DOI: 10.1063/1.1654858. Molecular beam epitaxy of alternating metal-semiconductor films

Molecular beam epitaxy of alternating metal-semiconductor films

10.1063/1.1654858

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Epitaxial growth of alternating thin films of GaAs and Al was achieved on GaAs substrates of various orientations. In situ high-energy electron diffraction (HEED) analysis was used to monitor the molecular beam growth process. The following crystallographic relationship was observed: (100) GaAs on (110) Al on (100) GaAs substrates, with [110] GaAs parallel to [100] Al. An atomic interface model is proposed to explain the observed growth.

Bibliography

Ludeke, R., Chang, L. L., & Esaki, L. (1973). Molecular beam epitaxy of alternating metal-semiconductor films. Applied Physics Letters, 23(4), 201â203.

Authors 3

R. Ludeke (first)
L. L. Chang (additional)
L. Esaki (additional)

References 8 Referenced 85

10.1063/1.1702842 / J. Appl. Phys. (1964)
{'key': '2024020508214565900_r2', 'first-page': '358', 'volume': '6', 'year': '1968', 'journal-title': 'Electrochem. Technol.'} / Electrochem. Technol. (1968)
10.1007/BF02403061 / J. Mater. Sci. (1971)
10.1103/PhysRevLett.30.129 / Phys. Rev. Lett. (1973)
10.1116/1.1317919 / J. Vac. Sci. Technol. (1973)
10.1147/rd.95.0375 / IBM J. Res. Dev. (1965)
10.1063/1.1660490 / J. Appl. Phys. (1971)
{'key': '2024020508214565900_r8'}

Dates

Type	When
Created	21 years, 7 months ago (Jan. 30, 2004, 3:38 p.m.)
Deposited	1 year, 7 months ago (Feb. 5, 2024, 3:21 a.m.)
Indexed	1 year, 7 months ago (Feb. 5, 2024, 11:03 a.m.)
Issued	52 years ago (Aug. 15, 1973)
Published	52 years ago (Aug. 15, 1973)
Published Print	52 years ago (Aug. 15, 1973)

Funders 0

None

BibTeX

@article{Ludeke_1973, title={Molecular beam epitaxy of alternating metal-semiconductor films}, volume={23}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1654858}, DOI={10.1063/1.1654858}, number={4}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ludeke, R. and Chang, L. L. and Esaki, L.}, year={1973}, month=aug, pages={201–203} }

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