DOI: 10.1063/1.1653137. ELECTRON BEAM DETECTION OF CHARGE STORAGE IN MOS CAPACITORS

ELECTRON BEAM DETECTION OF CHARGE STORAGE IN MOS CAPACITORS

10.1063/1.1653137

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A method for destructive detection of the state of charge storage in a metal-SiO2-Si capacitor is presented. This method is based on the modulation by the charge of the efficiency of separation of electron-hole pairs which are generated by the penetration of an electron beam into the capacitor.

Bibliography

Huber, E. E., Cohen, M. S., & Smith, D. O. (1970). ELECTRON BEAM DETECTION OF CHARGE STORAGE IN MOS CAPACITORS. Applied Physics Letters, 16(4), 147â149.

Authors 3

E. E. Huber (first)
M. S. Cohen (additional)
D. O. Smith (additional)

References 7 Referenced 8

{'key': '2024020507084450500_r1', 'first-page': '208', 'volume': '28', 'year': '1967', 'journal-title': 'RCA Rev.'} / RCA Rev. (1967)
10.1109/PROC.1967.5776 / Proc. IEEE (1967)
10.1063/1.1656572 / J. Appl. Phys. (1968)
10.1109/PROC.1968.6210 / Proc. IEEE (1968)
10.1109/PROC.1967.6124 / Proc. IEEE (1967)
10.1063/1.1754844 / Appl. Phys. Letters (1967)
10.1063/1.1755014 / Appl. Phys. Lett. (1967)

Dates

Type	When
Created	21 years, 6 months ago (Feb. 3, 2004, 11:16 a.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 2:08 a.m.)
Indexed	1 year, 1 month ago (July 8, 2024, 6:36 p.m.)
Issued	55 years, 6 months ago (Feb. 15, 1970)
Published	55 years, 6 months ago (Feb. 15, 1970)
Published Print	55 years, 6 months ago (Feb. 15, 1970)

Funders 0

None

BibTeX

@article{Huber_1970, title={ELECTRON BEAM DETECTION OF CHARGE STORAGE IN MOS CAPACITORS}, volume={16}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1653137}, DOI={10.1063/1.1653137}, number={4}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Huber, E. E. and Cohen, M. S. and Smith, D. O.}, year={1970}, month=feb, pages={147–149} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        7,
        8
      ]
    ],
    "date-time": "2024-07-08T22:36:49Z",
    "timestamp": 1720478209513
  },
  "reference-count": 7,
  "publisher": "AIP Publishing",
  "issue": "4",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1970,
        2,
        15
      ]
    ]
  },
  "abstract": "<jats:p>A method for destructive detection of the state of charge storage in a metal-SiO2-Si capacitor is presented. This method is based on the modulation by the charge of the efficiency of separation of electron-hole pairs which are generated by the penetration of an electron beam into the capacitor.</jats:p>",
  "DOI": "10.1063/1.1653137",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2004,
        2,
        3
      ]
    ],
    "date-time": "2004-02-03T16:16:21Z",
    "timestamp": 1075824981000
  },
  "page": "147-149",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 8,
  "title": "ELECTRON BEAM DETECTION OF CHARGE STORAGE IN MOS CAPACITORS",
  "prefix": "10.1063",
  "volume": "16",
  "author": [
    {
      "suffix": "Jr.",
      "given": "E. E.",
      "family": "Huber",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Massachusetts Institute of Technology, Lincoln Laboratory, Lexington, Massachusetts 02173"
        }
      ]
    },
    {
      "given": "M. S.",
      "family": "Cohen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Massachusetts Institute of Technology, Lincoln Laboratory, Lexington, Massachusetts 02173"
        }
      ]
    },
    {
      "given": "D. O.",
      "family": "Smith",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Massachusetts Institute of Technology, Lincoln Laboratory, Lexington, Massachusetts 02173"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020507084450500_r1",
      "first-page": "208",
      "volume": "28",
      "year": "1967",
      "journal-title": "RCA Rev."
    },
    {
      "key": "2024020507084450500_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1168",
      "DOI": "10.1109/PROC.1967.5776",
      "volume": "55",
      "year": "1967",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2024020507084450500_r3",
      "doi-asserted-by": "crossref",
      "first-page": "2433",
      "DOI": "10.1063/1.1656572",
      "volume": "39",
      "year": "1968",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020507084450500_r3a",
      "doi-asserted-by": "crossref",
      "first-page": "158",
      "DOI": "10.1109/PROC.1968.6210",
      "volume": "56",
      "year": "1968",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2024020507084450500_r4",
      "doi-asserted-by": "crossref",
      "first-page": "2193",
      "DOI": "10.1109/PROC.1967.6124",
      "volume": "55",
      "year": "1967",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2024020507084450500_r5",
      "doi-asserted-by": "crossref",
      "first-page": "55",
      "DOI": "10.1063/1.1754844",
      "volume": "10",
      "year": "1967",
      "journal-title": "Appl. Phys. Letters"
    },
    {
      "key": "2024020507084450500_r5a",
      "doi-asserted-by": "crossref",
      "first-page": "359",
      "DOI": "10.1063/1.1755014",
      "volume": "11",
      "year": "1967",
      "journal-title": "Appl. Phys. Lett."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/16/4/147/18423044/147_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/16/4/147/18423044/147_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T07:08:54Z",
    "timestamp": 1707116934000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/16/4/147/41934/ELECTRON-BEAM-DETECTION-OF-CHARGE-STORAGE-IN-MOS"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1970,
        2,
        15
      ]
    ]
  },
  "references-count": 7,
  "journal-issue": {
    "issue": "4",
    "published-print": {
      "date-parts": [
        [
          1970,
          2,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1653137",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1970,
        2,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1970,
        2,
        15
      ]
    ]
  }
}