DOI: 10.1063/1.1652788. ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL REFLECTION SPECTROSCOPY IN THE 1 TO 6 eV REGION

ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL REFLECTION SPECTROSCOPY IN THE 1 TO 6 eV REGION

10.1063/1.1652788

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Optical reflection spectra of crystalline, sputtered, and ion implanted silicon specimens are presented. Characteristic aspects of the spectra of ion implanted specimens are related to lattice damage.

Bibliography

Kurtin, S., Shifrin, G. A., & McGill, T. C. (1969). ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL REFLECTION SPECTROSCOPY IN THE 1 TO 6 eV REGION. Applied Physics Letters, 14(7), 223â225.

Authors 3

Stephen Kurtin (first)
Gordon A. Shifrin (additional)
T. C. McGill (additional)

References 8 Referenced 58

10.1016/0031-9163(66)90234-4 / Phys. Letters (1966)
10.1139/p67-340 / Can. J. Phys. (1967)
{'key': '2024020506543394100_r3', 'first-page': '689', 'volume': '46', 'year': '1968', 'journal-title': 'Can. J. Phys.'} / Can. J. Phys. (1968)
{'issue': '14', 'key': '2024020506543394100_r4', 'volume': '33', 'year': '1963', 'journal-title': 'Mat. Fys. Medd. Kal. Danske Vidanskab. Selskab'} / Mat. Fys. Medd. Kal. Danske Vidanskab. Selskab (1963)
{'key': '2024020506543394100_r5'}
{'key': '2024020506543394100_r6', 'first-page': '988', 'volume': '13a', 'year': '1958', 'journal-title': 'Z. Naturforsch'} / Z. Naturforsch (1958)
10.1007/BF00752224 / J. Mater. Sci. (1967)
{'key': '2024020506543394100_r8'}

Dates

Type	When
Created	21 years, 6 months ago (Jan. 30, 2004, 3:10 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 1:54 a.m.)
Indexed	1 month, 3 weeks ago (June 25, 2025, 8:52 p.m.)
Issued	56 years, 4 months ago (April 1, 1969)
Published	56 years, 4 months ago (April 1, 1969)
Published Print	56 years, 4 months ago (April 1, 1969)

Funders 0

None

BibTeX

@article{Kurtin_1969, title={ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL REFLECTION SPECTROSCOPY IN THE 1 TO 6 eV REGION}, volume={14}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1652788}, DOI={10.1063/1.1652788}, number={7}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Kurtin, Stephen and Shifrin, Gordon A. and McGill, T. C.}, year={1969}, month=apr, pages={223–225} }

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