DOI: 10.1063/1.1516857. Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si

Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si

10.1063/1.1516857

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We report on the out-of-plane piezoelectric response (d33), measured via piezoresponse scanning force microscopy, of submicron capacitors fabricated from epitaxial PbZrxTi1−xO3 thin films. Investigations on 1 μm2 and smaller capacitors show that the substrate-induced constraint is dramatically reduced by nanostructuring. At zero field, the experimentally measured values of d33 for clamped as well as submicron capacitors are in good agreement with the predictions from thermodynamic theory. The theory also describes very well the field dependence of the piezoresponse of clamped capacitors of key compositions on the tetragonal side of the PbZrxTi1−xO3 phase diagram as well as the behavior of submicron PbZr0.2Ti0.8O3 (hard ferroelectric) capacitors. However, the field-dependent piezoresponse of submicron capacitors in compositions closer to the morphotropic phase boundary (soft ferroelectrics) is different from the behavior predicted by the theoretical calculations.

Bibliography

Nagarajan, V., Stanishevsky, A., Chen, L., Zhao, T., Liu, B.-T., Melngailis, J., Roytburd, A. L., Ramesh, R., Finder, J., Yu, Z., Droopad, R., & Eisenbeiser, K. (2002). Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si. Applied Physics Letters, 81(22), 4215â4217.

Authors 12

V. Nagarajan (first)
A. Stanishevsky (additional)
L. Chen (additional)
T. Zhao (additional)
B.-T. Liu (additional)
J. Melngailis (additional)
A. L. Roytburd (additional)
R. Ramesh (additional)
J. Finder (additional)
Z. Yu (additional)
R. Droopad (additional)
K. Eisenbeiser (additional)

References 19 Referenced 113

{'key': '2024020323274977100_r1'}
10.1088/0960-1317/10/2/307 / J. Micromech. Microeng. (2000)
10.1063/1.357693 / J. Appl. Phys. (1994)
10.1080/10584589908215586 / Integr. Ferroelectr. (1999)
10.1143/JJAP.39.5403 / Jpn. J. Appl. Phys., Part 1 (2000)
10.1063/1.370771 / J. Appl. Phys. (1999)
10.1080/10584580108016924 / Integr. Ferroelectr. (2001)
10.1103/PhysRevLett.85.190 / Phys. Rev. Lett. (2000)
{'key': '2024020323274977100_r9', 'volume-title': 'Mater. Res. Soc. Symp. Proc.', 'year': '2001'} / Mater. Res. Soc. Symp. Proc. (2001)
{'key': '2024020323274977100_r10', 'first-page': '3195', 'volume': '75', 'year': '2002', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. (2002)
10.1063/1.370772 / J. Appl. Phys. (1999)
10.1063/1.1325005 / J. Appl. Phys. (2001)
10.1063/1.1428413 / Appl. Phys. Lett. (2002)
10.1080/00150198908221438 / Ferroelectrics (1989)
10.1063/1.124391 / Appl. Phys. Lett. (1999)
{'key': '2024020323274977100_r16'}
{'key': '2024020323274977100_r17'}
10.1063/1.369338 / J. Appl. Phys. (1999)
{'key': '2024020323274977100_r19'}

Dates

Type	When
Created	22 years, 9 months ago (Nov. 21, 2002, 2:21 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 6:28 p.m.)
Indexed	1 month ago (July 19, 2025, 11:31 p.m.)
Issued	22 years, 9 months ago (Nov. 25, 2002)
Published	22 years, 9 months ago (Nov. 25, 2002)
Published Print	22 years, 9 months ago (Nov. 25, 2002)

