DOI: 10.1063/1.1652790. POST ANNEALING CONDUCTANCE BEHAVIOR OF IMPLANTED LAYERS IN SILICON

POST ANNEALING CONDUCTANCE BEHAVIOR OF IMPLANTED LAYERS IN SILICON

10.1063/1.1652790

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Isochronal annealing studies have been conducted on implanted boron and phosphorus layers in silicon. It is shown that the sheet conductance rise on annealing is dependent on the temperature at which the silicon is maintained during implantation. From the standpoint of conductance, low-temperature implanting is to be favored.

Bibliography

Davies, D. E. (1969). POST ANNEALING CONDUCTANCE BEHAVIOR OF IMPLANTED LAYERS IN SILICON. Applied Physics Letters, 14(7), 227â229.

Authors 1

D. Eirug Davies (first)

References 6 Referenced 53

10.1149/1.2411148 / J. Electro-Chem. Soc. (1968)
10.1139/p68-083 / Can. J. Phys. (1968)
{'key': '2024020506534714100_r3', 'first-page': '689', 'volume': '46', 'year': '1968', 'journal-title': 'Can. J. Phys.'} / Can. J. Phys. (1968)
10.1139/p67-340 / Can. J. Phys. (1967)
{'key': '2024020506534714100_r5', 'first-page': '22', 'volume': 'NS-13', 'year': '1965', 'journal-title': 'IEEE Trans. Nucl. Sci.'} / IEEE Trans. Nucl. Sci. (1965)
{'key': '2024020506534714100_r6', 'first-page': '10', 'volume': 'ED-14', 'year': '1967', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1967)

Dates

Type	When
Created	21 years, 6 months ago (Jan. 30, 2004, 3:10 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 1:53 a.m.)
Indexed	1 year, 6 months ago (Feb. 5, 2024, 3:41 a.m.)
Issued	56 years, 4 months ago (April 1, 1969)
Published	56 years, 4 months ago (April 1, 1969)
Published Print	56 years, 4 months ago (April 1, 1969)

Funders 0

None

BibTeX

@article{Davies_1969, title={POST ANNEALING CONDUCTANCE BEHAVIOR OF IMPLANTED LAYERS IN SILICON}, volume={14}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1652790}, DOI={10.1063/1.1652790}, number={7}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Davies, D. Eirug}, year={1969}, month=apr, pages={227–229} }

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