DOI: 10.1063/1.1590058. Diamond deposition on modified silicon substrates: Making diamond atomic force microscopy tips for nanofriction experiments

Diamond deposition on modified silicon substrates: Making diamond atomic force microscopy tips for nanofriction experiments

10.1063/1.1590058

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Fine-crystalline diamond particles are grown on standard Si atomic force microscopy tips, using hot filament-assisted chemical vapor deposition. To optimize the conditions for diamond deposition, first a series of experiments is carried out using silicon substrates covered by point-topped pyramids as obtained by wet chemical etching. The apexes and the edges of the silicon pyramids provide favorable sites for diamond nucleation and growth. The investigation of the deposited polycrystallites is done by means of optical microscopy, scanning electron microscopy and micro-Raman spectroscopy. The resulting diamond-terminated tips are tested in ultra high vacuum using contact-mode atomic force microscope on a stepped surface of sapphire showing high stability, sharpness, and hardness.

Bibliography

Tanasa, G., Kurnosikov, O., Flipse, C. F. J., Buijnsters, J. G., & van Enckevort, W. J. P. (2003). Diamond deposition on modified silicon substrates: Making diamond atomic force microscopy tips for nanofriction experiments. Journal of Applied Physics, 94(3), 1699â1704.

Authors 5

G. Tanasa (first)
O. Kurnosikov (additional)
C. F. J. Flipse (additional)
J. G. Buijnsters (additional)
W. J. P. van Enckevort (additional)

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Dates

Type	When
Created	22 years, 1 month ago (July 24, 2003, 6:30 p.m.)
Deposited	1 year, 6 months ago (Feb. 6, 2024, 10:55 p.m.)
Indexed	1 year, 6 months ago (Feb. 6, 2024, 11:40 p.m.)
Issued	22 years ago (Aug. 1, 2003)
Published	22 years ago (Aug. 1, 2003)
Published Print	22 years ago (Aug. 1, 2003)