Funders 0

None

BibTeX

@article{Nagarajan_2002, title={Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si}, volume={81}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1516857}, DOI={10.1063/1.1516857}, number={22}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Nagarajan, V. and Stanishevsky, A. and Chen, L. and Zhao, T. and Liu, B.-T. and Melngailis, J. and Roytburd, A. L. and Ramesh, R. and Finder, J. and Yu, Z. and Droopad, R. and Eisenbeiser, K.}, year={2002}, month=nov, pages={4215–4217} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        20
      ]
    ],
    "date-time": "2025-07-20T03:31:12Z",
    "timestamp": 1752982272093
  },
  "reference-count": 19,
  "publisher": "AIP Publishing",
  "issue": "22",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2002,
        11,
        25
      ]
    ]
  },
  "abstract": "<jats:p>We report on the out-of-plane piezoelectric response (d33), measured via piezoresponse scanning force microscopy, of submicron capacitors fabricated from epitaxial PbZrxTi1\u2212xO3 thin films. Investigations on 1\u2002\u03bcm2 and smaller capacitors show that the substrate-induced constraint is dramatically reduced by nanostructuring. At zero field, the experimentally measured values of d33 for clamped as well as submicron capacitors are in good agreement with the predictions from thermodynamic theory. The theory also describes very well the field dependence of the piezoresponse of clamped capacitors of key compositions on the tetragonal side of the PbZrxTi1\u2212xO3 phase diagram as well as the behavior of submicron PbZr0.2Ti0.8O3 (hard ferroelectric) capacitors. However, the field-dependent piezoresponse of submicron capacitors in compositions closer to the morphotropic phase boundary (soft ferroelectrics) is different from the behavior predicted by the theoretical calculations.</jats:p>",
  "DOI": "10.1063/1.1516857",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        11,
        21
      ]
    ],
    "date-time": "2002-11-21T19:21:52Z",
    "timestamp": 1037906512000
  },
  "page": "4215-4217",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 113,
  "title": "Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si",
  "prefix": "10.1063",
  "volume": "81",
  "author": [
    {
      "given": "V.",
      "family": "Nagarajan",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "A.",
      "family": "Stanishevsky",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "L.",
      "family": "Chen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "T.",
      "family": "Zhao",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "B.-T.",
      "family": "Liu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "J.",
      "family": "Melngailis",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "A. L.",
      "family": "Roytburd",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "R.",
      "family": "Ramesh",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Materials Research Science and Engineering Center, Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland\u200920742.3"
        }
      ]
    },
    {
      "given": "J.",
      "family": "Finder",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physical Sciences Research Laboratories, Motorola, Tempe, Arizona\u200985284"
        }
      ]
    },
    {
      "given": "Z.",
      "family": "Yu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physical Sciences Research Laboratories, Motorola, Tempe, Arizona\u200985284"
        }
      ]
    },
    {
      "given": "R.",
      "family": "Droopad",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physical Sciences Research Laboratories, Motorola, Tempe, Arizona\u200985284"
        }
      ]
    },
    {
      "given": "K.",
      "family": "Eisenbeiser",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physical Sciences Research Laboratories, Motorola, Tempe, Arizona\u200985284"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020323274977100_r1"
    },
    {
      "key": "2024020323274977100_r2",
      "doi-asserted-by": "crossref",
      "first-page": "136",
      "DOI": "10.1088/0960-1317/10/2/307",
      "volume": "10",
      "year": "2000",
      "journal-title": "J. Micromech. Microeng."
    },
    {
      "key": "2024020323274977100_r3",
      "doi-asserted-by": "crossref",
      "first-page": "1764",
      "DOI": "10.1063/1.357693",
      "volume": "76",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020323274977100_r4",
      "doi-asserted-by": "crossref",
      "first-page": "139",
      "DOI": "10.1080/10584589908215586",
      "volume": "24",
      "year": "1999",
      "journal-title": "Integr. Ferroelectr."
    },
    {
      "key": "2024020323274977100_r5",
      "doi-asserted-by": "crossref",
      "first-page": "5403",
      "DOI": "10.1143/JJAP.39.5403",
      "volume": "39",
      "year": "2000",
      "journal-title": "Jpn. J. Appl. Phys., Part 1"
    },
    {
      "key": "2024020323274977100_r6",
      "doi-asserted-by": "crossref",
      "first-page": "588",
      "DOI": "10.1063/1.370771",
      "volume": "86",
      "year": "1999",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020323274977100_r7",
      "doi-asserted-by": "crossref",
      "first-page": "119",
      "DOI": "10.1080/10584580108016924",
      "volume": "38",
      "year": "2001",
      "journal-title": "Integr. Ferroelectr."
    },
    {
      "key": "2024020323274977100_r8",
      "doi-asserted-by": "crossref",
      "first-page": "190",
      "DOI": "10.1103/PhysRevLett.85.190",
      "volume": "85",
      "year": "2000",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020323274977100_r9",
      "volume-title": "Mater. Res. Soc. Symp. Proc.",
      "year": "2001"
    },
    {
      "key": "2024020323274977100_r10",
      "first-page": "3195",
      "volume": "75",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020323274977100_r11",
      "doi-asserted-by": "crossref",
      "first-page": "595",
      "DOI": "10.1063/1.370772",
      "volume": "86",
      "year": "1999",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020323274977100_r12",
      "doi-asserted-by": "crossref",
      "first-page": "1336",
      "DOI": "10.1063/1.1325005",
      "volume": "89",
      "year": "2001",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020323274977100_r13",
      "doi-asserted-by": "crossref",
      "first-page": "97",
      "DOI": "10.1063/1.1428413",
      "volume": "80",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020323274977100_r14",
      "doi-asserted-by": "crossref",
      "first-page": "45",
      "DOI": "10.1080/00150198908221438",
      "volume": "99",
      "year": "1989",
      "journal-title": "Ferroelectrics"
    },
    {
      "key": "2024020323274977100_r15",
      "doi-asserted-by": "crossref",
      "first-page": "409",
      "DOI": "10.1063/1.124391",
      "volume": "75",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020323274977100_r16"
    },
    {
      "key": "2024020323274977100_r17"
    },
    {
      "key": "2024020323274977100_r18",
      "doi-asserted-by": "crossref",
      "first-page": "1698",
      "DOI": "10.1063/1.369338",
      "volume": "85",
      "year": "1999",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020323274977100_r19"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/81/22/4215/18572126/4215_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/81/22/4215/18572126/4215_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T23:28:03Z",
    "timestamp": 1707002883000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/81/22/4215/514317/Realizing-intrinsic-piezoresponse-in-epitaxial"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2002,
        11,
        25
      ]
    ]
  },
  "references-count": 19,
  "journal-issue": {
    "issue": "22",
    "published-print": {
      "date-parts": [
        [
          2002,
          11,
          25
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1516857",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2002,
        11,
        25
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2002,
        11,
        25
      ]
    ]
  }
}