DOI: 10.1063/1.1507841. Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering

Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering

10.1063/1.1507841

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosity range of ∼5–50%. The distribution in pore size was relatively broad and increases in breadth with porosity. The values and observations obtained by SAXS are in good agreement with field emission scanning electron microscopy.

Bibliography

Huang, E., Toney, M. F., Volksen, W., Mecerreyes, D., Brock, P., Kim, H.-C., Hawker, C. J., Hedrick, J. L., Lee, V. Y., Magbitang, T., Miller, R. D., & Lurio, L. B. (2002). Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering. Applied Physics Letters, 81(12), 2232â2234.

Authors 12

E. Huang (first)
M. F. Toney (additional)
W. Volksen (additional)
D. Mecerreyes (additional)
P. Brock (additional)
H.-C. Kim (additional)
C. J. Hawker (additional)
J. L. Hedrick (additional)
V. Y. Lee (additional)
T. Magbitang (additional)
R. D. Miller (additional)
L. B. Lurio (additional)

References 18 Referenced 72

10.1016/0032-3861(95)93599-H / Polymer (1995)
10.1002/(SICI)1521-4095(199809)10:13<1049::AID-ADMA1049>3.0.CO;2-F / Adv. Mater. (1998)
10.1021/cr00037a012 / Chem. Rev. (1995)
10.1002/1521-4095(200012)12:23<1769::AID-ADMA1769>3.0.CO;2-5 / Adv. Mater. (2000)
{'key': '2024020323030769800_r5', 'first-page': '1385', 'volume': '18', 'year': '2000', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (2000)
10.1103/PhysRevB.60.R5157 / Phys. Rev. B (1999)
10.1063/1.371174 / J. Appl. Phys. (1999)
10.1063/1.371997 / J. Appl. Phys. (2000)
{'key': '2024020323030769800_r9'}
10.1021/cm990114d / Chem. Mater. (1999)
{'key': '2024020323030769800_r11'}
10.1107/S0021889893013810 / J. Appl. Crystallogr. (1994)
10.1021/ma00139a013 / Macromolecules (1984)
10.1016/0304-8853(83)90407-9 / J. Magn. Magn. Mater. (1983)
10.1103/PhysRevLett.80.2386 / Phys. Rev. Lett. (1998)
10.1103/PhysRevLett.58.2718 / Phys. Rev. Lett. (1987)
10.1016/0022-2860(93)80141-H / J. Mol. Struct. (1993)
10.1021/ma960486x / Macromolecules (1997)

Dates

Type	When
Created	22 years, 11 months ago (Sept. 12, 2002, 11:29 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 6:03 p.m.)
Indexed	11 months, 4 weeks ago (Aug. 28, 2024, 7:52 a.m.)
Issued	22 years, 11 months ago (Sept. 16, 2002)
Published	22 years, 11 months ago (Sept. 16, 2002)
Published Print	22 years, 11 months ago (Sept. 16, 2002)