Funders 0

None

BibTeX

@article{Tanasa_2003, title={Diamond deposition on modified silicon substrates: Making diamond atomic force microscopy tips for nanofriction experiments}, volume={94}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.1590058}, DOI={10.1063/1.1590058}, number={3}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Tanasa, G. and Kurnosikov, O. and Flipse, C. F. J. and Buijnsters, J. G. and van Enckevort, W. J. P.}, year={2003}, month=aug, pages={1699–1704} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        7
      ]
    ],
    "date-time": "2024-02-07T04:40:11Z",
    "timestamp": 1707280811816
  },
  "reference-count": 33,
  "publisher": "AIP Publishing",
  "issue": "3",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2003,
        8,
        1
      ]
    ]
  },
  "abstract": "<jats:p>Fine-crystalline diamond particles are grown on standard Si atomic force microscopy tips, using hot filament-assisted chemical vapor deposition. To optimize the conditions for diamond deposition, first a series of experiments is carried out using silicon substrates covered by point-topped pyramids as obtained by wet chemical etching. The apexes and the edges of the silicon pyramids provide favorable sites for diamond nucleation and growth. The investigation of the deposited polycrystallites is done by means of optical microscopy, scanning electron microscopy and micro-Raman spectroscopy. The resulting diamond-terminated tips are tested in ultra high vacuum using contact-mode atomic force microscope on a stepped surface of sapphire showing high stability, sharpness, and hardness.</jats:p>",
  "DOI": "10.1063/1.1590058",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        7,
        24
      ]
    ],
    "date-time": "2003-07-24T22:30:40Z",
    "timestamp": 1059085840000
  },
  "page": "1699-1704",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 13,
  "title": "Diamond deposition on modified silicon substrates: Making diamond atomic force microscopy tips for nanofriction experiments",
  "prefix": "10.1063",
  "volume": "94",
  "author": [
    {
      "given": "G.",
      "family": "Tanasa",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Applied Physics and Chemical Engineering, Molecular Materials and Nanosystems, Center for NanoMaterials, Eindhoven University of Technology, Den Dolech 2, 5600\u2009MB\u2009Eindhoven, The Netherlands"
        }
      ]
    },
    {
      "given": "O.",
      "family": "Kurnosikov",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics and Chemical Engineering, Molecular Materials and Nanosystems, Center for NanoMaterials, Eindhoven University of Technology, Den Dolech 2, 5600\u2009MB\u2009Eindhoven, The Netherlands"
        }
      ]
    },
    {
      "given": "C. F. J.",
      "family": "Flipse",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics and Chemical Engineering, Molecular Materials and Nanosystems, Center for NanoMaterials, Eindhoven University of Technology, Den Dolech 2, 5600\u2009MB\u2009Eindhoven, The Netherlands"
        }
      ]
    },
    {
      "given": "J. G.",
      "family": "Buijnsters",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "NSRIM, Department of Applied Physics, University of Nijmegen, Toernooiveld 1, 6525\u2009ED\u2009Nijmegen, The Netherlands"
        }
      ]
    },
    {
      "given": "W. J. P.",
      "family": "van Enckevort",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "NSRIM, Department of Solid State Chemistry, University of Nijmegen, Toernooiveld 1, 6525\u2009ED\u2009Nijmegen, The Netherlands"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020701460564500_r1",
      "doi-asserted-by": "crossref",
      "first-page": "1289",
      "DOI": "10.1116/1.589083",
      "volume": "14",
      "year": "1996",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020701460564500_r2",
      "doi-asserted-by": "crossref",
      "first-page": "3334",
      "DOI": "10.1021/la9509007",
      "volume": "12",
      "year": "1996",
      "journal-title": "Langmuir"
    },
    {
      "key": "2024020701460564500_r3",
      "doi-asserted-by": "crossref",
      "first-page": "1877",
      "DOI": "10.1103/PhysRevLett.81.1877",
      "volume": "81",
      "year": "1998",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020701460564500_r4",
      "doi-asserted-by": "crossref",
      "first-page": "73",
      "DOI": "10.1023/A:1019173404538",
      "volume": "7",
      "year": "1999",
      "journal-title": "Tribol. Lett."
    },
    {
      "key": "2024020701460564500_r5",
      "doi-asserted-by": "crossref",
      "first-page": "17",
      "DOI": "10.1007/978-1-4684-5967-8_2",
      "volume": "266",
      "year": "1991",
      "journal-title": "NATO ASI Ser., Ser. B"
    },
    {
      "key": "2024020701460564500_r6"
    },
    {
      "key": "2024020701460564500_r7",
      "doi-asserted-by": "crossref",
      "first-page": "163",
      "DOI": "10.1063/1.353878",
      "volume": "73",
      "year": "1993",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020701460564500_r8",
      "doi-asserted-by": "crossref",
      "first-page": "484",
      "DOI": "10.1063/1.98374",
      "volume": "51",
      "year": "1987",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020701460564500_r9",
      "first-page": "11854",
      "volume": "29",
      "year": "1990",
      "journal-title": "Jpn. J. Appl. Phys., Part 1"
    },
    {
      "key": "2024020701460564500_r10",
      "doi-asserted-by": "crossref",
      "first-page": "3232",
      "DOI": "10.1063/1.106703",
      "volume": "60",
