Abstract
The structural and electrical properties of metalorganic chemical vapor deposition-grown Pb(Zr0.35Ti0.65)O3 thin films ranging in thickness from 700 to 4000 Å have been investigated. Cross-sectional scanning electron microscopy showed that these films are columnar, with grains extending through the thickness of the film. High-resolution x-ray diffraction showed that while the thickest films are tetragonal, with reflections corresponding to a-type and c-type domains, films thinner than 1500 Å are not. Electron backscatter diffraction and hysteresis loop measurements showed that the thinnest films are ferroelectric and have a rhombohedral crystal structure.
References
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Dates
Type | When |
---|---|
Created | 23 years, 1 month ago (July 26, 2002, 9:24 a.m.) |
Deposited | 1 year, 6 months ago (Feb. 3, 2024, 4:49 p.m.) |
Indexed | 1 year, 6 months ago (Feb. 7, 2024, 6:55 p.m.) |
Issued | 23 years, 6 months ago (Feb. 18, 2002) |
Published | 23 years, 6 months ago (Feb. 18, 2002) |
Published Print | 23 years, 6 months ago (Feb. 18, 2002) |
@article{Kelman_2002, title={Thickness-dependent phase evolution of polycrystalline Pb(Zr0.35Ti0.65)O3 thin films}, volume={80}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1449532}, DOI={10.1063/1.1449532}, number={7}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Kelman, Maxim B. and Schloss, Lawrence F. and McIntyre, Paul C. and Hendrix, Bryan C. and Bilodeau, Steven M. and Roeder, Jeffrey F.}, year={2002}, month=feb, pages={1258–1260} }