DOI: 10.1063/1.1582376. Temperature dependence of carrier mobility in Si wafers measured by infrared photocarrier radiometry

Temperature dependence of carrier mobility in Si wafers measured by infrared photocarrier radiometry

10.1063/1.1582376

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

A recently introduced infrared photocarrier radiometry technique has been used to determine the temperature dependence of carrier mobility in Si wafers. In addition, its potential to determine simultaneously the carrier lifetime, diffusion coefficient, and surface recombination velocity is reported. This noncontact, nonintrusive, and all-optical technique relies on the detection of infrared radiation from harmonically excited free carriers (pure electronic diffusion-wave detection). Using a multiparameter fitting to a complete theory, the results showed that the lifetime increases with temperature, the diffusion coefficient decreases [D(T)∼T−1.5], and the temperature dependence of carrier mobility is μ(T)=(1.06±0.07)×109×T−2.49±0.01 cm2/V s.

Bibliography

Batista, J., Mandelis, A., & Shaughnessy, D. (2003). Temperature dependence of carrier mobility in Si wafers measured by infrared photocarrier radiometry. Applied Physics Letters, 82(23), 4077â4079.

Authors 3

Jerias Batista (first)
Andreas Mandelis (additional)
Derrick Shaughnessy (additional)

References 15 Referenced 79

{'key': '2024020400420852100_r1'}
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Dates

Type	When
Created	22 years, 2 months ago (June 6, 2003, 2:43 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 7:42 p.m.)
Indexed	3 months, 2 weeks ago (May 15, 2025, 12:46 a.m.)
Issued	22 years, 2 months ago (June 9, 2003)
Published	22 years, 2 months ago (June 9, 2003)
Published Print	22 years, 2 months ago (June 9, 2003)

Funders 0

None

BibTeX

@article{Batista_2003, title={Temperature dependence of carrier mobility in Si wafers measured by infrared photocarrier radiometry}, volume={82}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1582376}, DOI={10.1063/1.1582376}, number={23}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Batista, Jerias and Mandelis, Andreas and Shaughnessy, Derrick}, year={2003}, month=jun, pages={4077–4079} }

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