531853000_r1', 'first-page': '299', 'volume': '280', 'year': '1964', 'journal-title': 'Proc. R. Soc. A'} / Proc. R. Soc. A (1964)
{'key': '2024020508531853000_r2', 'first-page': '479', 'volume': '319', 'year': '1970', 'journal-title': 'Proc. R. Soc. A'} / Proc. R. Soc. A (1970)
10.1063/1.1661585 / J. Appl. Phys. (1972)
10.1016/0022-3093(73)90054-9 / J. Non-Cryst. Solids (1973)
{'key': '2024020508531853000_r5'}
10.1016/0022-3093(71)90038-X / J. Non-Cryst. Solids (1971)
10.1103/PhysRevLett.31.92 / Phys. Rev. Lett. (1973)
{'key': '2024020508531853000_r7'}
{'key': '2024020508531853000_r7a', 'first-page': '359', 'volume': '8–10', 'year': '1972', 'journal-title': 'J. Non-Cryst. Solids'} / J. Non-Cryst. Solids (1972)
10.1080/14786437208223861 / Philos. Mag. (1972)
{'key': '2024020508531853000_r9', 'first-page': '381', 'volume': '8–10', 'year': '1972', 'journal-title': 'J. Non-Cryst. Solids'} / J. Non-Cryst. Solids (1972)
{'key': '2024020508531853000_r10'}
{'key': '2024020508531853000_r11'}
10.1103/PhysRevLett.23.581 / Phys. Rev. Lett. (1969)
10.1147/rd.171.0066 / IBM J. Develop. (1973)
10.1063/1.1654860 / Appl. Phys. Lett. (1973)
{'key': '2024020508531853000_r15', 'first-page': '755', 'volume': '31', 'year': '1960', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1960)
10.1016/0040-6090(72)90276-3 / Thin Solid Films (1972)

Dates

Type	When
Created	21 years, 6 months ago (Jan. 30, 2004, 3:50 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 3:53 a.m.)
Indexed	2 months, 1 week ago (June 16, 2025, 9:29 a.m.)
Issued	50 years, 8 months ago (Dec. 1, 1974)
Published	50 years, 8 months ago (Dec. 1, 1974)
Published Print	50 years, 8 months ago (Dec. 1, 1974)

Funders 0

None

BibTeX

@article{Henderson_1974, title={Simulation of structural anisotropy and void formation in amorphous thin films}, volume={25}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1655341}, DOI={10.1063/1.1655341}, number={11}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Henderson, D. and Brodsky, M. H. and Chaudhari, P.}, year={1974}, month=dec, pages={641–643} }

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