DOI: 10.1063/1.1654082. Light-Guiding Structures of Photoresist Films

Light-Guiding Structures of Photoresist Films

10.1063/1.1654082

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We have made light-guiding thin films with losses of ∼ 2.2 dB/cm at 0.633 μm from Kodak KPR photoresist which has been processed to remove a photosensitizer which absorbs in the visible. Curved and straight optical strip guides as narrow as 5 μm have been written in these films and have shown light guiding with losses of 3 to 8 dB/cm at 0.633 μm.

Bibliography

Weber, H. W., Ulrich, R., Chandross, E. A., & Tomlinson, W. J. (1972). Light-Guiding Structures of Photoresist Films. Applied Physics Letters, 20(3), 143â145.

Authors 4

H. W. Weber (first)
R. Ulrich (additional)
E. A. Chandross (additional)
W. J. Tomlinson (additional)

References 11 Referenced 33

10.1002/j.1538-7305.1969.tb01165.x / Bell System Tech. J. (1969)
10.1063/1.1652820 / Appl. Phys. Letters (1969)
10.1002/j.1538-7305.1969.tb01752.x / Bell System Tech. J. (1969)
10.1364/AO.10.001037 / Appl. Opt. (1971)
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10.1063/1.1653538 / Appl. Phys. Letters (1971)
10.1002/j.1538-7305.1969.tb01744.x / Bell System Tech. J. (1969)
10.1002/j.1538-7305.1969.tb01166.x / Bell System Tech. J. (1969)
10.1002/j.1538-7305.1970.tb04283.x / Bell System Tech. J. (1970)
10.1364/AO.10.002077 / Appl. Opt. (1971)

Dates

Type	When
Created	21 years, 6 months ago (Jan. 30, 2004, 3:27 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 2:48 a.m.)
Indexed	1 year, 6 months ago (Feb. 5, 2024, 3:13 a.m.)
Issued	53 years, 6 months ago (Feb. 1, 1972)
Published	53 years, 6 months ago (Feb. 1, 1972)
Published Print	53 years, 6 months ago (Feb. 1, 1972)

Funders 0

None

BibTeX

@article{Weber_1972, title={Light-Guiding Structures of Photoresist Films}, volume={20}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1654082}, DOI={10.1063/1.1654082}, number={3}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Weber, H. W. and Ulrich, R. and Chandross, E. A. and Tomlinson, W. J.}, year={1972}, month=feb, pages={143–145} }

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