DOI: 10.1063/1.1628402. Quantitative scanning capacitance spectroscopy

Quantitative scanning capacitance spectroscopy

10.1063/1.1628402

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

In this work, a setup for quantitative scanning capacitance spectroscopy is introduced, where an ultrahigh precision, calibrated capacitance bridge is used together with a commercially available atomic force microscope (AFM). We show that capacitance data measured with this setup are of comparable quality as data obtained on macroscopic metal oxide semiconductor capacitors. In addition, our setup is sensitive enough to resolve the energy distribution of interface traps with the spatial resolution of an AFM. This is an advantage compared to conventional scanning capacitance microscopes, which have a limited energy resolution and only yield qualitative results due to large modulation voltages.

Bibliography

Brezna, W., Schramboeck, M., Lugstein, A., Harasek, S., Enichlmair, H., Bertagnolli, E., Gornik, E., & Smoliner, J. (2003). Quantitative scanning capacitance spectroscopy. Applied Physics Letters, 83(20), 4253â4255.

Authors 8

W. Brezna (first)
M. Schramboeck (additional)
A. Lugstein (additional)
S. Harasek (additional)
H. Enichlmair (additional)
E. Bertagnolli (additional)
E. Gornik (additional)
J. Smoliner (additional)

References 10 Referenced 26

{'key': '2024020401511684500_r1', 'first-page': '158', 'volume': '7', 'year': '1999', 'journal-title': 'Rev. Sci. Instrum.'} / Rev. Sci. Instrum. (1999)
10.1116/1.591231 / J. Vac. Sci. Technol. B (2000)
10.1088/0022-3735/21/2/003 / J. Phys. E (1988)
{'key': '2024020401511684500_r4', 'first-page': '361', 'volume': '18', 'year': '2000', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (2000)
{'key': '2024020401511684500_r5'}
{'key': '2024020401511684500_r6'}
10.1116/1.1491536 / J. Vac. Sci. Technol. B (2002)
{'key': '2024020401511684500_r8', 'first-page': '108', 'volume': 'ED-12', 'year': '1965', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1965)
{'key': '2024020401511684500_r9'}
10.1063/1.119044 / Appl. Phys. Lett. (1997)

Dates

Type	When
Created	21 years, 9 months ago (Nov. 14, 2003, 9:22 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 8:51 p.m.)
Indexed	3 months, 3 weeks ago (May 8, 2025, 5:23 a.m.)
Issued	21 years, 9 months ago (Nov. 17, 2003)
Published	21 years, 9 months ago (Nov. 17, 2003)
Published Print	21 years, 9 months ago (Nov. 17, 2003)

Funders 0

None

BibTeX

@article{Brezna_2003, title={Quantitative scanning capacitance spectroscopy}, volume={83}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1628402}, DOI={10.1063/1.1628402}, number={20}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Brezna, W. and Schramboeck, M. and Lugstein, A. and Harasek, S. and Enichlmair, H. and Bertagnolli, E. and Gornik, E. and Smoliner, J.}, year={2003}, month=nov, pages={4253–4255} }

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