DOI: 10.1063/1.1492304. Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques

Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques

10.1063/1.1492304

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

This paper concerns a scanning probe capable of simultaneously measuring topography and local electrochemistry at a sample surface. Our approach ensures the distance regulation of the electrode by maintaining a fixed working distance between the probe and the sample surface independent from the electrochemical response. This is achieved by integrating micro- and nanoelectrodes into atomic force microscopy tips using focused ion beam techniques. The feasibility and functionality of the fully featured tip is demonstrated by a simultaneous topographical and electrochemical measurement of a porous polymer membrane as model surface.

Bibliography

Lugstein, A., Bertagnolli, E., Kranz, C., Kueng, A., & Mizaikoff, B. (2002). Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques. Applied Physics Letters, 81(2), 349â351.

Authors 5

A. Lugstein (first)
E. Bertagnolli (additional)
C. Kranz (additional)
A. Kueng (additional)
B. Mizaikoff (additional)

References 12 Referenced 52

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{'key': '2024020322371825700_r2', 'first-page': '721', 'volume': '57', 'year': '2001', 'journal-title': 'Microelectron. Eng.'} / Microelectron. Eng. (2001)
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10.1063/1.1145568 / Rev. Sci. Instrum. (1995)
{'key': '2024020322371825700_r7', 'first-page': '145', 'volume': 'L64', 'year': '1998', 'journal-title': 'J. Electrochem. Soc.'} / J. Electrochem. Soc. (1998)
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{'key': '2024020322371825700_r10'}
{'key': '2024020322371825700_r11'}
{'key': '2024020322371825700_r12'}

Dates

Type	When
Created	23 years, 1 month ago (July 28, 2002, 6:05 p.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 5:37 p.m.)
Indexed	1 year, 2 months ago (June 5, 2024, 6:54 a.m.)
Issued	23 years, 1 month ago (July 8, 2002)
Published	23 years, 1 month ago (July 8, 2002)
Published Print	23 years, 1 month ago (July 8, 2002)

Funders 0

None

BibTeX

@article{Lugstein_2002, title={Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques}, volume={81}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1492304}, DOI={10.1063/1.1492304}, number={2}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Lugstein, A. and Bertagnolli, E. and Kranz, C. and Kueng, A. and Mizaikoff, B.}, year={2002}, month=jul, pages={349–351} }

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