DOI: 10.1063/1.1650550. High quantum efficiency AlGaN solar-blind <i>p-i-n</i> photodiodes

High quantum efficiency AlGaN solar-blind p-i-n photodiodes

10.1063/1.1650550

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We report AlGaN-based back-illuminated solar-blind ultraviolet p-i-n photodetectors with a peak responsivity of 136 mA/W at 282 nm without bias. This corresponds to a high external quantum efficiency of 60%, which improves to a value as high as 72% under 5 V reverse bias. We attribute the high performance of these devices to the use of a very-high quality AlN and Al0.87Ga0.13N/AlN superlattice material and a highly conductive Si–In co-doped Al0.5Ga0.5N layer.

Bibliography

McClintock, R., Yasan, A., Mayes, K., Shiell, D., Darvish, S. R., Kung, P., & Razeghi, M. (2004). High quantum efficiency AlGaN solar-blind p-i-n photodiodes. Applied Physics Letters, 84(8), 1248â1250.

Authors 7

R. McClintock (first)
A. Yasan (additional)
K. Mayes (additional)
D. Shiell (additional)
S. R. Darvish (additional)
P. Kung (additional)
M. Razeghi (additional)

References 11 Referenced 112

10.1117/12.467650 / Proc. SPIE (2002)
10.1109/JPROC.2002.1021565 / Proc. IEEE (2002)
10.1063/1.1494858 / Appl. Phys. Lett. (2002)
10.1063/1.1633019 / Appl. Phys. Lett. (2003)
10.1063/1.1531835 / Appl. Phys. Lett. (2002)
{'key': '2024020402274621900_r6', 'first-page': '414', 'volume': '159–160', 'year': '2000', 'journal-title': 'Appl. Surf. Sci.'} / Appl. Surf. Sci. (2000)
10.1063/1.1577410 / Appl. Phys. Lett. (2003)
10.1063/1.1402159 / Appl. Phys. Lett. (2001)
10.1063/1.124942 / Appl. Phys. Lett. (1999)
10.1016/S0022-0248(01)01467-1 / J. Cryst. Growth (2001)
10.1063/1.1480484 / Appl. Phys. Lett. (2002)

Dates

Type	When
Created	21 years, 6 months ago (Feb. 12, 2004, 6:03 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 9:27 p.m.)
Indexed	2 days, 13 hours ago (Aug. 28, 2025, 8:07 a.m.)
Issued	21 years, 6 months ago (Feb. 23, 2004)
Published	21 years, 6 months ago (Feb. 23, 2004)
Published Print	21 years, 6 months ago (Feb. 23, 2004)

Funders 0

None

BibTeX

@article{McClintock_2004, title={High quantum efficiency AlGaN solar-blind p-i-n photodiodes}, volume={84}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1650550}, DOI={10.1063/1.1650550}, number={8}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={McClintock, R. and Yasan, A. and Mayes, K. and Shiell, D. and Darvish, S. R. and Kung, P. and Razeghi, M.}, year={2004}, month=feb, pages={1248–1250} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        28
      ]
    ],
    "date-time": "2025-08-28T12:07:40Z",
    "timestamp": 1756382860809
  },
  "reference-count": 11,
  "publisher": "AIP Publishing",
  "issue": "8",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2004,
        2,
        23
      ]
    ]
  },
  "abstract": "<jats:p>We report AlGaN-based back-illuminated solar-blind ultraviolet p-i-n photodetectors with a peak responsivity of 136 mA/W at 282 nm without bias. This corresponds to a high external quantum efficiency of 60%, which improves to a value as high as 72% under 5 V reverse bias. We attribute the high performance of these devices to the use of a very-high quality AlN and Al0.87Ga0.13N/AlN superlattice material and a highly conductive Si\u2013In co-doped Al0.5Ga0.5N layer.</jats:p>",
  "DOI": "10.1063/1.1650550",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2004,
        2,
        12
      ]
    ],
    "date-time": "2004-02-12T23:03:44Z",
    "timestamp": 1076627024000
  },
  "page": "1248-1250",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 112,
  "title": "High quantum efficiency AlGaN solar-blind <i>p-i-n</i> photodiodes",
  "prefix": "10.1063",
  "volume": "84",
  "author": [
    {
      "given": "R.",
      "family": "McClintock",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois\u200960208"
        }
      ]
    },
    {
      "given": "A.",
      "family": "Yasan",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois\u200960208"
        }
      ]
    },
    {
      "given": "K.",
      "family": "Mayes",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois\u200960208"
        }
      ]
    },
    {
      "given": "D.",
      "family": "Shiell",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois\u200960208"
        }
      ]
    },
    {
      "given": "S. R.",
      "family": "Darvish",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois\u200960208"
        }
      ]
    },
    {
      "given": "P.",
      "family": "Kung",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois\u200960208"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Razeghi",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Center for Quantum Devices, Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois\u200960208"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020402274621900_r1",
      "doi-asserted-by": "crossref",
      "first-page": "199",
      "DOI": "10.1117/12.467650",
      "volume": "4650",
      "year": "2002",
      "journal-title": "Proc. SPIE"
    },
    {
      "key": "2024020402274621900_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1006",
      "DOI": "10.1109/JPROC.2002.1021565",
      "volume": "90",
      "year": "2002",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2024020402274621900_r3",
      "doi-asserted-by": "crossref",
      "first-page": "604",
      "DOI": "10.1063/1.1494858",
      "volume": "81",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020402274621900_r4",
      "doi-asserted-by": "crossref",
      "first-page": "4701",
      "DOI": "10.1063/1.1633019",
      "volume": "83",
      "year": "2003",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020402274621900_r5",
      "doi-asserted-by": "crossref",
      "first-page": "4910",
      "DOI": "10.1063/1.1531835",
      "volume": "81",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020402274621900_r6",
      "first-page": "414",
      "volume": "159\u2013160",
      "year": "2000",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "2024020402274621900_r7",
      "doi-asserted-by": "crossref",
      "first-page": "3683",
      "DOI": "10.1063/1.1577410",
      "volume": "82",
      "year": "2003",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020402274621900_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1903",
      "DOI": "10.1063/1.1402159",
      "volume": "79",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020402274621900_r9",
      "doi-asserted-by": "crossref",
      "first-page": "2138",
      "DOI": "10.1063/1.124942",
      "volume": "75",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020402274621900_r10",
      "doi-asserted-by": "crossref",
      "first-page": "366",
      "DOI": "10.1016/S0022-0248(01)01467-1",
      "volume": "231",
      "year": "2001",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "2024020402274621900_r11",
      "doi-asserted-by": "crossref",
      "first-page": "3754",
      "DOI": "10.1063/1.1480484",
      "volume": "80",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/84/8/1248/18586336/1248_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/84/8/1248/18586336/1248_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T02:27:55Z",
    "timestamp": 1707013675000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/84/8/1248/510667/High-quantum-efficiency-AlGaN-solar-blind-p-i-n"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2004,
        2,
        23
      ]
    ]
  },
  "references-count": 11,
  "journal-issue": {
    "issue": "8",
    "published-print": {
      "date-parts": [
        [
          2004,
          2,
          23
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1650550",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2004,
        2,
        23
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2004,
        2,
        23
      ]
    ]
  }
}