Funders 0

None

BibTeX

@article{Huang_2002, title={Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering}, volume={81}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1507841}, DOI={10.1063/1.1507841}, number={12}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Huang, E. and Toney, M. F. and Volksen, W. and Mecerreyes, D. and Brock, P. and Kim, H.-C. and Hawker, C. J. and Hedrick, J. L. and Lee, V. Y. and Magbitang, T. and Miller, R. D. and Lurio, L. B.}, year={2002}, month=sep, pages={2232–2234} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        8,
        28
      ]
    ],
    "date-time": "2024-08-28T11:52:46Z",
    "timestamp": 1724845966730
  },
  "reference-count": 18,
  "publisher": "AIP Publishing",
  "issue": "12",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2002,
        9,
        16
      ]
    ]
  },
  "abstract": "<jats:p>Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosity range of \u223c5\u201350%. The distribution in pore size was relatively broad and increases in breadth with porosity. The values and observations obtained by SAXS are in good agreement with field emission scanning electron microscopy.</jats:p>",
  "DOI": "10.1063/1.1507841",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        9,
        12
      ]
    ],
    "date-time": "2002-09-12T15:29:17Z",
    "timestamp": 1031844557000
  },
  "page": "2232-2234",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 72,
  "title": "Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering",
  "prefix": "10.1063",
  "volume": "81",
  "author": [
    {
      "given": "E.",
      "family": "Huang",
      "sequence": "first",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "M. F.",
      "family": "Toney",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "W.",
      "family": "Volksen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "D.",
      "family": "Mecerreyes",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "P.",
      "family": "Brock",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "H.-C.",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "C. J.",
      "family": "Hawker",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "J. L.",
      "family": "Hedrick",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "V. Y.",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "T.",
      "family": "Magbitang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "R. D.",
      "family": "Miller",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Almaden Research Center, 650 Harry Road, San Jose, California\u200995120"
        }
      ]
    },
    {
      "given": "L. B.",
      "family": "Lurio",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, Northern Illinois University, Dekalb, Illinois\u200960115"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020323030769800_r1",
      "doi-asserted-by": "crossref",
      "first-page": "987",
      "DOI": "10.1016/0032-3861(95)93599-H",
      "volume": "36",
      "year": "1995",
      "journal-title": "Polymer"
    },
    {
      "key": "2024020323030769800_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1049",
      "DOI": "10.1002/(SICI)1521-4095(199809)10:13<1049::AID-ADMA1049>3.0.CO;2-F",
      "volume": "10",
      "year": "1998",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "2024020323030769800_r3",
      "doi-asserted-by": "crossref",
      "first-page": "1409",
      "DOI": "10.1021/cr00037a012",
      "volume": "95",
      "year": "1995",
      "journal-title": "Chem. Rev."
    },
    {
      "key": "2024020323030769800_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1769",
      "DOI": "10.1002/1521-4095(200012)12:23<1769::AID-ADMA1769>3.0.CO;2-5",
      "volume": "12",
      "year": "2000",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "2024020323030769800_r5",
      "first-page": "1385",
      "volume": "18",
      "year": "2000",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020323030769800_r6",
      "doi-asserted-by": "crossref",
      "first-page": "R5157",
      "DOI": "10.1103/PhysRevB.60.R5157",
      "volume": "60",
      "year": "1999",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020323030769800_r7",
      "doi-asserted-by": "crossref",
      "first-page": "3104",
      "DOI": "10.1063/1.371174",
      "volume": "86",
      "year": "1999",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020323030769800_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1193",
      "DOI": "10.1063/1.371997",
      "volume": "87",
      "year": "2000",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020323030769800_r9"
    },
    {
      "key": "2024020323030769800_r10",
      "doi-asserted-by": "crossref",
      "first-page": "3080",
      "DOI": "10.1021/cm990114d",
      "volume": "11",
      "year": "1999",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "2024020323030769800_r11"
    },
    {
      "key": "2024020323030769800_r12",
      "doi-asserted-by": "crossref",
      "first-page": "595",
      "DOI": "10.1107/S0021889893013810",
      "volume": "27",
      "year": "1994",
      "journal-title": "J. Appl. Crystallogr."
    },
    {
      "key": "2024020323030769800_r13",
      "doi-asserted-by": "crossref",
      "first-page": "1712",
      "DOI": "10.1021/ma00139a013",
      "volume": "17",
      "year": "1984",
      "journal-title": "Macromolecules"
    },
    {
      "key": "2024020323030769800_r14",
      "doi-asserted-by": "crossref",
      "first-page": "91",
      "DOI": "10.1016/0304-8853(83)90407-9",
      "volume": "39",
      "year": "1983",
      "journal-title": "J. Magn. Magn. Mater."
    },
    {
      "key": "2024020323030769800_r15",
      "doi-asserted-by": "crossref",
      "first-page": "2386",
      "DOI": "10.1103/PhysRevLett.80.2386",
      "volume": "80",
      "year": "1998",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020323030769800_r16",
      "doi-asserted-by": "crossref",
      "first-page": "2718",
      "DOI": "10.1103/PhysRevLett.58.2718",
      "volume": "58",
      "year": "1987",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020323030769800_r17",
      "doi-asserted-by": "crossref",
      "first-page": "259",
      "DOI": "10.1016/0022-2860(93)80141-H",
      "volume": "296",
      "year": "1993",
      "journal-title": "J. Mol. Struct."
    },
    {
      "key": "2024020323030769800_r18",
      "doi-asserted-by": "crossref",
      "first-page": "130",
      "DOI": "10.1021/ma960486x",
      "volume": "30",
      "year": "1997",
      "journal-title": "Macromolecules"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/81/12/2232/18570144/2232_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/81/12/2232/18570144/2232_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T23:03:21Z",
    "timestamp": 1707001401000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/81/12/2232/114815/Pore-size-distributions-in-nanoporous-methyl"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2002,
        9,
        16
      ]
    ]
  },
  "references-count": 18,
  "journal-issue": {
    "issue": "12",
    "published-print": {
      "date-parts": [
        [
          2002,
          9,
          16
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.1507841",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2002,
        9,
        16
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2002,
        9,
        16
      ]
    ]
  }
}