DOI: 10.1063/1.1383805. Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication

Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication

10.1063/1.1383805

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We combine a self-organizing diblock copolymer system with semiconductor processing to produce silicon capacitors with increased charge storage capacity over planar structures. Our process uses a diblock copolymer thin film as a mask for dry etching to roughen a silicon surface on a 30 nm length scale, which is well below photolithographic resolution limits. Electron microscopy correlates measured capacitance values with silicon etch depth, and the data agree well with a geometric estimate. This block copolymer nanotemplating process is compatible with standard semiconductor processing techniques and is scalable to large wafer dimensions.

Bibliography

Black, C. T., Guarini, K. W., Milkove, K. R., Baker, S. M., Russell, T. P., & Tuominen, M. T. (2001). Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication. Applied Physics Letters, 79(3), 409â411.

Authors 6

C. T. Black (first)
K. W. Guarini (additional)
K. R. Milkove (additional)
S. M. Baker (additional)
T. P. Russell (additional)
M. T. Tuominen (additional)

References 15 Referenced 330

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:44 a.m.)
Deposited	1 year, 6 months ago (Feb. 3, 2024, 3:27 p.m.)
Indexed	3 months, 3 weeks ago (May 3, 2025, 1:10 a.m.)
Issued	24 years, 1 month ago (July 16, 2001)
Published	24 years, 1 month ago (July 16, 2001)
Published Print	24 years, 1 month ago (July 16, 2001)

Funders 0

None

BibTeX

@article{Black_2001, title={Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication}, volume={79}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1383805}, DOI={10.1063/1.1383805}, number={3}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Black, C. T. and Guarini, K. W. and Milkove, K. R. and Baker, S. M. and Russell, T. P. and Tuominen, M. T.}, year={2001}, month=jul, pages={409–411} }

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