DOI: 10.1063/1.1654916. Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM)

Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM)

10.1063/1.1654916

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We have obtained a low-loss image from a solid specimen in the high-field region of the condenser-objective lens in a high-resolution SEM. These experiments have demonstrated an edge sharpness of 15 Å and a point-to-point resolution of better than 50 Å between gold dots on a latex ball on a solid substrate. In theory, it should be possible to obtain micrographs from solid specimens with a resolution of 10 Å by this method.

Bibliography

Wells, O. C., Broers, A. N., & Bremer, C. G. (1973). Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM). Applied Physics Letters, 23(6), 353â355.

Authors 3

O. C. Wells (first)
A. N. Broers (additional)
C. G. Bremer (additional)

References 8 Referenced 54

10.1063/1.1654527 / Appl. Phys. Lett. (1973)
{'key': '2024020508241889300_r2'}
10.1063/1.1653139 / Appl. Phys. Lett. (1970)
10.1063/1.1653899 / Appl. Phys. Lett. (1971)
{'key': '2024020508241889300_r4a'}
{'key': '2024020508241889300_r5'}
{'key': '2024020508241889300_r6'}
10.1016/0022-2836(70)90052-5 / J. Mol. Biol. (1970)

Dates

Type	When
Created	21 years, 6 months ago (Jan. 30, 2004, 3:38 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 3:24 a.m.)
Indexed	1 month ago (July 24, 2025, 7:38 a.m.)
Issued	51 years, 11 months ago (Sept. 15, 1973)
Published	51 years, 11 months ago (Sept. 15, 1973)
Published Print	51 years, 11 months ago (Sept. 15, 1973)

Funders 0

None

BibTeX

@article{Wells_1973, title={Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM)}, volume={23}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1654916}, DOI={10.1063/1.1654916}, number={6}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Wells, O. C. and Broers, A. N. and Bremer, C. G.}, year={1973}, month=sep, pages={353–355} }

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