Crossref journal-article
AIP Publishing
Applied Physics Letters (317)
Abstract

Neodymium-doped Bi4Ti3O12 (BNT) films are evaluated for use as lead-free thin-film piezoelectrics in microelectromechanical systems. Bi4Ti3O12, Bi3.25La0.75Ti3O12, and Bi3.25Nd0.75Ti3O12 films were fabricated by chemical solution deposition on Pt/TiOx/SiO2/Si substrates. Nd substitution promoted random orientation with low (00l) diffraction peaks. The 1-μm-thick Bi3.25Nd0.75Ti3O12 film annealed at 750 °C exhibited a remanent polarization of 26 μC/cm2. Typical butterfly field-induced strain loops were obtained in the BNT film capacitors. The electrically induced strain is 8.4×10−4 under the bipolar driving field of 220 kV/cm. These results show that BNT is a promising candidate for use in lead-free thin-film piezoelectrics.

Bibliography

Maiwa, H., Iizawa, N., Togawa, D., Hayashi, T., Sakamoto, W., Yamada, M., & Hirano, S. (2003). Electromechanical properties of Nd-doped Bi4Ti3O12 films: A candidate for lead-free thin-film piezoelectrics. Applied Physics Letters, 82(11), 1760–1762.

Authors 7
  1. Hiroshi Maiwa (first)
  2. Naoya Iizawa (additional)
  3. Daichi Togawa (additional)
  4. Takashi Hayashi (additional)
  5. Wataru Sakamoto (additional)
  6. Mio Yamada (additional)
  7. Shin-ichi Hirano (additional)
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Dates
Type When
Created 22 years, 5 months ago (March 13, 2003, 6:10 p.m.)
Deposited 1 year, 6 months ago (Feb. 3, 2024, 7:09 p.m.)
Indexed 5 months ago (March 24, 2025, 2:38 a.m.)
Issued 22 years, 5 months ago (March 17, 2003)
Published 22 years, 5 months ago (March 17, 2003)
Published Print 22 years, 5 months ago (March 17, 2003)
Funders 0

None

@article{Maiwa_2003, title={Electromechanical properties of Nd-doped Bi4Ti3O12 films: A candidate for lead-free thin-film piezoelectrics}, volume={82}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1560864}, DOI={10.1063/1.1560864}, number={11}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Maiwa, Hiroshi and Iizawa, Naoya and Togawa, Daichi and Hayashi, Takashi and Sakamoto, Wataru and Yamada, Mio and Hirano, Shin-ichi}, year={2003}, month=mar, pages={1760–1762} }