      "year": "1992",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020701460564500_r11",
      "doi-asserted-by": "crossref",
      "first-page": "4053",
      "DOI": "10.1063/1.1143265",
      "volume": "63",
      "year": "1992",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020701460564500_r12",
      "doi-asserted-by": "crossref",
      "first-page": "1856",
      "DOI": "10.1116/1.587655",
      "volume": "12",
      "year": "1994",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020701460564500_r13",
      "doi-asserted-by": "crossref",
      "first-page": "24",
      "DOI": "10.1016/0169-4332(94)00532-X",
      "volume": "87/88",
      "year": "1995",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "2024020701460564500_r14",
      "doi-asserted-by": "crossref",
      "first-page": "435",
      "DOI": "10.1063/1.118173",
      "volume": "70",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020701460564500_r15",
      "doi-asserted-by": "crossref",
      "first-page": "906",
      "DOI": "10.1016/S0925-9635(96)00600-0",
      "volume": "6",
      "year": "1997",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020701460564500_r16",
      "first-page": "S87",
      "volume": "A66",
      "year": "1998",
      "journal-title": "Appl. Phys. A: Mater. Sci. Process."
    },
    {
      "key": "2024020701460564500_r17",
      "doi-asserted-by": "crossref",
      "first-page": "147",
      "DOI": "10.1088/0960-1317/4/3/008",
      "volume": "4",
      "year": "1994",
      "journal-title": "J. Micromech. Microeng."
    },
    {
      "key": "2024020701460564500_r18",
      "first-page": "107",
      "volume": "2",
      "year": "1996",
      "journal-title": "J. Micromech. Systems"
    },
    {
      "key": "2024020701460564500_r19",
      "doi-asserted-by": "crossref",
      "first-page": "18",
      "DOI": "10.1088/0960-1317/5/1/004",
      "volume": "5",
      "year": "1995",
      "journal-title": "J. Micromech. Microeng."
    },
    {
      "key": "2024020701460564500_r20",
      "doi-asserted-by": "crossref",
      "first-page": "4113",
      "DOI": "10.1063/1.1352557",
      "volume": "89",
      "year": "2001",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020701460564500_r21",
      "doi-asserted-by": "crossref",
      "first-page": "39",
      "DOI": "10.1016/0257-8972(91)90266-Y",
      "volume": "47",
      "year": "1991",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "2024020701460564500_r21a"
    },
    {
      "key": "2024020701460564500_r22"
    },
    {
      "key": "2024020701460564500_r23",
      "doi-asserted-by": "crossref",
      "first-page": "194",
      "DOI": "10.1016/S0925-9635(98)00258-1",
      "volume": "8",
      "year": "1999",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020701460564500_r24",
      "doi-asserted-by": "crossref",
      "first-page": "6040",
      "DOI": "10.1103/PhysRevB.41.6040",
      "volume": "41",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020701460564500_r25",
      "doi-asserted-by": "crossref",
      "first-page": "2456",
      "DOI": "10.1557/JMR.1990.2456",
      "volume": "5",
      "year": "1990",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "2024020701460564500_r26",
      "doi-asserted-by": "crossref",
      "first-page": "3595",
      "DOI": "10.1063/1.344065",
      "volume": "66",
      "year": "1989",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020701460564500_r27",
      "doi-asserted-by": "crossref",
      "first-page": "3738",
      "DOI": "10.1103/PhysRevB.41.3738",
      "volume": "41",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020701460564500_r28",
      "doi-asserted-by": "crossref",
      "first-page": "2424",
      "DOI": "10.1557/JMR.1990.2424",
      "volume": "5",
      "year": "1990",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "2024020701460564500_r29",
      "doi-asserted-by": "crossref",
      "first-page": "1744",
      "DOI": "10.1063/1.339912",
      "volume": "63",
      "year": "1988",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020701460564500_r30",
      "doi-asserted-by": "crossref",
      "first-page": "2043",
      "DOI": "10.1063/1.99575",
      "volume": "52",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020701460564500_r31",
      "doi-asserted-by": "crossref",
      "first-page": "256",
      "DOI": "10.1016/S0039-6028(00)00452-0",
      "volume": "459",
      "year": "2000",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020701460564500_r32",
      "doi-asserted-by": "crossref",
      "first-page": "263",
      "DOI": "10.1016/S0039-6028(98)00329-X",
      "volume": "411",
      "year": "1998",
      "journal-title": "Surf. Sci."
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/94/3/1699/19268746/1699_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/94/3/1699/19268746/1699_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        7
      ]
    ],
    "date-time": "2024-02-07T03:55:28Z",
    "timestamp": 1707278128000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/94/3/1699/768117/Diamond-deposition-on-modified-silicon-substrates"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2003,
        8,
        1
      ]
    ]
  },
  "references-count": 33,
  "journal-issue": {
    "issue": "3",
    "published-print": {
      "date-parts": [
        [
          2003,
          8,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1590058",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2003,
        8,
        1
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2003,
        8,
        1
      ]
    ]
  }
}