DOI: 10.1063/1.1543642. Electron-beam-induced damage in wurtzite InN

Electron-beam-induced damage in wurtzite InN

10.1063/1.1543642

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Knock-on type damage with ejection of nitrogen atoms from a sample was observed in wurtzite InN during irradiation by 100 keV electron beam in scanning transmission electron microscope. Comparison of the measured integrated intensities of nitrogen K and indium M4,5 edges with calculated mass-loss provided a method to measure the energy of vacancy-enhanced displacement in InN for nitrogen atoms, which was found to be 4.6 eV. The results were also applied to predict the rate of electron beam induced damage that will occur in InN specimens with different thicknesses.

Bibliography

Mkhoyan, K. A., & Silcox, J. (2003). Electron-beam-induced damage in wurtzite InN. Applied Physics Letters, 82(6), 859â861.

Authors 2

K. A. Mkhoyan (first)
J. Silcox (additional)

References 20 Referenced 34

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{'key': '2024020323571251500_r6'}
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{'key': '2024020323571251500_r15'}
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Dates

Type	When
Created	22 years, 6 months ago (Feb. 10, 2003, 11:22 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 6:57 p.m.)
Indexed	4 months ago (April 18, 2025, 4:44 p.m.)
Issued	22 years, 6 months ago (Feb. 10, 2003)
Published	22 years, 6 months ago (Feb. 10, 2003)
Published Print	22 years, 6 months ago (Feb. 10, 2003)

Funders 0

None

BibTeX

@article{Mkhoyan_2003, title={Electron-beam-induced damage in wurtzite InN}, volume={82}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1543642}, DOI={10.1063/1.1543642}, number={6}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Mkhoyan, K. A. and Silcox, J.}, year={2003}, month=feb, pages={859–861} }

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