Abstract
Transparent conducting indium tin oxide (ITO) thin films were grown by pulsed laser deposition (PLD) on flexible polyethylene terephthalate (PET) substrates. The structural, electrical, and optical properties of these films were investigated as a function of substrate deposition temperature and background gas pressure. ITO films (200 nm thick), deposited by PLD on PET at 25 °C and 45 mTorr of oxygen, exhibit high optical transparency (∼87%) in the visible (400–700 nm) with a low electrical resistivity of 7×10−4 Ω cm. ITO films grown by PLD on PET were used as the anode contact in organic light-emitting devices. A luminous power efficiency of ∼1.6 lm/W was achieved at 100 cd/m2, slightly higher than that (∼1.5 lm/W) measured for the control device based on a sputter-deposited ITO on glass.
References
20
Referenced
232
{'key': '2024020320275896400_r1'}
{'key': '2024020320275896400_r2', 'first-page': '275', 'volume': '5/3', 'year': '1997', 'journal-title': 'J. Soc. Inf. Disp.'}
/ J. Soc. Inf. Disp. (1997)10.1038/357477a0
/ Nature (London) (1992)10.1016/0379-6779(93)90568-H
/ Synth. Met. (1993)10.1364/OL.22.000172
/ Opt. Lett. (1997){'key': '2024020320275896400_r5', 'first-page': '33', 'volume': '488', 'year': '1998', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'}
/ Mater. Res. Soc. Symp. Proc. (1998)10.1063/1.125854
/ Appl. Phys. Lett. (2000)10.1016/0040-6090(95)06889-9
/ Thin Solid Films (1995)10.1016/S0040-6090(97)00203-4
/ Thin Solid Films (1997)10.1116/1.581133
/ J. Vac. Sci. Technol. A (1998){'key': '2024020320275896400_r10'}
10.1063/1.124122
/ Appl. Phys. Lett. (1999)10.1063/1.371708
/ J. Appl. Phys. (1999)10.1007/s003390051435
/ Appl. Phys. A: Mater. Sci. Process. (1999)10.1109/2944.669481
/ IEEE J. Sel. Top. Quantum Electron. (1998)10.1117/12.332602
/ Proc. SPIE (1998){'key': '2024020320275896400_r16'}
10.1016/0025-5408(81)90046-5
/ Mater. Res. Bull. (1981)10.1103/PhysRevB.48.7554
/ Phys. Rev. B (1993)10.1016/S0040-6090(96)09105-5
/ Thin Solid Films (1997)
Dates
Type | When |
---|---|
Created | 23 years, 1 month ago (July 26, 2002, 9:26 a.m.) |
Deposited | 1 year, 6 months ago (Feb. 3, 2024, 3:28 p.m.) |
Indexed | 51 minutes ago (Aug. 29, 2025, 2:46 a.m.) |
Issued | 24 years, 1 month ago (July 16, 2001) |
Published | 24 years, 1 month ago (July 16, 2001) |
Published Print | 24 years, 1 month ago (July 16, 2001) |
@article{Kim_2001, title={Indium tin oxide thin films grown on flexible plastic substrates by pulsed-laser deposition for organic light-emitting diodes}, volume={79}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.1383568}, DOI={10.1063/1.1383568}, number={3}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Kim, H. and Horwitz, J. S. and Kushto, G. P. and Kafafi, Z. H. and Chrisey, D. B.}, year={2001}, month=jul, pages={284–286} }